Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system.

The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer-Zernike theory allows the retrieval of the complex pupil function of the imaging system, including aberrations as well as transmission variations. However, the applicability of the scalar analysis is limited to systems with a numerical aperture (NA) value of the order of 0.60 or less; beyond these values polarization effects become significant. In this scalar retrieval method, the complex pupil function is represented by means of the coefficients of its expansion in a series involving the Zernike polynomials. This representation is highly efficient, in terms of number and magnitude of the required coefficients, and lends itself quite well to matching procedures in the focal region. This distinguishes the method from the retrieval schemes in the literature, which are normally not based on Zernike-type expansions, and rather rely on point-by-point matching procedures. In a previous paper [J. Opt. Soc. Am. A 20, 2281 (2003)] we have incorporated the extended Nijboer-Zernike approach into the Ignatowsky-Richards/Wolf formalism for the vectorial treatment of optical systems with high NA. In the present paper we further develop this approach by defining an appropriate set of functions that describe the energy density distribution in the focal region. Using this more refined analysis, we establish the set of equations that allow the retrieval of aberrations and birefringence from the intensity point-spread function in the focal volume for high-NA systems. It is shown that one needs four analyses of the intensity distribution in the image volume with different states of polarization in the entrance pupil. Only in this way will it be possible to retrieve the "vectorial" pupil function that includes the effects of birefringence induced by the imaging system. A first numerical test example is presented that illustrates the importance of using the vectorial approach and the correct NA value in the aberration retrieval scheme.

Extended Nijboer-Zernike representation of the vector field in the focal region of an aberrated high-aperture optical system.

Taking the classical Ignatowsky/Richards and Wolf formulas as our starting point, we present expressions for the electric field components in the focal region in the case of a high-numerical-aperture optical system. The transmission function, the aberrations, and the spatially varying state of polarization of the wave exiting the optical system are represented in terms of a Zernike polynomial expansion over the exit pupil of the system; a set of generally complex coefficients is needed for a full description of the field in the exit pupil. The field components in the focal region are obtained by means of the evaluation of a set of basic integrals that all allow an analytic treatment; the expressions for the field components show an explicit dependence on the complex coefficients that characterize the optical system. The electric energy density and the power flow in the aberrated three-dimensional distribution in the focal region are obtained with the expressions for the electric and magnetic field components. Some examples of aberrated focal distributions are presented, and some basic characteristics are discussed.

Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions.

We assess the validity of an extended Nijboer-Zernike approach [J. Opt. Soc. Am. A 19, 849 (2002)], based on ecently found Bessel-series representations of diffraction integrals comprising an arbitrary aberration and a defocus part, for the computation of optical point-spread functions of circular, aberrated optical systems. These new series representations yield a flexible means to compute optical point-spread functions, both accurately and efficiently, under defocus and aberration conditions that seem to cover almost all cases of practical interest. Because of the analytical nature of the formulas, there are no discretization effects limiting the accuracy, as opposed to the more commonly used numerical packages based on strictly numerical integration methods. Instead, we have an easily managed criterion, expressed in the number of terms to be included in the Bessel-series representations, guaranteeing the desired accuracy. For this reason, the analytical method can also serve as a calibration tool for the numerically based methods. The analysis is not limited to pointlike objects but can also be used for extended objects under various illumination conditions. The calculation schemes are simple and permit one to trace the relative strength of the various interfering complex-amplitude terms that contribute to the final image intensity function.