Ultralow birefringent glass waveguide fabricated by femtosecond laser direct writing.

Optical waveguides prepared by femtosecond laser direct writing have birefringent properties, which can affect polarization encoding and entanglement on chips. Here, we first propose a shape-stress dual compensation fabrication scheme to decrease birefringence. Ultralow birefringent waveguides (1 × 10-9) were obtained by controlling the cross sectional shape of the main waveguide and adjusting the position of the auxiliary lines. In addition, we prepared polarization-independent directional coupler and demonstrated the evolution of polarization-independent waveguide array with different polarized light. In the future, ultralow birefringent waveguides will be widely applied in polarization encoding and entangled quantum photonic integrated circuits.

High-quality rapid laser drilling of transparent hard materials.

In this study, a hybrid method for high-quality rapid drilling of transparent hard materials which combines femtosecond laser (fs-laser) Bessel beam modifying materials and selective wet etching is presented. Using this method, micro-holes with no taper of different sizes (from 10 to 35 µm) and shapes (square, triangle, circular, and pentagram) are fabricated. Bessel beams of different lengths can be generated flexibly by loading different computer-generated holograms (CGHs) into the spatial light modulator (SLM) and the maximum length of light interacting with materials can reach 320 µm, leading to a reduction of the laser scanning time by two orders of magnitude. Moreover, a set of three-dimensional multi-layer submicron through-holes in crystal materials is also realized, with an aspect ratio of more than 1000 for each hole. These results indicate that this method has broad application potential in chip packaging, aviation manufacturing, single particle catalysis, and other fields.

Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing.

Recently, optical sensors interacting with evanescent fields and the external environment around waveguides have attracted extensive attention. In the process of light propagation in the waveguide, the depth of the evanescent field is closely related to the accuracy of the optical sensor, and adjusting the depth of the evanescent field to obtain higher accuracy has become the primary challenge in fabricating on-chip optical sensors. In this study, the waveguide structure of a Mach-Zehnder interferometer was written directly in Corning Eagle 2000 borosilicate glass by a femtosecond laser, and the sensing window was exposed out of the bulk material by mechanical polishing. The refractive index detection device based on the proposed on-chip Mach-Zehnder interferometer has the advantages of small volume, light weight, and good stability. Its sensitivity can reach 206 nm/RIU or 337 dB/RIU, and the theoretical maximum measurement range is 1-1.508. Therefore, it can measure the refractive index quickly and accurately in extreme or complex environments, and has excellent application prospects.

Machine vision-based high-precision and robust focus detection for femtosecond laser machining.

We propose a machine vision-based focus detection method (MVFD) for femtosecond laser machining. By analyzing the laser focus pattern, the defocus direction and distance are obtained simultaneously. The proposed technique presents high precision with an average error of 0.047 µm and a root mean square error (RMSE) of 0.055 µm. Moreover, the method is robust and is less affected by the tilted sample. For the curved surface sample, the average error and RMSE are 0.093 and 0.145 µm, respectively. Thus, the proposed focus detection method can be easily combined with laser processing equipment, which is widely used in large-range and high-precision femtosecond laser processing.