Carbon nanotube network varactor.

Microelectromechanical system (MEMS) varactors based on a freestanding layer of single-walled carbon nanotube (SWCNT) films were designed, fabricated and tested. The freestanding SWCNT film was employed as a movable upper patch in the parallel plate capacitor of the MEMS. The measurements of the SWCNT varactors show very high tunability, nearly 100%, of the capacitance with a low actuation voltage of 10 V. The functionality of the varactor is improved by implementing a flexible nanocellulose aerogel filling.

Focused ion beam lithography for fabrication of suspended nanostructures on highly corrugated surfaces.

We propose a nanofabrication method that allows for patterning on extremely corrugated surfaces with micrometer-size features. The technique employs focused ion beam nanopatterning of ion-sensitive inorganic resists formed by atomic layer deposition at low temperature. The nanoscale resolution on corrugated surfaces is ensured by inherently large depth of focus of a focused ion beam system and very uniform resist coating. The utilized TiO2 and Al2O3 resists show high selectivity in deep reactive ion etching and enable the release of suspended nanostructures by dry etching. We demonstrate the great flexibility of the process by fabricating suspended nanostructures on flat surfaces, inclined walls, and on the bottom of deep grooves.

Towards broad-bandwidth polarization-independent nanostrip waveguide ring resonators.

We demonstrate a new method for accessing the broad-bandwidth polarization-independent operation of a microring resonator based on the standard photonic nanostrip waveguides. The method employs the selective application of atomic layer deposition to form highly uniform TiO(2) overlayers with the specific dispersion properties. The wide operation window is achieved by matching the wavelength dependencies of the free spectral ranges of the two orthogonal polarizations.