Shaping with fluid jet polishing by footprint optimization.

We report on a way to shape surfaces with fluid jet polishing by adjusting the influence function (the shape of the footprint of the nozzle) instead of changing the dwell time of the nozzle on the surface. In that way, the surface is processed homogeneously, and no dip is generated in the center of the workpiece. As a proof of this approach, a lambda/10 flat surface has been generated in our laboratory.

iTIRM as a tool for qualifying polishing processes.

We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston's law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.