Intracortical probe arrays with silicon backbone and microelectrodes on thin polyimide wings enable long-term stable recordingsin vivo.

Objective.Recording and stimulating neuronal activity across different brain regions requires interfacing at multiple sites using dedicated tools while tissue reactions at the recording sites often prevent their successful long-term application. This implies the technological challenge of developing complex probe geometries while keeping the overall footprint minimal, and of selecting materials compatible with neural tissue. While the potential of soft materials in reducing tissue response is uncontested, the implantation of these materials is often limited to reliably target neuronal structures across large brain volumes.Approach.We report on the development of a new multi-electrode array exploiting the advantages of soft and stiff materials by combining 7-µm-thin polyimide wings carrying platinum electrodes with a silicon backbone enabling a safe probe implantation. The probe fabrication applies microsystems technologies in combination with a temporal wafer fixation method for rear side processing, i.e. grinding and deep reactive ion etching, of slender probe shanks and electrode wings. The wing-type neural probes are chronically implanted into the entorhinal-hippocampal formation in the mouse forin vivorecordings of freely behaving animals.Main results.Probes comprising the novel wing-type electrodes have been realized and characterized in view of their electrical performance and insertion capability. Chronic electrophysiologicalin vivorecordings of the entorhinal-hippocampal network in the mouse of up to 104 days demonstrated a stable yield of channels containing identifiable multi-unit and single-unit activity outperforming probes with electrodes residing on a Si backbone.Significance.The innovative fabrication process using a process compatible, temporary wafer bonding allowed to realize new Michigan-style probe arrays. The wing-type probe design enables a precise probe insertion into brain tissue and long-term stable recordings of unit activity due to the application of a stable backbone and 7-µm-thin probe wings provoking locally a minimal tissue response and protruding from the glial scare of the backbone.

Temperature coefficient of frequency modeling for CMOS-MEMS bulk mode composite resonators.

CMOS-MEMS resonators, which are promising building blocks for achieving monolithic integration of MEMS structure, can be used for timing and filtering applications, and control circuitry. SiO2 has been used to make MEMS resonators with quality factor Q > 10(4), but temperature instability remains a major challenge. In this paper, a design that uses an embedded metal block for temperature compensation is proposed and shows sub-ppm temperature stability (-0.21 ppm/K). A comprehensive analytical model is derived and applied to analyze and optimize the temperature coefficient of frequency (TCF) of the CMOS-MEMS composite material resonator. Comparison with finite element method simulation demonstrates good accuracy. The model can also be applied to predict and analyze the TCF of MEMS resonators with arbitrary mode shape, and its integration with simulation packages enables interactive and efficient design process.

Carbon nanotube alignment driven rapid actuations.

Suspended micro-beams made from aligned carbon nanotubes and parylene deflect reversibly in an ac field and the deflection rate is three orders of magnitude greater than those for existing devices. The direction of beam deflection is determined by the area moment of inertia and the actuation mechanism involves rapid accumulation of charges at tube surfaces, the creation of Coulomb repulsive forces between tubes, beam dilation and the formation of compressive stresses at beam ends. Tube alignment plays a crucial role in the first step as is verified by experimental data and calculation.

Development of 3D carbon nanotube interdigitated finger electrodes on polymer substrate for flexible capacitive sensor application.

This study reports a novel approach to the implementation of 3D carbon nanotube (CNT) interdigitated finger electrodes on flexible polymer, and the detection of strain, bending curvature, tactile force and proximity distance are demonstrated. The merits of the presented CNT-based flexible sensor are as follows: (1) the silicon substrate is patterned to enable the formation of 3D vertically aligned CNTs on the substrate surface; (2) polymer molding on the silicon substrate with 3D CNTs is further employed to transfer the 3D CNTs to the flexible polymer substrate; (3) the CNT-polymer composite (~70 µm in height) is employed to form interdigitated finger electrodes to increase the sensing area and initial capacitance; (4) other structures such as electrical routings, resistors and mechanical supporters are also available using the CNT-polymer composite. The preliminary fabrication results demonstrate a flexible capacitive sensor with 50 µm high CNT interdigitated electrodes on a poly-dimethylsiloxane substrate. The tests show that the typical capacitance change is several dozens of fF and the gauge factor is in the range of 3.44-4.88 for strain and bending curvature measurement; the sensitivity of the tactile sensor is 1.11% N(-1); a proximity distance near 2 mm away from the sensor can be detected.

Development of stretchable membrane based nanofilters using patterned arrays of vertically grown carbon nanotubes.

A unique process which utilizes membrane based vertically grown carbon nanotubes (CNTs) as nanofilters for a mass transport study is presented here. By using ions, ss-DNA and haemagglutinin as testing molecules of different dimensions, the mass transport function of the CNT membrane is investigated under pressure difference and/or electric field.

Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate.

This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 µm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is -42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB) under 6 V pumping voltage, the frequency response is 100 Hz-10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 µA, and low distortion of less than 1% (referred to 100 dB).

Integration of silicon-via electrodes with different recording characteristics on a glass microprobe using a glass reflowing process.

Electrodes on planar type microelectromechanical system (MEMS) microprobes mainly record neurons on the top-side of probe shaft (called a top-side electrode). However, it is often necessary to record neurons other than those on the top-side of the probe shaft. This study uses the glass reflowing technique to embed silicon-vias in a glass probe to implement a microprobe capable of recording neurons around the shaft. The proposed technology makes it possible to fabricate, distribute, and integrate four types of electrodes on the shaft: top-side, back-side, double-side, and sidewall electrodes. These electrodes have different recording characteristics. The in vitro and in vivo (using crayfish and rat brain) experiments in this study shows that the top-side and back-side electrodes are respectively more sensitive to neurons on the top-side and back-side of the probe shaft. In contrast, signals recorded by double-side electrode and sidewall electrode are equally sensitive to neurons around the probe shaft. This study enables the implementation and integration of these four types of electrodes, meeting the requirements of various neural applications.

A cone-shaped 3D carbon nanotube probe for neural recording.

A novel cone-shaped 3D carbon nanotube (CNT) probe is proposed as an electrode for applications in neural recording. The electrode consists of CNTs synthesized on the cone-shaped Si (cs-Si) tip by catalytic thermal chemical vapor deposition (CVD). This probe exhibits a larger CNT surface area with the same footprint area and higher spatial resolution of neural recording compared to planar-type CNT electrodes. An approach to improve CNT characteristics by O(2) plasma treatment to modify the CNT surface will be also presented. Electrochemical characterization of O(2) plasma-treated 3D CNT (OT-CNT) probes revealed low impedance per unit area (∼64.5 Ω mm(-2)) at 1 kHz and high specific capacitance per unit area (∼2.5 mF cm(-2)). Furthermore, the OT-CNT probes were employed to record the neural signals of a crayfish nerve cord. Our findings suggest that OT-CNT probes have potential advantages as high spatial resolution and superb electrochemical properties which are suitable for neural recording applications.

Liquid crystal alignment in nanoporous anodic aluminum oxide layer for LCD panel applications.

This paper reports the implementation and integration of a self-assembled nanoporous anodic aluminum oxide (np-AAO) film and liquid crystal (LC) on an ITO-glass substrate for liquid crystal display (LCD) panel applications. An np-AAO layer with a nanopore array acts as the vertical alignment layer to easily and uniformly align the LC molecules. Moreover, the np-AAO nanoalignment layer provides outstanding material properties, such as being inorganic with good transmittance, and colorless on ITO-glass substrates. In this application, an LCD panel, with the LC on the np-AAO nanoalignment layer, is successfully implemented on an ITO-glass substrate, and its performance is demonstrated. The measurements show that the LCD panel, consisting of an ITO-glass substrate and an np-AAO layer, has a transmittance of 60-80%. In addition, the LCD panel switches from a black state to a bright state at 3 V(rms), with a response time of 62.5 ms. In summary, this paper demonstrates the alignment of LC on an np-AAO layer for LCD applications.

Oscillation induced worm-like locomotion of carbon nanotubes.

Harmonic oscillation of a doubly clamped single-walled carbon nanotube rope is significantly damped by the resistive force of friction at intertube contacts and the energy transmission rate has been estimated to be lower than that on a metal wire excited at similar frequency and vibrating length by one order of magnitude.

A lab-on-a-chip platform for studying the subcellular functional proteome of neuronal axons.

Axons are long, slender processes extending from the cell bodies of neurons and play diverse and crucial roles in the development and function of nervous systems. Here, we describe the development of a chip device that can be used to produce large quantities of axons for proteomic and RNA analyses. On the chip surface, bundles of axons of rat hippocampal neurons in culture are guided to grow in areas distinct and distant from where their cell bodies reside. Fluorescence immunocytochemical studies have confirmed that the areas where these axons are guided to grow are occupied exclusively by axons and not by neuronal somatodendrites or astroglial cells. These axon-occupied parts are easily separated from the remainder of the chip and collected by breaking the chip along the well-positioned linear grooves made on the backside. One- and two-dimensional gel electrophoresis and Western blotting analyses reveal that the axons and whole cells differ in their protein compositions. RT-PCR analyses also indicate that the axons contain only a subset of neuronal RNAs. Furthermore, the chip device could be easily modified to address other issues concerning neuronal axons, such as the molecular composition of the axon substructure, the growth cone and shaft, the degeneration and regeneration processes associated with injured axons and the effects of extrinsic molecules, such as axon guidance cues and cell adhesion molecules, on the axon. With these diverse applications, the chip device described here will serve as a powerful platform for studying the functional proteome of neuronal axons.

Batch-fabricated flexible carbon nanotubes' photosensor array.

This study reports a flexible carbon nanotubes' (fCNTs) photosensor for light detection. The fCNTs photosensor is batch-fabricated using micromachining processes. In this device, CNTs (carbon nanotubes) are embedded into the flexible Parylene-C film using a batch micromachining process. Through this fabrication process, CNTs act as the component for light detection, and Parylene-C provides the flexibility of the device. In application, the fCNTs photosensor is implemented. The photocurrent response measurements indicate that the presented fCNTs photosensor operated as a function of heterostructure interface, pressure, light intensity and bias voltage under red laser illumination. The quantum efficiency of the fabricated fCNTs device is about 0.063% at atmospheric pressure, and becomes 1.93% in a vacuum of 3 mTorr. Thus, the presented fCNTs device has the potential for photosensor application. The position detection of a light source using the fCNTs photosensor array has also been demonstrated.

Novel glass microprobe arrays for neural recording.

The probe array is a useful tool for neurophysiology to detect and record neural signals. Thus, the better understanding of neural systems can be achieved. Microfabricated probes have been widely used since fine-spacing probes with well-defined electrodes in smaller footprint can be created. This study presents a novel process to realize glass 2D-microprobe array. Dielectric material like glass can provide better signal isolation capability and biocompatibility. The through silicon vias (TSVs) can also be integrated with the glass 2D-microprobe using the micromachining process. The vertical integration of chips containing glass 2D-microprobe array is realized using these silicon TSVs. The 3D-microprobe array can be easily implemented after vertical assembly of 2D-microprobe chips using bonding. In application, the 2D glass microprobe is fabricated and characterized with a low impedance of 439 kOmega at 1 kHz. The action potential of crayfish's nerve cord has successfully been recorded using the glass microprobe with peak-to-peak amplitude of 228 muV, and SNR of 46.42. The spontaneous spike of rat's cortex has also been recorded by the glass microprobe with peak-to-peak amplitude of 90 muV, and SNR of 19.72.

Flexible carbon nanotubes electrode for neural recording.

This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance is realized. In application, the flexible CNTs electrode has been employed to record the neural signal of a crayfish nerve cord for in vitro recording. The measurements demonstrate the superior performance of the presented flexible CNTs electrode with low impedance (11.07 kohms at 1 kHz) and high peak-to-peak amplitude action potential (about 410 microV). In addition, the signal-to-noise ratio (SNR) of the presented flexible CNTs electrode is about 257, whereas the SNR of the reference (a pair of Teflon-coated silver wires) is only 79. The simultaneous recording of the flexible CNTs electrode array is also demonstrated. Moreover, the flexible CNTs electrode has been employed to successfully record the spontaneous spikes from the crayfish nerve cord. The amplitude of the spontaneous peak-to-peak response is about 25 microV.

An exceptional bimorph effect and a low quality factor from carbon nanotube-polymer composites.

Microcantilever actuators made from carbon nanotube polymer are driven at very low pull-in voltages and the thermal bimorph effect reaches 325 microm at 26-110 degrees C, much greater than the values for existing devices.

Studying the formation of large cell aggregates in patterned neuronal cultures.

Patterned neuronal cultures could be produced by plating cells dissociated from rat cortices on glass coverslips, the surface of which was printed with poly-L-lysine (PLL)-positive micropatterns. Large cell aggregates, which greatly disrupted the patterned distribution of neurons, were also generated. To investigate how large cell aggregates were formed, dissociated rat cortical neurons were plated on PLL-coated coverslips in a Petri dish, the surface of which was non-adherent to cells. The cell and cell aggregate densities found later on the coverslip surface increased significantly when larger dishes were used. Most of the neurons not attaching to substratum were able to survive for at least 24h without entering apoptosis. During this time they formed floating spherical aggregates in the medium. These aggregates subsequently were able to attach to PLL-coated coverslips and produced large aggregates resembling those found within our patterned neuronal cultures. The results suggest a causative relationship between the generation of large numbers of neurons unattached to substratum and the formation of large cell aggregates on the patterned neuronal cultures. It was further demonstrated here that patterned neuronal cultures free of large cell aggregates could be prepared by a procedure employing both stencil patterning and microcontact printing technologies.