Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model.

Metal-organic chemical vapour deposition (MOCVD) is a key technique for fabricating GaN thin film structures for light-emitting and semiconductor laser diodes. Film uniformity is an important index to measure equipment performance and chip processes. This paper introduces a method to improve the quality of thin films by optimizing the rotation speed of different substrates of a model consisting of a planetary with seven 6-inch wafers for the planetary GaN-MOCVD. A numerical solution to the transient state at low pressure is obtained using computational fluid dynamics. To evaluate the role of the different zone speeds on the growth uniformity, single factor analysis is introduced. The results show that the growth rate and uniformity are strongly related to the rotational speed. Next, a response surface model was constructed by using the variables and the corresponding simulation results. The optimized combination of the matching of different speeds is also proposed as a useful reference for applications in industry, obtained by a response surface model and genetic algorithm with a balance between the growth rate and the growth uniformity. This method can save time, and the optimization can obtain the most uniform and highest thin film quality.

Phase transition and in situ construction of lateral heterostructure of 2D superconducting α/ß Mo2C with sharp interface by electron beam irradiation.

Lateral heterostructures of 2D materials have several interesting properties and potential applications, and they are usually fabricated by chemical vapor deposition. However, it still remains a great challenge to fabricate 2D lateral heterostructures with well-controlled patterns and sharp interfaces. Herein, we found that the 2D α-Mo2C crystal, a recently emerging 2D superconductor, experiences a phase transition from the α phase to ß phase on electron beam irradiation in a transmission electron microscope because of the migration of carbon atoms among the molybdenum octahedrons. Combined with first-principles calculations, the carbon atom migration paths and the corresponding energy barriers were discussed. Utilizing this unique phase transition property of 2D α-Mo2C crystal, we demonstrated the precise in situ construction of the lateral heterostructure of 2D superconducting α/ß Mo2C with a well-controlled pattern and sharp interface using advanced aberration-corrected scanning transmission electron microscopy.

Circular Graphene Platelets with Grain Size and Orientation Gradients Grown by Chemical Vapor Deposition.

Monolayer circular graphene platelets with a grain structure gradient in the radial direction are synthesized by chemical vapor deposition on immiscible W-Cu substrates. Because of the different interactions and growth behaviors of graphene on Cu and tungsten carbide, such substrates cause the formation of grain size and orientation gradients through the competition between Cu and tungsten carbide in graphene growth.