3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance.

Due to their high-power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, their fabrication remains confined to 2D thin-film microdevices with limited areal energy. In this study, the integration of all-solid-state 3D interdigitated microsupercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm-2 per footprint area at an energy density of 329 mJ cm-2 , which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power density trade-offs and address the issue of electrical energy storage of modern electronics.

3D RuO2 Microsupercapacitors with Remarkable Areal Energy.

Large areal capacitance electrodes made of ruthenium oxide on highly porous gold current collectors are realized by an attractive approach. The hybrid structure exhibits a capacitance in excess of 3 F cm(-2) and an areal energy density for all-solid-state microsupercapacitors that is comparable to those of microbatteries.