Toward applications of near-field radiative heat transfer with micro-hotplates.

Bringing bodies close together at sub-micron distances can drastically enhance radiative heat transfer, leading to heat fluxes greater than the blackbody limit set by Stefan-Boltzmann law. This effect, known as near-field radiative heat transfer (NFRHT), has wide implications for thermal management in microsystems, as well as technological applications such as direct heat to electricity conversion in thermophotovoltaic cells. Here, we demonstrate NFRHT from microfabricated hotplates made by surface micromachining of [Formula: see text]/[Formula: see text] thin films deposited on a sacrificial amorphous Si layer. The sacrificial layer is dry etched to form wide membranes ([Formula: see text]) separated from the substrate by nanometric distances. Nickel traces allow both resistive heating and temperature measurement on the micro-hotplates. We report on two samples with measured gaps of [Formula: see text] and [Formula: see text]. The membranes can be heated up to [Formula: see text] under vacuum with no mechanical damage. At [Formula: see text] we observed a 6.4-fold enhancement of radiative heat transfer compared to far-field emission for the smallest gap and a 3.5-fold enhancement for the larger gap. Furthermore, the measured transmitted power exhibits an exponential dependence with respect to gap size, a clear signature of NFRHT. Calculations of photon transmission probabilities indicate that the observed increase in heat transfer can be attributed to near-field coupling by surface phonon-polaritons supported by the [Formula: see text] films. The fabrication process presented here, relying solely on well-established surface micromachining technology, is a key step toward integration of NFRHT in industrial applications.

Extreme temperature stability of thermally insulating graphene-mesoporous-silicon nanocomposite.

We demonstrate the thermal stability and thermal insulation of graphene-mesoporous-silicon nanocomposites (GPSNC). By comparing the morphology of GPSNC carbonized at 650 °C as-formed to that after annealing, we show that this nanocomposite remains stable at temperatures as high as 1050 °C due to the presence of a few monolayers of graphene coating on the pore walls. This does not only make this material compatible with most thermal processes but also suggests applications in harsh high temperature environments. The thermal conductivity of GPSNCs carbonized at temperatures in the 500 °C-800 °C range is determined through Raman spectroscopy measurements. They indicate that the thermal conductivity of the composite is lower than that of silicon, with a value of 13 ± 1 W mK-1 at room temperature, and not affected by the thin graphene layer, suggesting a role of the high concentration of carbon related-defects as indicated by the high intensity of the D-band compared to G-band of the Raman spectra. This morphological stability at high temperature combined with a high thermal insulation make GPSNC a promising candidate for a broad range of applications including microelectromechanical systems and thermal effect microsystems such as flow sensors or IR detectors. Finally, at 120 °C, the thermal conductivity remains equal to that at room temperature, attesting to the potential of using our nanocomposite in devices that operate at high temperatures such as microreactors for distributed chemical conversion, solid oxide fuel cells, thermoelectric devices or thermal micromotors.