Effects of COVID-19 on a CMOS fabrication course: An integrated design experience.

In the CMOS fabrication course described herein, the lecture component provides the theoretical background for semiconductor materials and integrated circuit fabrication processes. The laboratory component provides the hands-on experience required to fabricate and electrically characterize CMOS circuits in a one-semester format. A strong semiconductor device process design thread is achieved in the course by integrating the laboratory experience and process simulation/modeling and theoretical calculations. The risks associated with the COVID-19 pandemic have forced significant course modifications. The lecture is switched to a remote learning format, including pre-recorded content and weekly advanced Q&A sessions. The laboratory provides both in-person and remote sessions. Approved social distancing and cleaning protocols are practiced in the facility for in-person learning. Complementary remote learning resources are made available to all the students such as pre-recorded laboratory instructions, live video-based laboratory sessions, and web-based supplementary information. Compared to pre-pandemic semesters, the average students' GPA of the pandemic period has increased, attributed to larger and archived volumes of instructional material. Overall student comments related to course changes necessitated by the pandemic are mixed with both positive and negative feedback.

Six-stage cascade paramagnetic mode magnetophoretic separation system for human blood samples.

This paper is focused on the development of a six-stage cascade paramagnetic mode magnetophoretic separation (PMMS) system for separating suspended cells in blood based on their native magnetic properties. The design and fabrication of a PMMS system are presented and the microfluidic separation system is characterized experimentally using human whole blood as the case study. The PMMS system can separate blood cells types continuously using the magnetophoretic force produced from a high magnetic field gradient without magnetic or fluorescent tagging. Experimental results demonstrated that red blood cell separation in the PMMS system at a volumetric flow rate of 28.8 microL/hr, resulting in a separation time of 10.4 min for a 5.0 microL blood sample with a separation efficiency of 89.5 +/- 0.20%. The PMMS system was tested at higher volumetric flow rates of 50.4 microL/hr and 72.0 microL/hr. The measured separation efficiencies were 86.2 +/- 1.60% and 59.9 +/- 6.06% respectively.

Lateral displacement as a function of particle size using a piecewise curved planar interdigitated electrode array.

We describe the lateral displacement of a particle passing over a planar interdigitated electrode array at an angle as a function of the particle size. The lateral displacement was also measured as a function of the angle between the electrode and the direction of flow. A simplified line charge model was used for numerically estimating the lateral displacement of fluorescent polystyrene (PS) beads with three different diameters. Using the lateral displacement as a function of particle size, we developed a lateral dielectrophoretic (DEP) microseparator, which enables continuous discrimination of particles by size. The microchannel was divided into three regions, each with an electrode array placed at a different angle with respect to the direction of flow. The experiment using an admixture of 3-, 5-, and 10-microm PS beads showed that the lateral DEP microseparator could continuously separate out 99.86% of the 3-microm beads, 98.82% of the 5-microm beads, and 99.69% of the 10-microm beads, simply by using a 200-kHz 12-Vp-p AC voltage to create the lateral DEP force. The lateral DEP microseparator is thus a practical device for simultaneously separating particles according to size from a heterogeneous admixture.

An automated micro-solid phase extraction device involving integrated \high-pressure microvalves for genetic sample preparation.

This paper presents an automated micro-SPE device for DNA extraction using monolithically integrated high-pressure microvalves. The automated micro-SPE device was fabricated through glass-to-glass thermal bonding and microfluidic system interface technologies. To increase the DNA extraction efficiency, silica beads were packed in the extraction microchannel involving two weir structures. Experimental results show that the DNA extraction efficiency using the automated micro-SPE device containing bare silica beads was 75.87% in the first 8 microl of solution eluted by automated SPE procedure. In addition, the reproducibility of the DNA extraction was evaluated by ten successive measurements. Genomic DNA extracted from human WBCs had an absorbance ratio of DNA to protein (A(260)/A(280)) of 1.56. The applicability of this automated micro-SPE device to genetic sample preparation was verified by PCR amplification of a beta-globulin gene using the genomic DNA extracted from WBCs. Consequently, we demonstrated that the proposed automatic micro-SPE device can extract nucleic acids from biological samples, thereby facilitating its integration with downstream genetic analyses in a micro format.

Lateral-driven continuous dielectrophoretic microseparators for blood cells suspended in a highly conductive medium.

This paper presents lateral-driven continuous dielectrophoretic (DEP) microseparators for separating red and white blood cells suspended in highly conductive dilute whole blood. The continuous microseparators enable the separation of blood cells based on the lateral DEP force generated by a planar interdigitated electrode array placed at an angle to the direction of flow. The simplified line charge model that we developed for the theoretical analysis was verified by comparing it with simulated and measured results. Experimental results showed that the divergent type of microseparator can continuously separate out 87.0% of the red blood cells (RBCs) and 92.1% of the white blood cells (WBCs) from dilute whole blood within 5 min simply by using a 2 MHz, 3 Vp-p AC voltage to create a gradient electric field in a medium that conducts at 17 mS cm(-1). Under the same conditions, the convergent type of microseparator could separate out 93.6% of the RBCs and 76.9% of the WBCs. We have shown that our lateral-driven continuous DEP microseparator design is practical for the continuous separation of blood cells without the need to control the conductivity of the suspension medium, overcoming critical drawbacks of DEP microseparators.

Active 3-D microscaffold system with fluid perfusion for culturing in vitro neuronal networks.

This work demonstrated the design, fabrication, packaging, and characterization of an active microscaffold system with fluid perfusion/nutrient delivery functionalities for culturing in vitro neuronal networks from dissociated hippocampal rat pup neurons. The active microscaffold consisted of an 8 x 8 array of hollow, microfabricated, SU-8 towers (1.0 mm or 1.5 mm in height), with integrated, horizontal, SU-8 cross-members that connect adjacent towers, thus forming a 3-D grid that is conducive to branching, growth, and increased network formation of dissociated hippocampal neurons. Each microtower in the microscaffold system contained a hollow channel and multiple fluid ports for media delivery and perfusion of nutrients to the in vitro neuronal network growing within the microscaffold system. Additionally, there were two exposed Au electrodes on the outer wall of each microtower at varying heights (with insulated leads running within the microtower walls), which will later allow for integration of electrical stimulation/recording functionalities into the active microscaffold system. However, characterization of the stimulation/recording electrodes was not included in the scope of this paper. Design, fabrication, fluid packaging, and characterization of the active microscaffold system were performed. Furthermore, use of the active microscaffold system was demonstrated by culturing primary hippocampal embryonic rat pup neurons, and characterizing cell viability within the microscaffold system.

Quantification of the heterogeneity in breast cancer cell lines using whole-cell impedance spectroscopy.

PURPOSE: Quantification of the heterogeneity of tumor cell populations is of interest for many diagnostic and therapeutic applications, including determining the cancerous stage of tumors. We attempted to differentiate human breast cancer cell lines from different pathologic stages and compare that with a normal human breast tissue cell line by characterizing the impedance properties of each cell line. EXPERIMENTAL DESIGN: A microelectrical impedance spectroscopy system has been developed that can trap a single cell into an analysis cavity and measure the electrical impedance of the captured cell over a frequency range from 100 Hz to 3.0 MHz. Normal human breast tissue cell line MCF-10A, early-stage breast cancer cell line MCF-7, invasive human breast cancer cell line MDA-MB-231, and metastasized human breast cancer cell line MDA-MB-435 were used. RESULTS: The whole-cell impedance signatures show a clear difference between each cell line in both magnitude and phase of the electrical impedance. The membrane capacitance calculated from the impedance data was 1.94 +/- 0.14, 1.86 +/- 0.11, 1.63 +/- 0.17, and 1.57 +/- 0.12 muF/cm(2) at 100 kHz for MCF-10A, MCF-7, MDA-MB-231, and MDA-MB-435, respectively. The calculated resistance for each cancer cell line at 100 kHz was 24.8 +/- 1.05, 24.8 +/- 0.93, 24.9 +/- 1.12, and 26.2 +/- 1.07 MOhm, respectively. The decrease in capacitances of the cancer cell lines compared with that of the normal cell line MCF-10A was 4.1%, 16.0%, and 19.1%, respectively, at 100 kHz. CONCLUSIONS: These findings suggest that microelectrical impedance spectroscopy might find application as a method for quantifying progression of cancer cells without the need for tagging or modifying the sampled cells.

Three dimensional MEMS microfluidic perfusion system for thick brain slice cultures.

In vitro tissue culture models are often benchmarked by their ability to replicate in vivo function. One of the limitations of in vitro systems is the difficulty in preserving an orchestrated cell population, especially for generating three-dimensional tissue equivalents. For example, tissue-engineering applications involve large high-density constructs, requiring a perfusing system that is able to apply adequate oxygen and nutrients to the interior region of the tissue. This is particularly true with respect to thick tissue sections harvested for in vitro culture. We have fabricated a microneedle-based perfusion device for high-cell-density in vitro tissue culture from SU-8 photosensitive epoxy and suitable post-processing. The device was tested for its ability to improve viability in slices of harvested brain tissue. This model was chosen due to its acute sensitivity to disruptions in its nutrient supply. Improved viability was visible in the short term as assessed via live-dead discriminating fluorescent staining and confocal microscopy. This perfusion system opens up many possibilities for both neurobiological as well as other culture systems.

Ion channel characterization using single cell impedance spectroscopy.

A micro electrical impedance spectroscopy system (microEIS) for single cell analysis has been developed and used to differentiate ion channel activities of bovine chromaffin cells. K+ and Ca2+ channels were blocked and their electrical impedances were measured over a frequency range of 100 Hz to 5.0 MHz and compared to that of unblocked chromaffin cells. When ion channels were blocked, an increase in magnitude and decrease in phase of the measured impedances were observed. This result demonstrates that ion channel activities can be distinguished using the developed microsystem and it is expected that this system can be used to provide positive/negative information of ion channel blockage in a high throughput screening setup.

Microsystems for isolation and electrophysiological analysis of breast cancer cells from blood.

This paper presents the development of a microsystem for separating suspended breast cancer cells in peripheral blood and for sorting them based on their electrophysiological characteristics. A continuous paramagnetic capture mode (PMC) magnetophoretic microseparator was utilized for the isolation of suspended breast cancer cells in peripheral blood based on the native magnetic properties of blood cells without any tagging such as with magnetic probes. A micro-electrical impedance spectroscopy (mu-EIS) system was used as a downstream cell analysis tool to extract the pathological characteristics from the breast cancer cells. The system was fabricated on silicon and glass substrates utilizing microfabrication and stereolithography technologies. The experimental results of the PMC microseparator show that 94.8% of the breast cancer cells could be continuously separated out from a spiked blood sample with a 0.2 T external magnetic flux. The electrical impedances of human breast cancer cell lines of different pathological stages (MCF-7, MDA-MB-231, and MDA-MB-435) were measured using mu-EIS and compared to those of normal human breast tissue cell line MCF-10A.

Paramagnetic capture mode magnetophoretic microseparator for high efficiency blood cell separations.

This paper presents the characterization of continuous single-stage and three-stage cascade paramagnetic capture (PMC) mode magnetophoretic microseparators for high efficiency separation of red and white blood cells from diluted whole blood based on their native magnetic properties. The separation mechanism for both PMC microseparators is based on a high gradient magnetic separation (HGMS) method. This approach enables separation of blood cells without the use of additives such as magnetic beads. Experimental results for the single-stage PMC microseparator show that 91.1% of red blood cells were continuously separated from the sample at a volumetric flow rate of 5 microl h-1. In addition, the three-stage cascade PMC microseparator continuously separated 93.5% of red blood cells and 97.4% of white blood cells from whole blood at a volumetric flow rate of 5 microl h-1.

A multielectrode microcompartment culture platform for studying signal transduction in the nervous system.

This paper describes the design, fabrication, and characterization of a microfabricated compartmented culture system (micro-CCS) useful for electrophysiological signaling studies in cultured neurons. The focus of the paper is the process of interfacing the micro-CCS with cultured neurons and to demonstrate the applicability of the system for biochemical-mediated electrophysiological studies. Moreover, we show that we can record action potentials from cultured neurons through the extracellular compartmented application of elevated levels of K(+) ions. Finally, we show that we can isolate the electrophysiological effects of the sodium channel blocker tetrodotoxin in one of the compartments of a two compartment culture while recording electrophysiological data from both compartments.

A microfabricated thermal field-flow fractionation system.

A microscale thermal field-flow fractionation (micro-TFFF) system has been designed, fabricated, and characterized. Motivation for miniaturization of TFFF systems was established by examining the geometrical scaling of the fundamental TFFF theory. Miniaturization of conventional macroscale TFFF systems was made possible through utilization of micromachining technologies. Fabrication of the micro-TFFF system was discussed in detail. The micro-TFFF system was characterized for plate height versus flow rate, single-component polystyrene retention, and multicomponent polystyrene separations. Retention, thermal diffusion coefficients, and maximum diameter-based selectivity values were extracted from separation data and found comparable with macroscale TFFF system results. Retention values ranged from 0.33 to 0.46. Thermal diffusion coefficients were between 3.0 x 10(-8) and 5.4 x 10(-8) cm2/s x K. The maximum diameter-based selectivity was 1.40.

Geometric scaling effects in electrical field flow fractionation. 2. Experimental results.

Geometric scaling of microelectrical field flow fractionation (micro-EFFF) systems is investigated experimentally and compared to theory and to macroscale EFFF systems. Experimental results are presented to demonstrate that the miniaturized system operates according to the scaling theory associated with the system. Demonstrated improvements in the channels include increased retention and resolution and decreased peak broadening, electrical time constants, relaxation time, power consumption, and sample size. Additionally, scaling effects related to the compression of separation zones in the miniaturized EFFF systems are discussed.