Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection.

This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications.

Infrared Transmission Characteristics of Phase Transitioning VO2 on Various Substrates.

Infrared transmission characteristics of VO2 thin films synthesized on multiple substrates, using a low-pressure direct oxidation technique, have been characterized. Material characterization of these films indicates high material quality, which resulted in large variation of electrical and optical properties at phase transition. A change in optical transmissivity greater than 80% was observed for these films utilizing infrared (IR) laser illumination at 1550 nm. Phase transition enabled by temperature change induced by a pulsed high-power laser beam resulted in modulated IR laser transmission with a low time constant in VO2 on transparent quartz and muscovite substrates. Investigation of the effect of mechanical strain on phase transition in VO2 grown on flexible muscovite substrate indicate shift in transition temperature to higher for tensile and lower for compressive strains.

Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation.

Nonlinear oscillations in micro- and nanoelectromechanical systems have emerged as an exciting research area in recent years due to their promise in realizing low-power, scalable, and reconfigurable mechanical memory and logic devices. Here, we report ultralow-power mechanical memory operations utilizing the nonlinear oscillation regime of GaN microcantilevers with embedded piezotransistive AlGaN/GaN heterostructure field effect transistors as highly sensitive deflection transducers. Switching between the high and low oscillatory states of the nonlinear oscillation regime was demonstrated using a novel phase-controlled opto-mechanical excitation setup, utilizing a piezo actuator and a pulsed laser as the primary and secondary excitation sources, respectively. Laser-based photoacoustic excitation was amplified through plasmonic absorption in Au nanoparticles deposited on a transistor. Thus, the minimum switching energy required for reliable memory operations was reduced to less than a picojoule (pJ), which translates to one of the lowest ever reported, when normalized for mass.

Voltage triggered near-infrared light modulation using VO2 thin film.

Development of compact and fast modulators of infrared light has garnered strong research interests in recent years due to their potential applications in communication, imaging, and sensing. In this study, electric field induced fast modulation near-infrared light caused by phase change in VO2 thin films grown on GaN suspended membranes has been reported. It was observed that metal insulator transition caused by temperature change or application of electric field, using an interdigitated finger geometry, resulted in 7% and 14% reduction in transmitted light intensity at near-infrared wavelengths of 790 and 1550 nm, respectively. Near-infrared light modulation has been demonstrated with voltage pulse widths down to 300 µs at 25 V magnitude. Finite element simulations performed on the suspended membrane modulator indicate a combination of the Joule heating and electric field is responsible for the phase transition.

H2 Detection Using Plasmonically Generated Surface Photoacoustic Waves in Pd Nanoparticle-Deposited GaN Microcantilevers.

Detection of H2 using plasmonic amplification of surface photoacoustic (SPA) waves generated in Pd nanoparticle-deposited GaN piezotransistive microcantilevers has been investigated using a pulsed 520 nm laser. Using 1.5 nm thickness of the Pd functionalization layer, H2 detection down to 1.5 ppm was demonstrated with a high signal-to-noise ratio, underscoring the feasibility of sub-ppm level detection using this novel sensing method. Adsorption of H2 in Pd nanoparticles (NPs) changes their plasmonic absorption spectra because of Pd lattice expansion, in addition to changing their work function. The high sensitivity exhibited by the SPA-based H2 detection method is attributed to a combination of changes in the plasmonic spectrum and work function of Pd NPs and was observed to be a strong function of Pd thickness, biasing conditions, and probe laser power. A comparison of the SPA-based detection technique with traditional chemidiode and chemiresistor sensors, integrated in the functionalized piezotransistor, indicated a superior detection performance of the former.

Investigation of AlGaN/GaN HFET and VO2 Thin Film Based Deflection Transducers Embedded in GaN Microcantilevers.

The static and dynamic deflection transducing performances of piezotransistive AlGaN/GaN heterojunction field effect transistors (HFET) and piezoresistive VO2 thin films, fabricated on GaN microcantilevers of similar dimensions, were investigated. Deflection sensitivities were tuned with the gate bias and operating temperature for embedded AlGaN/GaN HFET and VO2 thin film transducers, respectively. The GaN microcantilevers were excited with a piezoactuator in their linear and nonlinear oscillation regions of the fundamental oscillatory mode. In the linear regime, the maximum deflection sensitivity of piezotransistive AlGaN/GaN HFET reached up to a 0.5% change in applied drain voltage, while the responsivity of the piezoresistive VO2 thin film based deflection transducer reached a maximum value of 0.36% change in applied drain current. The effects of the gate bias and the operation temperature on nonlinear behaviors of the microcantilevers were also experimentally examined. Static deflection sensitivity measurements demonstrated a large change of 16% in drain-source resistance of the AlGaN/GaN HFET, and a similarly high 11% change in drain-source resistance in the VO2 thin film, corresponding to a 10 µm downward step bending of the cantilever free end.

Photoacoustic Detection of H2 and NH3 Using Plasmonic Signal Enhancement in GaN Microcantilevers.

Photoacoustic (PA) detection of H2 and NH3 using plasmonic excitation in Pt- and Pd-decorated GaN piezotransistive microcantilevers were investigated using pulsed 520-nm laser illumination. The sensing performances of 1-nm Pt and Pd nanoparticle (NP) deposited cantilever devices were compared, of which the Pd-coated sensor devices exhibited consistently better sensing performance, with lower limit of detection and superior signal-to-noise ratio (SNR) values, compared to the Pt-coated devices. Among the two functionalization layers, Pd-coated devices were found to respond only to H2 exposure and not to NH3, while Pt-coated devices exhibited repeatable response to both H2 and NH3 exposures, highlighting the potential of the former in performing selective detection between these reducing gases. Optimization of the device-biasing conditions were found to enhance the detection sensitivity of the sensors.

Piezoresistive Graphene/P(VDF-TrFE) Heterostructure Based Highly Sensitive and Flexible Pressure Sensor.

We report on a novel graphene/P(VDF-TrFE) heterostructure based highly sensitive, flexible, and biocompatible pressure/strain sensor developed through a facile and low-cost fabrication technique. The high piezoelectric coefficient of P(VDF-TrFE) coupled with outstanding electrical properties of graphene makes the sensor device highly sensitive, with an average sensitivity of 0.76 kPa-1, a gauge factor of 445, and signal-to-noise ratio of 60.8 dB in the range of pressure up to 45 mmHg. A model was proposed to explain the sensor operation, based on carrier density and mobility changes induced by the piezoelectric charge generated in response to strain, which was supported by Hall measurements and Raman spectroscopy. Potential applications in wearable sensing for human activity monitoring were also demonstrated.

High Temperature AlGaN/GaN Membrane Based Pressure Sensors.

A highly sensitive Gallium Nitride (GaN) diaphragm based micro-scale pressure sensor with an AlGaN/GaN heterostructure field effect transistor (HFET) deflection transducer has been designed and fabricated for high temperature applications. The performance of the pressure sensor was studied over a pressure range of 20 kPa, which resulted in an ultra-high sensitivity of ~0.76%/kPa, with a signal-to-noise ratio as high as 16 dB, when biased optimally in the subthreshold region. A high gauge factor of 260 was determined from strain distribution in the sensor membrane obtained from finite element simulations. A repeatable sensor performance was observed over multiple pressure cycles up to a temperature of 200 °C.