Noise-resilient deep learning for integrated circuit tomography.

X-ray tomography is a non-destructive imaging technique that reveals the interior of an object from its projections at different angles. Under sparse-view and low-photon sampling, regularization priors are required to retrieve a high-fidelity reconstruction. Recently, deep learning has been used in X-ray tomography. The prior learned from training data replaces the general-purpose priors in iterative algorithms, achieving high-quality reconstructions with a neural network. Previous studies typically assume the noise statistics of test data are acquired a priori from training data, leaving the network susceptible to a change in the noise characteristics under practical imaging conditions. In this work, we propose a noise-resilient deep-reconstruction algorithm and apply it to integrated circuit tomography. By training the network with regularized reconstructions from a conventional algorithm, the learned prior shows strong noise resilience without the need for additional training with noisy examples, and allows us to obtain acceptable reconstructions with fewer photons in test data. The advantages of our framework may further enable low-photon tomographic imaging where long acquisition times limit the ability to acquire a large training set.

Physics-assisted generative adversarial network for X-ray tomography.

X-ray tomography is capable of imaging the interior of objects in three dimensions non-invasively, with applications in biomedical imaging, materials science, electronic inspection, and other fields. The reconstruction process can be an ill-conditioned inverse problem, requiring regularization to obtain satisfactory results. Recently, deep learning has been adopted for tomographic reconstruction. Unlike iterative algorithms which require a distribution that is known a priori, deep reconstruction networks can learn a prior distribution through sampling the training distributions. In this work, we develop a Physics-assisted Generative Adversarial Network (PGAN), a two-step algorithm for tomographic reconstruction. In contrast to previous efforts, our PGAN utilizes maximum-likelihood estimates derived from the measurements to regularize the reconstruction with both known physics and the learned prior. Compared with methods with less physics assisting in training, PGAN can reduce the photon requirement with limited projection angles to achieve a given error rate. The advantages of using a physics-assisted learned prior in X-ray tomography may further enable low-photon nanoscale imaging.