RESUMO
In this paper, we present our recent studies on raising the quality of optical coating production with an indirect monochromatic monitoring system. Preproduction error analysis and computational manufacturing are used to estimate potential advantages of application of indirect optical monitoring. It is then demonstrated that a key issue for realization of this advantage is accurate specification of tooling factors for layer thicknesses on test glasses. The tooling factors are precalibrated using single layer depositions and then are corrected using results of reverse engineering for the first production run. It is found that a gradual variation of tooling factors of low index layers is the main error factor in the first deposition run. Finally, we redeposit our coating with a modified monitoring strategy, taking into account this factor. The new experimental results show excellent correspondence with the theoretical spectral performance.
RESUMO
We present the whole design-production chain of an ultra-steep hot mirror produced using the indirect monochromatic monitoring technique. The hot mirror without thin layers is designed utilizing the stochastic optimization procedure that takes in account upper and lower constraints for layer optical thickness. We produced the hot mirror with the ion-assisted electron beam deposition technique using indirect monochromatic monitoring strategy, performed reverse engineering of the deposited coatings, and illustrated that the random variation of the tooling factors in low-index layers is the main factor causing production errors. We modified the monitoring strategy with low-index layers monitored by quartz crystal monitor, and demonstrated the excellent correspondence to the theoretical spectral performance.