Cryo-compatible opto-mechanical low-voltage phase-modulator integrated with superconducting single-photon detectors.

Photonic integrated circuits (PICs) have enabled novel functionality in quantum optics, quantum information processing and quantum communication. PICs based on Silicon Nitride (Si3N4) provide low-loss passive components and are compatible with efficient superconducting nanowire single-photon detectors (SNSPDs). For realizing functional quantum photonic systems, the integration with active phase-shifters is needed which is challenging at the cryogenic temperatures needed for operating SNSPDs. Here we demonstrate a cryo-compatible phase shifter using a low-voltage opto-mechanical modulator and show joint operation with SNSPDs at 1.3 K. We achieve a half-wave voltage of 4.6 V, single-photon detection with 88% on-chip detection efficiency (OCDE) and a low timing jitter of 12.2 ps. Our approach allows for operating reconfigurable quantum photonic circuits with low dissipation in a cryogenic setting.

Optoelectromechanical phase shifter with low insertion loss and a 13π tuning range.

We present an on-chip optoectromechanical phase shifter with low insertion loss and low half-wave voltage using a silicon nitride platform. The device is based on a slot waveguide in which the electrostatic displacement of mechanical structures results in a change of the effective refractive index. We achieve insertion loss below 0.5 dB at a wavelength of 1550 nm in a Mach-Zehnder Interferometer with an extinction ratio of 31 dB. With a phase tuning length of 210 µm, we demonstrate a half-wave voltage of Vπ = 2.0 V and a 2π phase shift at V2π = 2.7 V. We measure phase shifts up to 13.3 π at 17 V. Our devices can be operated in the MHz range and allow for the generation of sub-µs pulses.

Tantalum pentoxide nanophotonic circuits for integrated quantum technology.

Nanophotonics holds great promise for integrated quantum technologies, but realizing all functionalities for processing quantum states of light in optical waveguides poses an outstanding challenge. Here we show that tantalum pentoxide-on-insulator offers significant advantages for such purpose and experimentally demonstrate crucial photonic integrated circuit components. Exploiting advanced nanophotonic design and state-of-the-art nanofabrication processes, we realize low-loss waveguiding with 1 dB/cm propagation loss, efficient optical fiber-chip interfaces with more than 100 nm bandwidth, micro-ring resonators with quality factors of 357,200 and tunable directional couplers. We further achieve active functionality with nano-electromechanical phase-shifters. Our work enables reconfigurable photonic circuit configurations in the Ta2O5 material system with highly favorable optical properties for integrated quantum photonics.