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Rev Sci Instrum ; 87(5): 052003, 2016 05.
Artigo em Inglês | MEDLINE | ID: mdl-27250383

RESUMO

We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 µrad RMS. Direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.

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