Increased Light Extraction of Thin-Film Flip-Chip UVB LEDs by Surface Texturing.

Ultraviolet light-emitting diodes (LEDs) suffer from a low wall-plug efficiency, which is to a large extent limited by the poor light extraction efficiency (LEE). A thin-film flip-chip (TFFC) design with a roughened N-polar AlGaN surface can substantially improve this. We here demonstrate an enabling technology to realize TFFC LEDs emitting in the UVB range (280-320 nm), which includes standard LED processing in combination with electrochemical etching to remove the substrate. The integration of the electrochemical etching is achieved by epitaxial sacrificial and etch block layers in combination with encapsulation of the LED. The LEE was enhanced by around 25% when the N-polar AlGaN side of the TFFC LEDs was chemically roughened, reaching an external quantum efficiency of 2.25%. By further optimizing the surface structure, our ray-tracing simulations predict a higher LEE from the TFFC LEDs than flip-chip LEDs and a resulting higher wall-plug efficiency.

A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser.

Ultraviolet light is essential for disinfection, fluorescence excitation, curing, and medical treatment. An ultraviolet light source with the small footprint and excellent optical characteristics of vertical-cavity surface-emitting lasers (VCSELs) may enable new applications in all these areas. Until now, there have only been a few demonstrations of ultraviolet-emitting VCSELs, mainly optically pumped, and all with low Al-content AlGaN cavities and emission near the bandgap of GaN (360 nm). Here, we demonstrate an optically pumped VCSEL emitting in the UVB spectrum (280-320 nm) at room temperature, having an Al0.60Ga0.40N cavity between two dielectric distributed Bragg reflectors. The double dielectric distributed Bragg reflector design was realized by substrate removal using electrochemical etching. Our method is further extendable to even shorter wavelengths, which would establish a technology that enables VCSEL emission from UVA (320-400 nm) to UVC (<280 nm).

Thermal lensing effects on lateral leakage in GaN-based vertical-cavity surface-emitting laser cavities.

Lateral leakage of light has been identified as a detrimental loss source in many suggested and experimentally realized GaN-based VCSELs. In the present work we include thermal effects to realistically account for the substantial Joule heating in these devices. In contrast to what could be expected from the previous results, the induced thermal lensing does not make antiguided cavities more positively guided, so that they approach the unguided regime with extremely high lateral leakage. Rather, thermal lensing strongly suppresses lateral leakage for both antiguided and guided cavities. This is explained in terms of lowered launch of power from the central part of the cavity and/or lower total internal reflection in the peripheral part; the former effect is active in all cavities whereas the latter only contributes to the very strongly reduced leakage in weakly antiguided cavities. Thermal lensing suppresses lateral leakage both for the fundamental and the first higher order mode, but a strong modal discrimination is still achieved for the antiguided cavities. Thus, strongly antiguided cavities could be used to achieve single-mode devices, but at the cost of slightly higher threshold gain and stronger temperature dependent performance characteristics.

Analysis of structurally sensitive loss in GaN-based VCSEL cavities and its effect on modal discrimination.

Lateral loss causes optical energy to leave the laser cavity in the transverse, lateral, direction, and is sometimes neglected to simplify the numerical simulations. However, in contrast to outcoupling and absorption losses, we show that the lateral loss can change drastically with only nanometer-sized changes of the cavity structure, from being virtually zero to becoming the major source of cavity loss, since the cavity becomes antiguiding. This can be explained as the opening of a channel of efficient resonant lateral leakage of optical power at a certain oblique propagation angle. A number of different realizations of current apertures and top mirror designs in GaN-based VCSEL cavities, which have been suggested for realization of microcavity lasers emitting in the blue wavelength range, are simulated. Many of these are shown to lead to unintentional antiguiding, which can more than double the threshold gain for lasing. Notably, for strong enough antiguiding the resonant lateral leakage decreases so that the threshold gain values might again be tolerable. This regime has been suggested for robust single-mode operation since earlier predictions, building on analogies with slab waveguides, hinted at a very strong suppression of higher order modes. However, our simulations indicate that for the VCSEL cavities the derived formulas grossly overestimate the modal discrimination.

Assessment of VCSEL thermal rollover mechanisms from measurements and empirical modeling.

We use an empirical model together with experimental measurements for studying mechanisms contributing to thermal rollover in vertical-cavity surface-emitting lasers (VCSELs). The model is based on extraction of the temperature dependence of threshold current, internal quantum efficiency, internal optical loss, series resistance and thermal impedance from measurements of output power, voltage and lasing wavelength as a function of bias current over an ambient temperature range of 15-100 °C. We apply the model to an oxide-confined, 850-nm VCSEL, fabricated with a 9-µm inner-aperture diameter and optimized for high-speed operation, and show for this specific device that power dissipation due to linear power dissipation (sum total of optical absorption, carrier thermalization, carrier leakage and spontaneous carrier recombination) exceeds power dissipation across the series resistance (quadratic power dissipation) at any ambient temperature and bias current. We further show that the dominant contributors to self-heating for this particular VCSEL are quadratic power dissipation, internal optical loss, and carrier leakage. A rapid reduction of the internal quantum efficiency at high bias currents (resulting in high temperatures) is identified as being the major cause of thermal rollover. Our method is applicable to any VCSEL and is useful for identifying the mechanisms limiting the thermal performance of the device and to formulate design strategies to ameliorate them.

30 Gbps 4-PAM transmission over 200 m of MMF using an 850 nm VCSEL.

We present high speed real time, error free 4-PAM transmission for short range optical links based on a VCSEL operating at 850 nm, a multimode fibre and a simple intensity detector. Transmission speeds of 25 Gbps and 30 Gbps are demonstrated, and the maximum fibre reaches were 300 m and 200 m, respectively. The 4-PAM is also compared with OOK transmission at 25 Gbps, and we find that at this bit rate 4-PAM increases the error free transmission distance in the multimode fibre by 100 m, compared to OOK.

Diffraction loss in long-wavelength buried tunnel junction VCSELs analyzed with a hybrid coupled-cavity transfer-matrix model.

Intra-cavity diffraction in VCSELs is a loss mechanism that potentially can cause a significant decrease in efficiency and a rise in the threshold current, particularly in cavities with small lateral features with a high index contrast. One such VCSEL type is the 2.3 microm GaSb-based buried tunnel junction (BTJ) VCSEL studied in this work, where the BTJ induced topology of the top layers gives rise to excess loss through diffraction. Diffraction loss is difficult to measure, and also the numerical estimation must be done with care because of the non-axial propagation of the diffracted fields. We present a simulation method with spatially varying dimensionality, such that the field is three-dimensional (3D) in the entire cavity, whereas the material structure of the cavity is modelled in 3D near the BTJ and the layers with a varying topology, but elsewhere is assumed to be 1D like in a regular DBR structure. We find that the diffraction loss displays a non-monotonic behaviour as a function of the BTJ diameter, but as expected it rapidly increases below a certain diameter of the BTJ and may even become the dominant cause of loss in some device designs. We also show that the diffraction loss can be much reduced if the layers above the BTJ can be deposited such that the surface profile becomes smoother with increasing distance from the BTJ.

Efficient and individually controllable mechanisms for mode and polarization selection in VCSELs, based on a common, localized, sub-wavelength surface grating.

We have theoretically investigated the combined fundamental-mode and polarization selection in 850-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) using a locally etched sub-wavelength surface grating. The physical mechanisms behind the selection are, first, the strongly polarization sensitive effective refractive index of the volume occupied by the grating structure, and second, the dramatic change of the reflectivity of a multi-layer Bragg mirror that can occur by simply changing the refractive index of the outermost layer. For a VCSEL cavity this layer is the surface layer and its refractive index is changed by the introduction of the sub-wavelength grating; in this case the grating leads to a higher reflectivity for the desired polarization. By localizing the surface grating area to a carefully chosen region near the optical axis it is therefore possible to ensure that the fundamental mode experiences a high reflectivity, or low cavity loss, while other modes experience more of the low-reflectance region of the peripheral part of the Bragg mirror and thus suffer higher loss. Cold-cavity calculations on a VCSEL with oxide aperture and grating region diameters of 4.5 microm and 2.5 microm, respectively, indicate that a loss difference of ~20 cm(-1) between the fundamental mode and the first higher order mode can be obtained simultaneously with an orthogonal polarization mode discrimination of >15 cm-1. Based on previous experience, these values should enable robust single-mode operation with only the desired polarization orientation. What is also important, for the lasing mode the introduction of a sub-wavelength grating has no detrimental effect, so its characteristics, such as threshold current, slope efficiency, and far-field profile are unaffected. Moreover, since the effective index is a result of an averaging over several sub-wavelength grating periods, it is fairly insensitive to the detailed shape of the grating grooves, which should relax the fabrication tolerances.