Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications.

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding graphene-based variable capacitors on 100 mm silicon wafers. The first mask forms long trenches terminated by square wells featuring cone-shaped tips at their centers. The second mask fabricates metal traces from each tip to its contact pad along the trench and a second contact pad opposite the square well. A graphene membrane is then suspended over the square well to form a variable capacitor. The same capacitor structures were also built on 5 mm by 5 mm bare dies containing an integrated circuit underneath. We used atomic force microscopy, optical microscopy, and capacitance measurements in time to characterize the samples.

Mechanisms of Spontaneous Curvature Inversion in Compressed Graphene Ripples for Energy Harvesting Applications via Molecular Dynamics Simulations.

Electrically conductive, highly flexible graphene membranes hold great promise for harvesting energy from ambient vibrations. For this study, we built numerous three-dimensional graphene ripples, with each featuring a different amount of compression, and performed molecular dynamics simulations at elevated temperatures. These ripples have a convex cosine shape, then spontaneously invert their curvature to concave. The average time between inversion events increases with compression. We use this to determine how the energy barrier height depends on strain. A typical convex-to-concave curvature inversion process begins when the ripple's maximum shifts sideways from the normal central position toward the fixed outer edge. The ripple's maximum does not simply move downward toward its concave position. When the ripple's maximum moves toward the outer edge, the opposite side of the ripple is pulled inward and downward, and it passes through the fixed outer edge first. The ripple's maximum then quickly flips to the opposite side via snap-through buckling. This trajectory, along with local bond flexing, significantly lowers the energy barrier for inversion. The large-scale coherent movement of ripple atoms during curvature inversion is unique to two-dimensional materials. We demonstrate how this motion can induce an electrical current in a nearby circuit.