RESUMO
We designed and demonstrated a double-peak one-dimensional photonic crystal (1D PhC) cavity device by integrating two 1D PhCs cavities in a parallel configuration. The device design is proposed so that it can be used for bio-sensing purposes and has a self-compensation ability to reduce the measurement error caused by the change of the surrounding temperature. By combining two light resonances, two resonance peaks are obtained. The peak's separation, which gives the initial value for a sensing system, can be controlled by varying the cavity length difference (Δc) between the first and second 1D PhCs in parallel. Then, by making one arm of the device as the reference arm and the other arm as the sensing arm, the temperature self-compensation device can be realized. The design and simulation of this device are done by using Lumerical software, which are Lumerical MODE, Lumerical finite-difference time-domain, and Lumerical Interconnect. Electron-beam-lithography and deep reactive-ion-etching processes were used for device fabrication. The experimental results show the controllable peaks' separation, which solves the double-peak requirement for a temperature self-compensated bio-sensor design.
