Integration of MEMS IR detectors with MIR waveguides for sensing applications.

Waveguides have been utilized for label-free and miniaturized mid-infrared gas sensors that operate on the evanescent field absorption principle. For integrated systems, photodetectors based on the photocarrier generation principle are previously integrated with waveguides. However, due to the thermal excitation of carriers at room temperature, they suffer from large dark currents and noise in the long-wavelength region. In this paper, we introduce the integration of a MEMS-based broadband infrared thermopile sensor with mid-infrared waveguides via flip-chip bonding technology and demonstrate a proof-of-concept gas (N2O) sensor working at 3.9 µm. A photonic device with input and output grating couplers designed at 3.72 µm was fabricated on a silicon-on-insulator (SOI) platform and integrated with a bare thermopile chip on its output side via flip-chip bonding in order to realize an integrated photonic platform for a myriad range of sensing applications. A responsivity of 69 mV/W was measured at 3.72 µm for an 11 mm waveguide. A second device designed at 3.9 µm has a 1800 ppm resolution for N2O sensing.

Ultrasensitive Transmissive Infrared Spectroscopy via Loss Engineering of Metallic Nanoantennas for Compact Devices.

Miniaturized infrared spectroscopy is highly desired for widespread applications, including environment monitoring, chemical analysis, and biosensing. Nanoantennas, as a promising approach, feature strong field enhancement and provide opportunities for ultrasensitive molecule detection even in the nanoscale range. However, current efforts for higher sensitivities by nanogaps usually suffer a trade-off between the performance and fabrication cost. Here, novel crooked nanoantennas are designed with a different paradigm based on loss engineering to overcome the above bottleneck. Compared to the commonly used straight nanoantennas, the crooked nanoantennas feature higher sensitivity and a better fabrication tolerance. Molecule signals are increased by 25 times, reaching an experimental enhancement factor of 2.8 × 104. The optimized structure enables a transmissive CO2 sensor with sensitivities up to 0.067% ppm-1. More importantly, such a performance is achieved without sub-100 nm structures, which are common in previous works, enabling compatibility with commercial optical lithography. The mechanism of our design can be explained by the interplay of radiative and absorptive losses of nanoantennas that obeys the coupled-mode theory. Leveraging the advantage of the transmission mode in an optical system, our work paves the way toward cheap, compact, and ultrasensitive infrared spectroscopy.

Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform.

Aluminum nitride on insulator (AlNOI) photonics platform has great potential for mid-infrared applications thanks to the large transparency window, piezoelectric property, and second-order nonlinearity of AlN. However, the deployment of AlNOI platform might be hindered by the high propagation loss. We perform thermal annealing study and demonstrate significant loss improvement in the mid-infrared AlNOI photonics platform. After thermal annealing at 400°C for 2 hours in ambient gas environment, the propagation loss is reduced by half. Bend loss and taper coupling loss are also investigated. The performance of multimode interferometer, directional coupler, and add/drop filter are improved in terms of insertion loss, quality factor, and extinction ratio. Fourier-transform infrared spectroscopy, Raman spectroscopy, and X-ray diffraction spectroscopy suggest the loss improvement is mainly attributed to the reduction of extinction coefficient in the silicon dioxide cladding. Apart from loss improvement, appropriate thermal annealing also helps in reducing thin film stress.

Aluminum nitride on insulator (AlNOI) platform for mid-infrared photonics.

We report an aluminum nitride on insulator platform for mid-infrared (MIR) photonics applications beyond 3 µm. Propagation loss and bending loss are studied, while functional devices such as directional couplers, multimode interferometers, and add/drop filters are demonstrated with high performance. The complementary metal-oxide-semiconductor-compatible aluminum nitride offers advantages ranging from a large transparency window, high thermal and chemical resistance, to piezoelectric tunability and three-dimensional integration capability. This platform can have synergy with other photonics platforms to enable novel applications for sensing and thermal imaging in MIR.

All-Dielectric Surface-Enhanced Infrared Absorption-Based Gas Sensor Using Guided Resonance.

The surface-enhanced infrared absorption (SEIRA) technique has been focusing on the metallic resonator structures for decades, exploring different approaches to enhance sensitivity. Although the high enhancement is achieved, the dissipative loss and strong heating are the intrinsic drawbacks of metals. Recently, the dielectric platform has emerged as a promising alternative. In this work, we report a guided resonance-based all-dielectric photonic crystal slab as the platform for SEIRA. The guided resonance-induced enhancement in the effective path length and electric field, together with gas enrichment polymer coating, leads to a detection limit of 20 ppm in carbon dioxide (CO2) sensing. This work explores the feasibility to apply low loss all-dielectric structures as a surface enhancement method in the transmission mode.

Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid-IR.

Application of two major classes of CO2 gas sensors, i.e., electrochemical and nondispersive infrared is predominantly impeded by the poor selectivity and large optical interaction length, respectively. Here, a novel "hybrid metamaterial" absorber platform is presented by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial with a smart, gas-selective-trapping polymer for highly selective and miniaturized optical sensing of CO2 gas in the 5-8 µm mid-IR spectral window. The sensor offers a minimum of 40 ppm detection limit at ambient temperature on a small footprint (20 µm by 20 µm), fast response time (≈2 min), and low hysteresis. As a proof-of-concept, net absorption enhancement of 0.0282%/ppm and wavelength shift of 0.5319 nm ppm-1 are reported. Furthermore, the gas- selective smart polymer is found to enable dual-mode multiplexed sensing for crosschecking and validation of gas concentration on a single platform. Additionally, unique sensing characteristics as determined by the operating wavelength and bandwidth are demonstrated. Also, large differential response of the metamaterial absorber platform for all-optical monitoring is explored. The results will pave the way for a physical understanding of metamaterial-based sensing when integrated with the mid-IR detector for readout and extending the mid-IR functionalities of selective polymers for the detection of technologically relevant gases.

A Black Phosphorus Carbide Infrared Phototransistor.

Photodetectors with broadband detection capability are desirable for sensing applications in the coming age of the internet-of-things. Although 2D layered materials (2DMs) have been actively pursued due to their unique optical properties, by far only graphene and black arsenic phosphorus have the wide absorption spectrum that covers most molecular vibrational fingerprints. However, their reported responsivity and response time are falling short of the requirements needed for enabling simultaneous weak-signal and high-speed detections. Here, a novel 2DM, black phosphorous carbide (b-PC) with a wide absorption spectrum up to 8000 nm is synthesized and a b-PC phototransistor with a tunable responsivity and response time at an excitation wavelength of 2004 nm is demonstrated. The b-PC phototransistor achieves a peak responsivity of 2163 A W-1 and a shot noise equivalent power of 1.3 fW Hz-1/2 at 2004 nm. In addition, it is shown that a response time of 0.7 ns is tunable by the gating effect, which renders it versatile for high-speed applications. Under the same signal strength (i.e., excitation power), its performance in responsivity and detectivity in room temperature condition is currently ahead of recent top-performing photodetectors based on 2DMs that operate with a small bias voltage of 0.2 V.

Self-Powered Dual-Mode Amenity Sensor Based on the Water-Air Triboelectric Nanogenerator.

A water-air triboelectric nanogenerator (WATENG) is presented for CO2 sensing application. During the operation of WATENG, two independent charge transfers can be used to characterize the effect of force and humidity, respectively. Thus, the structure of WATENG provides a capability to eliminate these two major interferences in a triboelectric self-powered sensor. With the aid of the polyethylenimine (PEI) coating, WATENG can be used for CO2 sensing in both static and dynamic conditions. In static condition with a stable CO2 concentration, the CO2 sensing is characterized with respect to different relative humidity, and the sensing range can be up to 6000 ppm. In dynamic CO2 sensing of a pulse gas spray, due to the fast recovery of PEI surface reaction, the sensing range of dynamic situation can be broadened to 30,000 ppm. The self-powered and portable feature of WATENG is preferable as a self-powered amenity sensor for the construction of internet of the things (IoT) sensor networks in the future.

Thermoplasmonic Study of a Triple Band Optical Nanoantenna Strongly Coupled to Mid IR Molecular Mode.

We report the first thermal study of a triple band plasmonic nanoantenna strongly coupled to a molecular mode at mid IR wavelength (MW IR). The hybrid plasmonic structure supports three spatially and spectrally variant resonances of which two are magnetic and one is dipolar in nature. A hybridized mode is excited by coupling the structure's plasmonic mode with the vibrational mode of PMMA at 5.79 µm. Qualitative agreement between the spectral changes in simulation and experiment clearly indicates that resistive heating is the dominant mechanisms behind the intensity changes of the dipolar and magnetic peaks. The study also unveils the thermal insensitivity of the coupled mode intensity as the temperature is increased. We propose a mechanism to reduce the relative intensity change of the coupled mode at elevated temperature by mode detuning and surface current engineering and demonstrate less than 9% intensity variation. Later, we perform a temperature cycling test and investigate into the degradation of the Au-PMMA composite device. The failure condition is identified to be primarily associated with the surface chemistry of the material interface rather than the deformation of the nanopatterns. The study reveals the robustness of the strongly coupled hybridized mode even under multiple cycling.

Realization of Fractal-Inspired Thermoresponsive Quasi-3D Plasmonic Metasurfaces with EOT-Like Transmission for Volumetric and Multispectral Detection in the Mid-IR Region.

We use a paradigmatic mathematic model known as Sierpinski fractal to reverse-engineer artificial nanostructures that can potentially serve as plasmonic metasurfaces as well as nanogap electrodes. Herein, we particularly demonstrate the possibility of obtaining multispectral extraordinary optical transmission-like transmission peaks from fractal-inspired geometries, which can preserve distinct spatial characteristics. To achieve enhanced volumetric interaction and thermal responsiveness within the framework, we consider a bilayer, quasi-three-dimensional (3D) configuration that relies on the unique approach of combining complementary and noncomplementary surfaces, while avoiding the need for multilayer alignment on the nanoscale. We implement an improved version of the model to (1) increase the volume of quasi-3D nanochannels and enhance the lightening-rod effect of the metasurfaces, (2) harness cross-coupling as a mechanism for achieving better sensitivity, and (3) exploit optical magnetism for pushing the resonances to longer wavelengths on a miniaturized platform. We further demonstrate vertical coupling as an effective route for ultimate miniaturization of such quasi-3D nanostructures. We report a wavelength shift up to 1666 nm/refractive index unit and 2.5 nm/°C, implying the usefulness of the proposed devices for applications such as dielectrophoretic sensing and nanothermodynamic study of molecular reactions in the chemically active mid-IR spectrum.

Guided-mode-resonance-coupled plasmonic-active SiO(2) nanotubes for surface enhanced Raman spectroscopy.

We demonstrate a surface enhanced Raman scattering (SERS) substrate by integrating plasmonic-active SiO(2) nanotubes into Si(3)N(4) gratings. First, the dielectric grating that is working under guided mode resonance (GMR) provides enhanced electric field for localized surface plasmon polaritons on the surface of metallic nanoparticles. Second, we use SiO(2) nanotubes with densely assembled silver nanoparticles to provide a large amount of "hot spots" without significantly damping the GMR mode of the grating. Experimental measurement on Rhodamine-6G shows a constant enhancement factor of 8 ∼ 10 in addition to the existing SERS effect across the entire surface of the SiO(2) nanotubes.