RESUMO
In this work, enzymatic doped/undoped poly-silicon nanowire sensors with different lengths were fabricated using a top-down technique to measure glucose concentration. The sensitivity and resolution of these sensors correlate well with the dopant property and length of nanowire. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. However, the sensitivity is inversely proportional to the nanowire length. The optimum resolution can be better than 0.02 mg/dL for a doped type sensor with length of 3.5 µm. Furthermore, the proposed sensor was demonstrated for 30 applications with similar current-time response and showed good repeatability.
Assuntos
Nanofios , Silício , GlucoseRESUMO
In this paper, the poly-Si nanowire sensor was fabricated by top-down technique for sodium chloride concentration measurement. The results showed that the smallest threshold voltage and the best resolution were 1.65 V and 0.41 µM, respectively. Furthermore, the sensor can be reused more than 50 times which maintained acceptable performance and showed good linearity of the calibration within wide range of the concentration. Based on these results, it can be concluded that the proposed sensor has great potential to be used for measuring complicated sample with suitable modification on the surface of nanowires.