Hybrid 3C-silicon carbide-lithium niobate integrated photonic platform.

In this paper, we demonstrate a novel hybrid 3C-silicon carbide-lithium niobate (3C-SiC-LN) platform for passive and active integrated nanophotonic devices enabled through wafer bonding. These devices are fabricated by etching the SiC layer, with the hybrid optical mode power distributed between SiC and LN layers through a taper design. We present a racetrack resonator-based electro-optic (EO) phase shifter where the resonator is fabricated in SiC while using LN for EO-effect (r33≈ 27 pm/V). The proposed phase shifter demonstrates efficient resonance wavelength tuning with low voltage-length product (Vπ.Lπ ≈ 2.18 V cm) using the EO effect of LN. This hybrid SiC-LN platform would enable high-speed, low-power, and miniaturized photonic devices (e.g., modulators, switches, filters) operable over a broad range of wavelengths (visible to infrared) with applications in both classical and quantum nanophotonics.

Polysilicon micro-heaters for resonance tuning in CMOS photonics.

A new, to the best of our knowledge, device platform for tuning the resonance wavelength of integrated photonic resonators based on polysilicon-based micro-heaters for complementary metal-oxide semiconductor (CMOS)-foundry-based active Si photonics is demonstrated. The miniaturized micro-heater can be placed directly on the active Si layer, with a pedestal providing the optical and electrical isolation needed for the implementation of ultrafast active photonic devices such as modulators. The demonstrated devices do not require any additional modifications to the standard CMOS foundry processes. Experiments demonstrate a tuning efficiency of 0.25 nm/mW (or 42 GHz/mW) for a 5-µm-radius microdisk resonator with a loaded quality factor (Q) > 35,000. This polysilicon-based heater demonstrates a tunability of 42 GHz/mW with an average switching time of 60 µs. The proposed compact heater architecture enables it to be kept near to the optical mode, thereby providing efficient and high-speed wavelength tuning for resonant devices.

High-Q ultrasensitive integrated photonic sensors based on slot-ring resonator on a 3C-SiC-on-insulator platform.

We demonstrate, to the best of our knowledge, the first high-Q silicon carbide (SiC) integrated photonic sensor based on slot-ring resonators on a 3C-SiC-on-insulator (SiCOI) platform. We experimentally demonstrate an intrinsic Q of 17,400 at around 1310 nm wavelength for a slot-ring resonator with 40 µm radius with water cladding. By applying different concentrations of a sodium chloride (NaCl) solution that covers the devices, measured bulk sensitivities of 264-300 nm/RIU (refractive index unit) are achieved in the slot-ring resonator with a 400-450 nm rail width and a 100-200 nm slot width. The device performance for biomolecular layer sensing (BMLS) is proved by the detection of the cardiac biomarker troponin with 248-322 pm/nm surface sensitivity. The reported slot-ring resonators can be of great interest for diverse sensing applications from visible to infrared wavelengths.

ITO-based microheaters for reversible multi-stage switching of phase-change materials: towards miniaturized beyond-binary reconfigurable integrated photonics.

Inducing a large refractive-index change is the holy grail of reconfigurable photonic structures, a goal that has long been the driving force behind the discovery of new optical material platforms. Recently, the unprecedentedly large refractive-index contrast between the amorphous and crystalline states of Ge-Sb-Te (GST)-based phase-change materials (PCMs) has attracted tremendous attention for reconfigurable integrated nanophotonics. Here, we introduce a microheater platform that employs optically transparent and electrically conductive indium-tin-oxide (ITO) bridges for the fast and reversible electrical switching of the GST phase between crystalline and amorphous states. By the proper assignment of electrical pulses applied to the ITO microheater, we show that our platform allows for the registration of virtually any intermediate crystalline state into the GST film integrated on the top of the designed microheaters. More importantly, we demonstrate the full reversibility of the GST phase between amorphous and crystalline states. To show the feasibility of using this hybrid GST/ITO platform for miniaturized integrated nanophotonic structures, we integrate our designed microheaters into the arms of a Mach-Zehnder interferometer to realize electrically reconfigurable optical phase shifters with orders of magnitude smaller footprints compared to existing integrated photonic architectures. We show that the phase of optical signals can be gradually shifted in multiple intermediate states using a structure that can potentially be smaller than a single wavelength. We believe that our study showcases the possibility of forming a whole new class of miniaturized reconfigurable integrated nanophotonics using beyond-binary reconfiguration of optical functionalities in hybrid PCM-photonic devices.

Racetrack microresonator based electro-optic phase shifters on a 3C silicon-carbide-on-insulator platform.

We report, to the best of our knowledge, the first demonstration of integrated electro-optic (EO) phase shifters based on racetrack microresonators on a 3C silicon-carbide-on-insulator (SiCOI) platform working at near-infrared wavelengths. By applying DC voltage in the crystalline axis perpendicular to the waveguide plane, we have observed optical phase shifts from the racetrack microresonators whose loaded quality ($ Q $) factors are $\sim\! {30,\!000}$. We show voltage-length product (${{V}_{\pi}} \cdot {{L}_{ \pi}}$) of ${118}\;{{\rm V}\cdot{\rm cm}}$, which corresponds to an EO coefficient ${{r}_{41}}$ of 2.6 pm/V. The SiCOI platform can be used to realize tunable silicon carbide integrated photonic devices that are desirable for applications in nonlinear and quantum photonics over a wide bandwidth that covers visible and infrared wavelengths.

High-quality silicon on silicon nitride integrated optical platform with an octave-spanning adiabatic interlayer coupler.

Hybrid nanophotonic platforms based on three-dimensional integration of different photonic materials are emerging as promising ecosystems for the optoelectronic device fabrication. In order to benefit from key features of both silicon (Si) and silicon nitride (SiN) on a single chip, we have developed a wafer-scale hybrid photonic platform based on the integration of a thin crystalline Si layer on top of a thin SiN layer with an ultra-thin oxide buffer layer. A complete optical path in the hybrid platform is demonstrated by coupling light back and forth between nanophotonic devices in Si and SiN layers. Using an adiabatic tapered coupling method, a record-low interlayer coupling-loss of 0.02 dB is achieved at 1550 nm telecommunication wavelength window. We also demonstrate high-Q resonators on the hybrid material platform with intrinsic Q's as high as 3 × 10(6) for a 60 µm-radius microring resonator, which is (to the best of our knowledge) the highest Q observed for a micro-resonator on a hybrid Si/SiN platform.

Compact, 15 Gb/s electro-optic modulator through carrier accumulation in a hybrid Si/SiO(2)/Si microdisk.

High-speed electro-optic modulators are among the key elements in any optical interconnect system. In this work we design and demonstrate an electro-optic modulator based on carrier accumulation on a multilayer integrated photonic platform comprising a stack of high quality Si, SiO(2), and Si layers. The device consists of a 3-µm radius microdisk with an embedded capacitor. Characterization results reveal an operation bandwidth of exceeding 10 GHz. The device is capable of transmitting 15 Gb/s with the on/off keying format in a single polarization. The proposed structure can be self-trimmed by up to 1 nm in wavelength by applying a dc bias voltage without any power consumption. This feature eliminates the need for power-hungry thermal-based compensation methods to address the resonance wavelength mismatch due to fabrication imperfections.

Field-programmable optical devices based on resonance elimination.

Optical switches are among the essential building blocks in optical networks due to their unique role in routing data. In this Letter, for the first time to our knowledge, we have exploited a high-quality factor (Q) optical microresonator combined with the well-known irreversible dielectric breakdown phenomenon to introduce a simple field-programmable on/off optical switch. This simple unit can be thought of as a building block for more complex optical systems with different functionalities. By using this simple unit we have demonstrated an optical field-programmable 2×2 switch. After the device is programmed by the user, no external electrical signal is needed to maintain the state of the device. The same approach can readily be adopted to design a field-programmable arbitrary N×N optical switch.

Determination of complex modes in photonic crystal waveguides using the phase variation in characteristic coefficients.

An efficient frequency-domain method, the phase variation monitoring (PVM) method, is proposed to determine the electromagnetic eigenmodes in two-dimensional photonic crystal waveguides. The proposed method is based on monitoring the reflection and transmission coefficients of incident plane waves. It is successfully applied to an illustrative line-defect photonic crystal waveguide and proved to be capable of calculating the in-plane leakage through the finite-size photonic crystal surrounding the line-defect. Calculation of the leakage loss is not only important for proper understanding of wave propagation within the defect but also for its significant role in applications of photonic structures.