RESUMO
Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films ( approximately 5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.
RESUMO
The effects of accelerating voltage and collection angle on the mean free path for all inelastic electron scattering (lambdap), which is an important parameter for determining specimen thickness by using electron energy-loss spectroscopy, were investigated with crystalline Si and amorphous SiO2. First, thickness of Si film was measured with the convergent-beam electron diffraction method, while thickness of SiO2 particles was estimated from their spherical shape. Then from electron energy-loss spectra, lambdap was evaluated for Si film and SiO2 particles by changing the accelerating voltage (100 to approximately 300 kV) and the collection angle for the scattered electrons. Under the condition of no objective aperture, lambdap for Si film and SiO2 particles was found to increase with the increase of accelerating voltage and to take values of 180+/-6 nm (Si) and 247+/-8 nm (SiO2) at 300 kV. Also, it was found that lambdap in both cases decreases drastically with the increase of collection angle in the range smaller than 25 mrad, while it tends to take a constant value at the collection angle larger than 25 mrad at 200 kV.
RESUMO
Characteristic intensity distribution of diffuse scattering in III-V alloy semiconductor GaAs(0.5)Sb(0.5) epitaxially grown was observed by the energy-filtered electron diffraction method with [110] incidence. The diffuse scattering situates at the one-third positions between the fundamental reflections extending parallel to the q002 direction in the reciprocal space. A high-resolution electron microscope image shows weak contrast modulation corresponding to the diffuse scattering. The image processed with the Fourier transform by selecting the diffuse scattering and a fundamental reflection shows small regions consisting of bright dots being elongated along the (111) planes and aligning on the (002) planes, which are considered to result from the ordering of As and Sb during the growth process. The effect of including the fundamental reflection for imaging the ordered regions in the image processing method is also discussed. Finally, based on the results obtained by energy-filtered electron diffraction and high-resolution electron microscopy, a simple structure model for the short-range ordered structure in GaAs(0.5)Sb0.5 is proposed.
