Grass-like alumina coated window harnesses the full omnidirectional potential of black silicon photodiodes.

Packaged photodiodes suffer from Fresnel reflection from the package window glass, especially at high angles of incidence. This has a notable impact particularly on black silicon (b-Si) photodiodes, which have extreme sensitivity. In this work, we show that by adding a simple grass-like alumina antireflection (AR) coating on the window glass, excellent omnidirectional sensitivity and high external quantum efficiency (EQE) of b-Si photodiodes can be retained. We demonstrate that EQE increases at all angles, and up to 15% absolute increases in EQE at a 70° angle of incidence compared to conventional uncoated glass. Furthermore, even at the incidence angle of 50°, the double-sided coating provides higher EQE than bare glass at normal incidence. Our results demonstrate that grass-like alumina coatings are efficient and omnidirectional AR coatings for photodiode package windows in a wide wavelength range across the visible spectrum to near-infrared radiation.

Superhydrophobic Antireflection Coating on Glass Using Grass-like Alumina and Fluoropolymer.

This work presents a superhydrophobic antireflective (AR) coating on glass. The coating consists of a grass-like alumina layer capped with plasma-deposited fluoropolymer. The grass-like alumina is formed by hot water treatment of atomic layer-deposited alumina on glass, and the fluoropolymer is plasma-deposited from CHF3. Excellent broadband AR performance is observed in the visible spectrum with an average transmission of 94.9% for single-sided coated glass, which is close to the maximum 95.3% possible for this glass. Extremely desirable contact angles are obtained with 5-7 min-long fluoropolymer treatments on grass-like alumina with 173° advancing and 160° receding contact angles. This type of multifunctional coating can be beneficial in a multitude of applications like self-cleaning AR coating for solar panels, windows in high-rise buildings, sensors, and aerospace applications as well as just utilizing the excellent water repellent behavior in applications where only superhydrophobicity is required.

Wide-band 'black silicon' with atomic layer deposited NbN.

Antireflection surfaces are often utilized in optical components to reduce undesired reflection and increase absorption. We report on black silicon (b-Si) with dramatically enhanced absorption over a broad wavelength range (250-2500 nm) achieved by applying a 10-15 nm conformal coating of NbN with atomic layer deposition (ALD). The improvement is especially pronounced in the near infrared (NIR) range of 1100-2500 nm where absorption is increased by >90%. A significant increase of absorption is also observed over the ultraviolet range of 200-400 nm. Preceding NbN deposition with a nanostructured ALD Al2O3 (n-Al2O3) coating to enhance the NbN texture was also examined. Such texturing further improves absorption in the NIR, especially at longer wavelengths, strong absorption up to 4-5 µm wavelengths has been attested. For comparison, double side polished silicon and sapphire coated with 10 nm thick NbN exhibited absorption of only ∼55% in the NIR range of 1100-2500 nm. The results suggest a positive correlation between the surface area of NbN coating and optical absorption. Based on the wide-band absorption, the presented NbN-coated b-Si may be an attractive candidate for use in e.g. spectroscopic systems, infrared microbolometers.

Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition.

We present a new type of nanoporous antireflection (AR) coating based on grass-like alumina with a graded refractive index profile. The grass-like alumina AR coating is fabricated using atomic layer deposition (ALD) of alumina and immersion in heated deionized water. Optical transmittance of 99.5% at 500 nm was achieved with average transmittance of 99.0% in the range of 350-800 nm at normal incidence for double-sided coated glass. Angular spectral transmittance (0-80°) of the double-sided AR coated glass was also measured in the range of 350-800 nm and found to have mean spectral transmittance of 94.0% at 60°, 85.0% at 70°, and 53.1% at 80° angles of incidence, respectively. The grass-like alumina AR coating is suitable for mass production with the presented technique: even hundreds of optical components can be coated in parallel. Furthermore, as an ALD-based technique, the coating can be deposited conformally on surfaces with extreme topography, unlike many spin-coating, physical vapor deposition or glancing angle deposition-based coatings used today.