Directional Multi-Resonant Micro-Electromechanical System Acoustic Sensor for Low Frequency Detection.

This paper reports on the design, modeling, and characterization of a multi-resonant, directional, MEMS acoustic sensor. The design builds on previous resonant MEMS sensor designs to broaden the sensor's usable bandwidth while maintaining a high signal-to-noise ratio (SNR). These improvements make the sensor more attractive for detecting and tracking sound sources with acoustic signatures that are broader than discrete tones. In-air sensor characterization was conducted in an anechoic chamber. The sensor was characterized underwater in a semi-anechoic pool and in a standing wave tube. The sensor demonstrated a cosine-like directionality, a maximum acoustic sensitivity of 47.6 V/Pa, and a maximum SNR of 88.6 dB, for 1 Pa sound pressure, over the bandwidth of the sensor circuitry (100 Hz-3 kHz). The presented design represents a significant improvement in sensor performance compared to similar resonant MEMS sensor designs. Increasing the sensitivity of a single-resonator design is typically associated with a decrease in bandwidth. This multi-resonant design overcomes that limitation.

Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor.

This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweight, portable system for the detection and location of quiet or distant acoustic sources of interest. This study also reports on the underwater operation of this sensor and AVS. Studies were conducted in the lab and in the field utilizing multiple acoustic sources (e.g., generated tones, gun shots, drones). The sensor operates at resonance, providing for high acoustic sensitivity and a high signal-to-noise ratio (SNR). The sensor demonstrated a maximum SNR of 88 dB with an associated sensitivity of -84.6 dB re 1 V/µPa (59 V/Pa). The sensor design can be adjusted to set a specified resonant frequency to align with a known acoustic signature of interest. The AVS demonstrated an unambiguous, 360-degree, in-plane, azimuthal coverage and was able to provide an acoustic direction of arrival to an average error of within 3.5° during field experiments. The results of this research demonstrate the potential usefulness of this sensor and AVS design for specific applications.