Low-cost, durable master molds for thermal-NIL, UV-NIL, and injection molding.

Mold cost and mold lifetime are essential concerns for mass production of micro/nano-patterned surfaces by nanoimprint lithography or micro/nanoinjection molding. Master molds are typically produced by subtractive processing using wafer-based clean room techniques. For imprint lithography, polymer copies of such molds can often be employed, but the durability of such molds is quite limited. The conditions of high temperature and pressure for injection molding require use of the durable masters created in stainless steel, nickel or other robust materials, but such approaches are challenged by the high cost of patterning these substrates and limited lifetime. Here, we report the fabrication of durable crystalline zirconium dioxide (ZrO2) masters via a simple direct imprint technique. ZrO2 nanoparticles (NPs) were formulated into an ink and imprinted on a variety of substrates using a solvent-assisted patterning technique and subsequently annealed to increase the mechanical durability of the mold. The hardness and modulus values of the ZrO2 coatings reached 11 ± 2 GPa and 120 ± 10 GPa, respectively after annealing. The hard ZrO2 mold was then employed for precision patterning of polymer surfaces by thermal and UV nanoimprinting lithography (NIL) techniques, and by injection molding. High fidelity pattern transfer continued throughout 115 000 injection molding cycles, there was no evidence of delamination, breakage or wear in the ZrO2 mold. Our simple imprint patterning technique using ZrO2 NPs inks enable us to fabricate robust molds with excellent thermal and mechanical properties as easily as imprinting simple polymer replicas. This simple and low-cost approach to mold preparation can enable a large variety of high throughput or large area nano-replication technologies.

Design of Hierarchical Surfaces for Tuning Wetting Characteristics.

Patterned surfaces with tunable wetting properties are described. A hybrid hierarchical surface realized by combining two different materials exhibits different wetting states, depending on the speed of impingement of the water droplets. Both "lotus" (high contact angle and low adhesion) and "petal" (high contact angle and high adhesion) states were observed on the same surface without the need of any modification of the surface. The great difference between the capillary pressures exerted by the microstructures and nanostructures was the key factor that allowed us to tailor effectively the adhesiveness of the water droplets. Having a low capillary pressure for the microstructures and a high capillary pressure for the nanostructures, we allow to the surface the possibility of being in a lotus state or in a petal state.

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods.

Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young's modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.

Miniature sensor suitable for electronic nose applications.

A major research effort has been devoted over the years for the development of chemical sensors for the detection of chemical and explosive vapors. However, the deployment of such chemical sensors will require the use of multiple sensors (probably tens of sensors) in a sensor package to achieve selective detection. In order to keep the overall detector unit small, miniature sensors with sufficient sensitivity of detection will be needed. We report sensitive detection of dimethyl methylphosphonate (DMMP), a stimulant for the nerve agents, using a miniature sensor unit based on piezoresistive microcantilevers. The sensor can detect parts-per-trillion concentrations of DMMP within 10 s exposure times. The small size of the sensor makes it ideally suited for electronic nose applications.

Immobilisation of DNA to polymerised SU-8 photoresist.

SU-8 is an epoxy-based photosensitive resist, which is currently used for a large variety of MEMS and lab-on-a-chip applications. Here, we demonstrate a one-step process to functionalize SU-8 with DNA probes. The immobilisation procedure relies on direct coupling of DNA to SU-8 and resulted in surfaces with functional capture probe densities of approximately 10 fmol/mm(2) as determined by hybridisation assays with fluorescent labelled target molecules. A comparable density of functional capture probes was measured on commercial aldehyde coated glass. DNA probes did not decrease in hybridisation performance after 10 min incubation in water at 98 degrees C prior to hybridisation, indicating a covalent bond between DNA and SU-8. Finally, DNA microarrays of high quality were obtained on SU-8 by contact printing of probe solution directly on SU-8 demonstrating a simple method for the implementation of microarrays in microsystems.