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1.
Micromachines (Basel) ; 12(5)2021 Apr 27.
Artigo em Inglês | MEDLINE | ID: mdl-33925429

RESUMO

As the environmental considerations rise all over the world and under the drive of renewable energy policy, the society of hydrogen energy will come out gradually in the future. The proton exchange membrane water electrolyzer (PEMWE) is a very good hydrogen generator, characterized by low cost, high efficiency and zero emission of greenhouse gases. In this study, the micro temperature, humidity, flow, pressure, voltage, and current sensors were successfully integrated on a 50 µm thick Polyimide (PI) substrate by using micro-electro-mechanical systems (MEMS) technology. After the optimal design and process optimization of the flexible 6-in-1 microsensor, it was embedded in the PEMWE for a 500-h persistent effect test and internal real-time microscopic monitoring.

2.
Membranes (Basel) ; 11(2)2021 Jan 27.
Artigo em Inglês | MEDLINE | ID: mdl-33514055

RESUMO

In recent years, various countries have been paying attention to environmental protection issues, believing that climate change is the main challenge to the developed countries' energy policies. The most discussed solution is renewable energy. The energy storage system can reduce the burden of the overall power system of renewable energy. The hydrogen energy is one of the optimal energy storage system options of renewable energy at present. According to these policies and the future trend, this study used micro-electro-mechanical systems (MEMS) technology to integrate micro voltage, current, temperature, humidity, flow and pressure sensors on a 50 µm thick polyimide (PI) substrate. After the optimization design and process optimization, the flexible six-in-one microsensor was embedded in the proton exchange membrane water electrolyzer (PEMWE) for internal real-time microscopic monitoring.

3.
Micromachines (Basel) ; 11(12)2020 Dec 04.
Artigo em Inglês | MEDLINE | ID: mdl-33291618

RESUMO

The hydrogen production reaction of the proton exchange membrane (PEM) water electrolysis cell stack is the reverse reaction of the fuel cell, but the water electrolysis operation requires high pressure, and the high pressure decomposes hydrogen molecules, thus aging or causing failure in the water electrolysis cell stack. In addition, there are five important physical parameters (current, voltage, flow, pressure and temperature) inside the water electrolysis cell stack, which can change the performance and shorten the life of the cell stack. However, the present techniques obtain data only by external simulation or single measurement; they cannot collect the internal real data in operation instantly and accurately. This study discusses the causes for aging or failure, and develops an internal real-time microscopic diagnosis tool for accelerated aging of the PEM water electrolysis cell stack. A flexible integrated (current, voltage, flow, pressure and temperature) microsensor applicable to the inside (high voltage and electrochemical environment) of the PEM water electrolysis cell stack is developed by using micro-electro-mechanical systems (MEMS) technology; it is embedded in the PEM water electrolysis cell stack for microscopic diagnosis of accelerated aging, and 100-h durability and reliability tests are performed. The distribution of important physical parameters inside the PEM water electrolysis cell stack can be measured instantly and accurately, so as to adjust it to the optimal operating conditions, and the local aging and failure problems are discussed.

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