Nanoscale liquid droplet deposition using the ultrasmall aperture on a dynamic mode AFM tip.

We have developed a novel method for nanometer-sized droplet deposition of electrically conductive liquids based on the dynamic mode atomic force microscopy (AFM). We succeeded in depositing liquid droplets with a volume of ten zeptoliters or smaller and in making arrays of the droplets with a spacing of several tens of nanometers using the AFM cantilever with a small aperture fabricated by a focused ion beam. The liquid droplets were deposited through the aperture by applying an electric field between the liquid and a conductive surface.

Fabrication of ionic liquid thin film by nano-inkjet printing method using atomic force microscope cantilever tip.

We demonstrate the fabrication of thin films of ionic liquid (IL), 1-butyl-3-methyl-imidazolium tetrafluoborate, by nano-inkjet printing method using an atomic force microscope (AFM) cantilever. The IL filled in a pyramidal hollow of the AFM cantilever tip was extracted from an aperture at the bottom of the hollow and deposited onto a Pt substrate when the bias voltage was applied between the cantilever and the substrate. We succeeded in fabricating IL thin films with a thickness of 4nm. The areas and thicknesses of IL thin films were controlled by the fabrication conditions in this method, which is also useful for the investigations of nanometer-scale properties of ionic liquid.