Modulator chip based on semiconductor heterostructures with a surface diffraction grating for laser beam steering.

Design parameter optimization of a chip based on a heterostructure with a surface diffraction grating for laser beam angle modulation was carried out. It was found that the widest field of view is achieved at outcoupling angles close to the total internal reflection. The highest energy efficiency is provided by using epitaxy Bragg reflector on the substrate side. It is shown that using a multiple quantum well that gives electro-optic refractive index modulation by 0.007 and second-order surface diffraction grating with a period of 317 nm provides laser beam steering in a range of 5°, with resolution of 130 points at a wavelength of 782 nm.