RESUMO
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.
RESUMO
Crystalline cuprous oxide (Cu2O) particles were successfully deposited on poly(3,4-ethylenedioxythiophene) [PEDOT] coated indium tin oxide (ITO) glass. PEDOT film was first prepared on ITO glass by electrochemical polymerization. Crystalline Cu2O particles were then deposited on the PEDOT film by applying various electrochemical synthesis methods using a copper sulfate precursor. The effects of applied electrochemical methods on the compositions, grain sizes and shapes, and surface morphologies of the electrodeposited films were investigated. The micro structures of Cu2O particles were confirmed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). When the cyclic voltammetry (CV) and chronoamperometry (CA) were applied, fine Cu2O particles of cubic and pyramidal phase were formed, respectively. However, bare ITO electrode was used, metallic copper particle was obtained. It shall be assumed that PEDOT might act as a buffer layer in electrochemical reduction of cuprous ion. The details of PEDOT behavior will be the topic of future studies.
