RESUMO
Thermal atomic layer etch (ALE) of W metal can be achieved by sequential self-limiting oxidation and chlorination reactions at elevated temperatures. In this paper, we analyze the reaction mechanisms of W ALE using the first-principles simulation. We show that oxidizing agents such as O2, O3, and N2O can be used to produce a WOx surface layer in the first step of an ALE process with ozone being the most reactive. While the oxidation pulse on clean W is very exergonic, our study suggests that runaway oxidation of W is not thermodynamically favorable. In the second ALE pulse, WCl6 and Cl2 remove the oxidized surface W atoms by the formation of volatile tungsten oxychloride (WxOyClz) species. In this pulse, each adsorbed WCl6 molecule was found to remove one surface W atom with a moderate energy cost. Our calculations further show that the desorption of the additional etch products is endothermic by up to 4.7 eV. Our findings are consistent with the high temperatures needed to produce ALE in experiments. In total, our quantum chemical calculations have identified the lowest energy pathways for ALE of tungsten metal along with the most likely etch products, and these findings may help guide the development of improved etch reagents.
RESUMO
Size reduction of the barrier and liner stack for copper interconnects is a major bottleneck in further down-scaling of transistor devices. The role of the barrier is to prevent diffusion of Cu atoms into the surrounding dielectric, while the liner (also referred to as a seed layer) ensures that a smooth Cu film can be electroplated. Therefore, a combined barrier + liner material that restricts the diffusion of Cu into the dielectric and allows for copper electro-deposition is needed. In this paper, we have explored barrier + liner materials composed of 1 and 2 monolayers (MLs) of Ru-passivated ϵ-TaN and Ru doped ϵ-TaN and focused on their interactions with Cu through the adsorption of small Cu clusters with 1-4 atoms. Moreover, different doping patterns for Ru doping in TaN are investigated to understand how selective doping of the ϵ-TaN surface influences surface stability. We found that an increased concentration of Ru atoms in the outermost Ta layer improves the adhesion of Cu. The strongest binding of the Cu atoms was found on the 100% Ru doped surface followed by the 1 ML Ru passivated surface. These two surfaces are recommended for the combined barrier + liner for Cu interconnects. The closely packed arrangements of Cu were found to exhibit weak Cu-slab and strong Cu-Cu interactions, whereas the sparse arrangements of Cu exhibit strong Cu-slab and weak Cu-Cu interactions. The Cu atoms seem to bind more favorably when they are buried in the doped or passivated surface layer due to the increase in their coordination number. This is facilitated by the surface distortion arising from the ionic radius mismatch between Ta and Ru. We also show that the strong Cu-Cu interaction alone cannot predict the association of Cu atoms as a few 2D Cu clusters showed stronger Cu-Cu interaction than the 3D clusters, highlighting the importance of Cu-surface interactions.
RESUMO
Investigating the properties of protons in water is essential for understanding many chemical processes in aqueous solution. While important insights can in principle be gained by accurate and well-established methods like ab initio molecular dynamics simulations, the computational costs of these techniques are often very high. This prevents studying large systems on long time scales, which is severely limiting the applicability of computer simulations to address a wide range of interesting phenomena. Developing more efficient potentials enabling the simulation of water including dissociation and recombination events with first-principles accuracy is a very challenging task. In particular protonated water clusters have become important model systems to assess the reliability of such potentials, as the presence of the excess proton induces substantial changes in the local hydrogen bond patterns and many energetically similar isomers exist, which are extremely difficult to describe. In recent years it has been demonstrated for a number of systems including neutral water clusters of varying size that neural networks (NNs) can be used to construct potentials with close to first-principles accuracy. Based on density-functional theory (DFT) calculations, here we present a reactive full-dimensional NN potential for protonated water clusters up to the octamer. A detailed investigation of this potential shows that the energetic, structural, and vibrational properties are in excellent agreement with DFT results making the NN approach a very promising candidate for developing a high-quality potential for water. This finding is further supported by first preliminary but very encouraging NN-based simulations of the bulk liquid.
