1.
Nanotechnology
; 21(8): 85302, 2010 Feb 26.
Artigo
em Inglês
| MEDLINE
| ID: mdl-20097976
RESUMO
Fabrication of periodic nanodot or nanocolumn arrays on surfaces is performed by top-down lithographic procedures or bottom-up self-assembly methods, which both make use of plasma etching to transfer the periodic pattern. Could plasma etching alone act as an assembly--organization method to create the pattern and then transfer it to the substrate? We present data that support this idea and propose a mechanism of periodicity formation where etching and simultaneous deposition take place.