Coherent terahertz radiation with 2.8-octave tunability through chip-scale photomixed microresonator optical parametric oscillation.

High-spectral-purity frequency-agile room-temperature sources in the terahertz spectrum are foundational elements for imaging, sensing, metrology, and communications. Here we present a chip-scale optical parametric oscillator based on an integrated nonlinear microresonator that provides broadly tunable single-frequency and multi-frequency oscillators in the terahertz regime. Through optical-to-terahertz down-conversion using a plasmonic nanoantenna array, coherent terahertz radiation spanning 2.8-octaves is achieved from 330 GHz to 2.3 THz, with ≈20 GHz cavity-mode-limited frequency tuning step and ≈10 MHz intracavity-mode continuous frequency tuning range at each step. By controlling the microresonator intracavity power and pump-resonance detuning, tunable multi-frequency terahertz oscillators are also realized. Furthermore, by stabilizing the microresonator pump power and wavelength, sub-100 Hz linewidth of the terahertz radiation with 10-15 residual frequency instability is demonstrated. The room-temperature generation of both single-frequency, frequency-agile terahertz radiation and multi-frequency terahertz oscillators in the chip-scale platform offers unique capabilities in metrology, sensing, imaging and communications.

Multifunctional optoelectronic device based on graphene-coupled silicon photonic crystal cavities.

We present a hybrid device based on graphene-coupled silicon (Si) photonic crystal (PhC) cavities, featuring triple light detection, modulation, and switching. Through depositing single-layer graphene onto the PhC cavity, the light-graphene interaction can be enhanced greatly, which enables significant detection and modulation of the resonant wavelength. The device is designed to generate a photocurrent directly by the photovoltaic effect and has an external responsivity of ∼14 mA/W at 1530.8 nm (on resonance), which is about 10 times higher than that off-resonance. Based on the thermo-optical effect of silicon and graphene, the device is also demonstrated in electro-optical and all-optical modulation. Also, due to the high-quality (Q) factor of the resonate cavity, the device can implement low threshold optical bistable switching, and it promises a fast response speed, with a rise (fall) time of ∼0.4 µs (∼0.5 µs) in the all-optical switch and a rise (fall) time of ∼0.5 µs (∼0.5 µs) in the electro-optical hybrid switch. The multifunctional photodetector, modulator, and optical bistable switch are achieved in a single device, which greatly reduces the photonic overhead and provides potential applications for future integrated optoelectronics.

Nanometric Precision Distance Metrology via Hybrid Spectrally Resolved and Homodyne Interferometry in a Single Soliton Frequency Microcomb.

Laser interferometry serves a fundamental role in science and technology, assisting precision metrology and dimensional length measurement. During the past decade, laser frequency combs-a coherent optical-microwave frequency ruler over a broad spectral range with traceability to time-frequency standards-have contributed pivotal roles in laser dimensional metrology with ever-growing demands in measurement precision. Here we report spectrally resolved laser dimensional metrology via a free-running soliton frequency microcomb, with nanometric-scale precision. Spectral interferometry provides information on the optical time-of-flight signature, and the large free-spectral range and high coherence of the microcomb enable tooth-resolved and high-visibility interferograms that can be directly read out with optical spectrum instrumentation. We employ a hybrid timing signal from comb-line homodyne, microcomb, and background amplified spontaneous emission spectrally resolved interferometry-all from the same spectral interferogram. Our combined soliton and homodyne architecture demonstrates a 3-nm repeatability over a 23-mm nonambiguity range achieved via homodyne interferometry and over 1000-s stability in the long-term precision metrology at the white noise limits.

Gbps physical random bit generation based on the mesoscopic chaos of a silicon photonics crystal microcavity.

We present an experimental and theoretical physical random bit (PRB) generator using the mesoscopic chaos from a photonic-crystal optomechanical microcavity with a size of ∼10µm and very low operating intracavity energy of ∼60 Femto-Joule that was fabricated with CMOS compatible processes. Moreover, two kinds of PRB generation were proposed with rates over gigabits per second (Gbps). The randomness of the large PRB strings was further verified using the NIST Special Publication 800-22. In addition, the Diehard statistical test was also used to confirm the quality of the obtained PRBs. The results of this study can offer a new generation of dedicated PRB solutions that can be integrated on Si substrates, which can speed up systems and eliminate reliance on external mechanisms for randomness collection.

Wearable Triboelectric/Aluminum Nitride Nano-Energy-Nano-System with Self-Sustainable Photonic Modulation and Continuous Force Sensing.

Wearable photonics offer a promising platform to complement the thriving complex wearable electronics system by providing high-speed data transmission channels and robust optical sensing paths. Regarding the realization of photonic computation and tunable (de)multiplexing functions based on system-level integration of abundant photonic modulators, it is challenging to reduce the overwhelming power consumption in traditional current-based silicon photonic modulators. This issue is addressed by integrating voltage-based aluminum nitride (AlN) modulator and textile triboelectric nanogenerator (T-TENG) on a wearable platform to form a nano-energy-nano-system (NENS). The T-TENG transduces the mechanical stimulations into electrical signals based on the coupling of triboelectrification and electrostatic induction. The self-generated high-voltage from the T-TENG is applied to the AlN modulator and boosts its modulation efficiency regardless of AlN's moderate Pockels effect. Complementarily, the AlN modulator's capacitive nature enables the open-circuit operation mode of T-TENG, providing the integrated NENS with continuous force sensing capability which is notably uninfluenced by operation speeds. Furthermore, a physical model is proposed to describe the coupled AlN modulator/T-TENG system. With the enhanced photonic modulation and the open-circuit operation mode enabled by synergies between the AlN modulator and the T-TENG, optical Morse code transmission and continuous human motion monitoring are demonstrated for practical wearable applications.

Wearable Triboelectric-Human-Machine Interface (THMI) Using Robust Nanophotonic Readout.

With the rapid advances in wearable electronics and photonics, self-sustainable wearable systems are desired to increase service life and reduce maintenance frequency. Triboelectric technology stands out as a promising versatile technology due to its flexibility, self-sustainability, broad material availability, low cost, and good scalability. Various triboelectric-human-machine interfaces (THMIs) have been developed including interactive gloves, eye blinking/body motion-triggered interfaces, voice/breath monitors, and self-induced wireless interfaces. Nonetheless, THMIs conventionally use electrical readout and produce pulse-like signals due to the transient charge flows, leading to unstable and lossy transfer of interaction information. To address this issue, we propose a strategy by equipping THMIs with robust nanophotonic aluminum nitride (AlN) modulators for readout. The electrically capacitive nature of AlN modulators enables THMIs to work in the open-circuit condition with negligible charge flows. Meanwhile, the interaction information is transduced from THMIs' voltage to AlN modulators' optical output via the electro-optic Pockels effect. Thanks to the negligible charge flow and the high-speed optical information carrier, stable, information-lossless, and real-time THMIs are achieved. Leveraging the design flexibility of THMIs and nanophotonic readout circuits, various linear sensitivities independent of force speeds are achieved in different interaction force ranges. Toward practical applications, we develop a smart glove to realize continuous real-time robotics control and virtual/augmented reality interaction. Our work demonstrates a generic approach for developing self-sustainable HMIs with stable, information-lossless, and real-time features for wearable systems.

Real-time transition dynamics and stability of chip-scale dispersion-managed frequency microcombs.

Femtosecond mode-locked laser frequency combs have served as the cornerstone in precision spectroscopy, all-optical atomic clocks, and measurements of ultrafast dynamics. Recently frequency microcombs based on nonlinear microresonators have been examined, exhibiting remarkable precision approaching that of laser frequency combs, on a solid-state chip-scale platform and from a fundamentally different physical origin. Despite recent successes, to date, the real-time dynamical origins and high-power stabilities of such frequency microcombs have not been fully addressed. Here, we unravel the transitional dynamics of frequency microcombs from chaotic background routes to femtosecond mode-locking in real time, enabled by our ultrafast temporal magnifier metrology and improved stability of dispersion-managed dissipative solitons. Through our dispersion-managed oscillator, we further report a stability zone that is more than an order-of-magnitude larger than its prior static homogeneous counterparts, providing a novel platform for understanding ultrafast dissipative dynamics and offering a new path towards high-power frequency microcombs.

A Chip-Scale Oscillation-Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits.

Modern navigation systems integrate the global positioning system (GPS) with an inertial navigation system (INS), which complement each other for correct attitude and velocity determination. The core of the INS integrates accelerometers and gyroscopes used to measure forces and angular rate in the vehicular inertial reference frame. With the help of gyroscopes and by integrating the acceleration to compute velocity and distance, precision and compact accelerometers with sufficient accuracy can provide small-error location determination. Solid-state implementations, through coherent readout, can provide a platform for high performance acceleration detection. In contrast to prior accelerometers using piezoelectric or capacitive readout techniques, optical readout provides narrow-linewidth high-sensitivity laser detection along with low-noise resonant optomechanical transduction near the thermodynamical limits. Here an optomechanical inertial sensor with an 8.2 µg Hz-1/2 velocity random walk (VRW) at an acquisition rate of 100 Hz and 50.9 µg bias instability is demonstrated, suitable for applications, such as, inertial navigation, inclination sensing, platform stabilization, and/or wearable device motion detection. Driven into optomechanical sustained-oscillation, the slot photonic crystal cavity provides radio-frequency readout of the optically-driven transduction with an enhanced 625 µg Hz-1 sensitivity. Measuring the optomechanically-stiffened oscillation shift, instead of the optical transmission shift, provides a 220× VRW enhancement over pre-oscillation mode detection.

CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers.

The implementation of polarization controlling components enables additional functionalities of short-wave infrared (SWIR) imagers. The high-performance and mass-producible polarization controller based on Si metasurface is in high demand for the next-generation SWIR imaging system. In this work, we report the first demonstration of all-Si metasurface based polarizing bandpass filters (PBFs) on 12-inch wafers. The PBF achieves a polarization extinction ratio of above 10 dB in power within the passbands. Using the complementary metal-oxide-semiconductor (CMOS) compatible 193nm ArF deep ultra-violet (DUV) immersion lithography and inductively coupled plasma (ICP) etch processing line, a device yield of 82% is achieved.

Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform.

Aluminum nitride on insulator (AlNOI) photonics platform has great potential for mid-infrared applications thanks to the large transparency window, piezoelectric property, and second-order nonlinearity of AlN. However, the deployment of AlNOI platform might be hindered by the high propagation loss. We perform thermal annealing study and demonstrate significant loss improvement in the mid-infrared AlNOI photonics platform. After thermal annealing at 400°C for 2 hours in ambient gas environment, the propagation loss is reduced by half. Bend loss and taper coupling loss are also investigated. The performance of multimode interferometer, directional coupler, and add/drop filter are improved in terms of insertion loss, quality factor, and extinction ratio. Fourier-transform infrared spectroscopy, Raman spectroscopy, and X-ray diffraction spectroscopy suggest the loss improvement is mainly attributed to the reduction of extinction coefficient in the silicon dioxide cladding. Apart from loss improvement, appropriate thermal annealing also helps in reducing thin film stress.

Aluminum nitride on insulator (AlNOI) platform for mid-infrared photonics.

We report an aluminum nitride on insulator platform for mid-infrared (MIR) photonics applications beyond 3 µm. Propagation loss and bending loss are studied, while functional devices such as directional couplers, multimode interferometers, and add/drop filters are demonstrated with high performance. The complementary metal-oxide-semiconductor-compatible aluminum nitride offers advantages ranging from a large transparency window, high thermal and chemical resistance, to piezoelectric tunability and three-dimensional integration capability. This platform can have synergy with other photonics platforms to enable novel applications for sensing and thermal imaging in MIR.

Wavelength-Flattened Directional Coupler Based Mid-Infrared Chemical Sensor Using Bragg Wavelength in Subwavelength Grating Structure.

In this paper, we report a compact wavelength-flattened directional coupler (WFDC) based chemical sensor featuring an incorporated subwavelength grating (SWG) structure for the mid-infrared (MIR). By incorporating a SWG structure into directional coupler (DC), the dispersion in DC can be engineered to allow broadband operation which is advantageous to extract spectroscopic information for MIR sensing analysis. Meanwhile, the Bragg reflection introduced by the SWG structure produces a sharp trough at the Bragg wavelength. This sharp trough is sensitive to the surrounding refractive index (RI) change caused by the existence of analytes. Therefore, high sensitivity can be achieved in a small footprint. Around fivefold enhancement in the operation bandwidth compared to conventional DC is achieved for 100% coupling efficiency in a 40 µm long WFDC experimentally. Detection of dichloromethane (CH2Cl2) in ethanol (C2H5OH) is investigated in a SWG-based WFDC sensor 136.8 µm long. Sensing performance is studied by 3D finite-difference time domain (FDTD) simulation while sensitivity is derived by computation. Both RI sensing and absorption sensing are examined. RI sensing reveals a sensitivity of -0.47% self-normalized transmitted power change per percentage of CH2Cl2 concentration while 0.12% change in the normalized total integrated output power is realized in the absorption sensing. As the first demonstration of the DC based sensor in the MIR, our device has the potential for tertiary mixture sensing by utilizing both changes in the real and imaginary part of RI. It can also be used as a broadband building block for MIR application such as spectroscopic sensing system.

0.2 λ0 Thick Adaptive Retroreflector Made of Spin-Locked Metasurface.

The metasurface concept is employed to planarize retroflectors by stacking two metasurfaces with separation that is two orders larger than the wavelength. Here, a retroreflective metasurface using subwavelength-thick reconfigurable C-shaped resonators (RCRs) is reported, which reduces the overall thickness from the previous record of 590 λ0 down to only 0.2 λ0 . The geometry of RCRs could be in situ controlled to realize equal amplitude and phase modulation onto transverse magnetic (TM)-polarized and transverse electric (TE)-polarized incidences. With the phase gradient being engineered, an in-plane momentum could be imparted to the incident wave, guaranteeing the spin state of the retro-reflected wave identical to that of the incident light. Such spin-locked metasurface is natively adaptive toward different incident angles to realize retroreflection by mechanically altering the geometry of RCRs. As a proof of concept, an ultrathin retroreflective metasurface is validated at 15 GHz, under various illumination angles at 10°, 12°, 15°, and 20°. Such adaptive spin-locked metasurface could find promising applications in spin-based optical devices, communication systems, remote sensing, RCS enhancement, and so on.

Gate-tunable frequency combs in graphene-nitride microresonators.

Optical frequency combs, which emit pulses of light at discrete, equally spaced frequencies, are cornerstones of modern-day frequency metrology, precision spectroscopy, astronomical observations, ultrafast optics and quantum information1-7. Chip-scale frequency combs, based on the Kerr and Raman nonlinearities in monolithic microresonators with ultrahigh quality factors8-10, have recently led to progress in optical clockwork and observations of temporal cavity solitons11-14. But the chromatic dispersion within a laser cavity, which determines the comb formation15,16, is usually difficult to tune with an electric field, whether in microcavities or fibre cavities. Such electrically dynamic control could bridge optical frequency combs and optoelectronics, enabling diverse comb outputs in one resonator with fast and convenient tunability. Arising from its exceptional Fermi-Dirac tunability and ultrafast carrier mobility17-19, graphene has a complex optical dispersion determined by its optical conductivity, which can be tuned through a gate voltage20,21. This has brought about optoelectronic advances such as modulators22,23, photodetectors 24 and controllable plasmonics25,26. Here we demonstrate the gated intracavity tunability of graphene-based optical frequency combs, by coupling the gate-tunable optical conductivity to a silicon nitride photonic microresonator, thus modulating its second- and higher-order chromatic dispersions by altering the Fermi level. Preserving cavity quality factors up to 106 in the graphene-based comb, we implement a dual-layer ion-gel-gated transistor to tune the Fermi level of graphene across the range 0.45-0.65 electronvolts, under single-volt-level control. We use this to produce charge-tunable primary comb lines from 2.3 terahertz to 7.2 terahertz, coherent Kerr frequency combs, controllable Cherenkov radiation and controllable soliton states, all in a single microcavity. We further demonstrate voltage-tunable transitions from periodic soliton crystals to crystals with defects, mapped by our ultrafast second-harmonic optical autocorrelation. This heterogeneous graphene microcavity, which combines single-atomic-layer nanoscience and ultrafast optoelectronics, will help to improve our understanding of dynamical frequency combs and ultrafast optics.

A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics.

For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100th-order harmonics are obtained, with which the free-running frequency instability is lower than 10-6 at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.

Mesoscopic chaos mediated by Drude electron-hole plasma in silicon optomechanical oscillators.

Chaos has revolutionized the field of nonlinear science and stimulated foundational studies from neural networks, extreme event statistics, to physics of electron transport. Recent studies in cavity optomechanics provide a new platform to uncover quintessential architectures of chaos generation and the underlying physics. Here, we report the generation of dynamical chaos in silicon-based monolithic optomechanical oscillators, enabled by the strong and coupled nonlinearities of two-photon absorption induced Drude electron-hole plasma. Deterministic chaotic oscillation is achieved, and statistical and entropic characterization quantifies the chaos complexity at 60 fJ intracavity energies. The correlation dimension D2 is determined at 1.67 for the chaotic attractor, along with a maximal Lyapunov exponent rate of about 2.94 times the fundamental optomechanical oscillation for fast adjacent trajectory divergence. Nonlinear dynamical maps demonstrate the subharmonics, bifurcations and stable regimes, along with distinct transitional routes into chaos. This provides a CMOS-compatible and scalable architecture for understanding complex dynamics on the mesoscopic scale.

Quasi-phase-matched multispectral Kerr frequency comb.

We study a new type of Kerr frequency comb where the momentum conservation law is fulfilled by azimuthal modulation of the waveguide dispersion. The concept can expand the parametric range in which a Kerr frequency comb is obtained. In a good agreement with the theoretical analysis, we demonstrate a multispectral Kerr frequency comb covering important fiber-optic communication bands. Comb coherence and absence of a sub-comb offset are confirmed by continuous-wave heterodyne beat note and amplitude noise spectra measurements. The device can be used for achieving broadband optical frequency synthesizers and high-capacity coherent communication.

Controllable optomechanical coupling and Drude self-pulsation plasma locking in chip-scale optomechanical cavities.

We demonstrate the controllable optomechanical coupling and Drude self-pulsation plasma locking in chip-scale optomechanical cavities. The optomechanical coupling between the optical and mechanical degrees-of-freedom is dependent on the intracavity energy via the coupled fiber position. With the deterministic optomechanical stiffening, the interaction between optomechanical oscillation and self-pulsation can be controlled. Intracavity locking with 1/6 subharmonics is obtained over a wide optical detuning range of 190.01-192.23 THz. These results bring new insights into implementations of nonlinear dynamics at mesoscopic scale, with potential applications from photonic signal processing to nonlinear dynamic networks.

Real-time dynamics and cross-correlation gating spectroscopy of free-carrier Drude slow-light solitons.

Optical solitons-stable waves balancing delicately between nonlinearities and dispersive effects-have advanced the field of ultrafast optics and dynamics, with contributions spanning from supercontinuum generation to soliton fission, optical event horizons, Hawking radiation and optical rogue waves, among others. Here, we investigate picojoule soliton dynamics in silicon slow-light, photonic-bandgap waveguides under the influence of Drude-modeled, free-carrier-induced nonlinear effects. Using real-time and single-shot amplified dispersive Fourier transform spectroscopy simultaneously with high-fidelity cross-correlation frequency resolved optical gating at femtojoule sensitivity and femtosecond resolution, we examine the soliton stability limits, the soliton dynamics including free-carrier quartic slow-light scaling and acceleration, and the Drude electron-hole plasma-induced perturbations in the Cherenkov radiation and modulation instability. Our real-time single-shot and time-averaged cross-correlation measurements are matched with our detailed theoretical modeling, examining the reduced group velocity free-carrier kinetics on solitons at the picojoule scale.

Stabilized chip-scale Kerr frequency comb via a high-Q reference photonic microresonator.

We stabilize a chip-scale Si3N4 phase-locked Kerr frequency comb via locking the pump laser to an independent stable high-Q reference microresonator and locking the comb spacing to an external microwave oscillator. In this comb, the pump laser shift induces negligible impact on the comb spacing change. This scheme is a step toward miniaturization of the stabilized Kerr comb system as the microresonator reference can potentially be integrated on-chip. Fractional instability of the optical harmonics of the stabilized comb is limited by the microwave oscillator used for a comb spacing lock below 1 s averaging time and coincides with the pump laser drift in the long term.