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1.
Nanomaterials (Basel) ; 14(2)2024 Jan 05.
Artigo em Inglês | MEDLINE | ID: mdl-38251098

RESUMO

The combination of the unique physical properties of molybdenum disulfide (MoS2) with those of gallium nitride (GaN) and related group-III nitride semiconductors have recently attracted increasing scientific interest for the realization of innovative electronic and optoelectronic devices. A deep understanding of MoS2/GaN interface properties represents the key to properly tailor the electronic and optical behavior of devices based on this heterostructure. In this study, monolayer (1L) MoS2 was grown on GaN-on-sapphire substrates by chemical vapor deposition (CVD) at 700 °C. The structural, chemical, vibrational, and light emission properties of the MoS2/GaN heterostructure were investigated in detail by the combination of microscopic/spectroscopic techniques and ab initio calculations. XPS analyses on as-grown samples showed the formation of stoichiometric MoS2. According to micro-Raman spectroscopy, monolayer MoS2 domains on GaN exhibit an average n-type doping of (0.11 ± 0.12) × 1013 cm-2 and a small tensile strain (ε ≈ 0.25%), whereas an intense light emission at 1.87 eV was revealed by PL analyses. Furthermore, a gap at the interface was shown by cross-sectional TEM analysis, confirming the van der Waals (vdW) bond between MoS2 and GaN. Finally, density functional theory (DFT) calculations of the heterostructure were carried out, considering three different configurations of the interface, i.e., (i) an ideal Ga-terminated GaN surface, (ii) the passivation of Ga surface by a monolayer of oxygen (O), and (iii) the presence of an ultrathin Ga2O3 layer. This latter model predicts the formation of a vdW interface and a strong n-type doping of MoS2, in closer agreement with the experimental observations.

2.
J Phys Chem C Nanomater Interfaces ; 127(39): 19867-19877, 2023 Oct 05.
Artigo em Inglês | MEDLINE | ID: mdl-37817920

RESUMO

Controlling ultrafast material transformations with atomic precision is essential for future nanotechnology. Pulsed laser annealing (LA), inducing extremely rapid and localized phase transitions, is a powerful way to achieve this but requires careful optimization together with the appropriate system design. We present a multiscale LA computational framework that can simulate atom-by-atom the highly out-of-equilibrium kinetics of a material as it interacts with the laser, including effects of structural disorder. By seamlessly coupling a macroscale continuum solver to a nanoscale superlattice kinetic Monte Carlo code, this method overcomes the limits of state-of-the-art continuum-based tools. We exploit it to investigate nontrivial changes in composition, morphology, and quality of laser-annealed SiGe alloys. Validations against experiments and phase-field simulations as well as advanced applications to strained, defected, nanostructured, and confined SiGe are presented, highlighting the importance of a multiscale atomistic-continuum approach. Current applicability and potential generalization routes are finally discussed.

3.
Sensors (Basel) ; 23(14)2023 Jul 08.
Artigo em Inglês | MEDLINE | ID: mdl-37514544

RESUMO

Nowadays, Predictive Maintenance is a mandatory tool to reduce the cost of production in the semiconductor industry. This paper considers as a case study a critical part of the electrochemical deposition system, namely, the four Pins that hold a wafer inside a chamber. The aim of the study is to replace the schedule of replacement of Pins presently based on fixed timing (Preventive Maintenance) with a Hardware/Software system that monitors the conditions of the Pins and signals possible conditions of failure (Predictive Maintenance). The system is composed of optical sensors endowed with an image processing methodology. The prototype built for this study includes one optical camera that simultaneously takes images of the four Pins on a roughly daily basis. Image processing includes a pre-processing phase where images taken by the camera at different times are coregistered and equalized to reduce variations in time due to movements of the system and to different lighting conditions. Then, some indicators are introduced based on statistical arguments that detect outlier conditions of each Pin. Such indicators are pixel-wise to identify small artifacts. Finally, criteria are indicated to distinguish artifacts due to normal operations in the chamber from issues prone to a failure of the Pin. An application (PINapp) with a user friendly interface has been developed that guides industry experts in monitoring the system and alerting in case of potential issues. The system has been validated on a plant at STMicroelctronics in Catania (Italy). The study allowed for understanding the mechanism that gives rise to the rupture of the Pins and to increase the time of replacement of the Pins by a factor at least 2, thus reducing downtime.

4.
Nanomaterials (Basel) ; 13(8)2023 Apr 18.
Artigo em Inglês | MEDLINE | ID: mdl-37110982

RESUMO

The importance of lead analysis in environmental matrices becomes increasingly relevant due to the anthropogenic spread of toxic species in nature. Alongside the existing analytical methods to detect lead in a liquid environment, we propose a new dry approach for lead detection and measurement based on its capture from a liquid solution by a solid sponge and subsequent quantification based on X-ray analyses. The detection method exploits the relationship between the electronic density of the solid sponge, which depends on the captured lead, and the critical angle for total reflection of the X-rays. For this purpose, gig-lox TiO2 layers, grown by modified sputtering physical deposition, were implemented for their branched multi-porosity spongy structure that is ideal for capturing lead atoms or other metallic ionic species in a liquid environment. The gig-lox TiO2 layers grown on glass substrates were soaked into aqueous solutions containing different concentrations of Pb, dried after soaking, and finally probed through X-ray reflectivity analyses. It has been found that lead atoms are chemisorbed onto the many available surfaces within the gig-lox TiO2 sponge by establishing stable oxygen bonding. The infiltration of lead into the structure causes an increase in the overall electronic density of the layer and, thus, an increment of its critical angle. Based on the established linear relationship between the amount of lead adsorbed and the augmented critical angle, a standardized quantitative procedure to detect Pb is proposed. The method can be, in principle, applied to other capturing spongy oxides and toxic species.

5.
Int J Mol Sci ; 24(8)2023 Apr 07.
Artigo em Inglês | MEDLINE | ID: mdl-37108041

RESUMO

The molecular doping (MD) process is based on the deposition of dopant-containing molecules over the surface of a semiconductor substrate, followed by the thermal diffusion step. Previous studies suggest that, during the deposition, the molecules nucleate clusters, and at prolonged deposition times, they grow into self-assembled layers on the sample to be doped. Little is known about the influence of nucleation kinetics on the final properties of these layers and how they change when we modify the solution properties. In this work, we examine the nucleation rate and the molecular surface coverage kinetics of diethyl-propyl phosphonate on silicon at different solution concentrations and how these conditions influence the final electrical properties of the doped samples. We present a high-resolution morphological characterization of the as-deposited molecules together with the electrical results of the final doped samples. The experimental results show a non-obvious behavior, explained through understanding of the competition between the molecules' physisorption and chemisorption mechanisms. As a consequence, due to the deeper knowledge of the deposition phase, a finer tuning of the conductive properties of MD-doped samples is achieved.


Assuntos
Eletricidade , Organofosfonatos , Análise por Conglomerados , Condutividade Elétrica , Cinética
6.
Phys Chem Chem Phys ; 24(36): 21549-21566, 2022 Sep 21.
Artigo em Inglês | MEDLINE | ID: mdl-36065836

RESUMO

Innovation is essential around the themes of climate change and sustainability. Commercial photovoltaics (PV) have noticeably contributed to getting to 22.1% share of the gross final energy consumption in Europe from renewable sources in 2020 but a steep further increase is urgent in the near future. Over the last few years, great success has been achieved by perovskites applied to PV, with mixed anions and cations in shared lattices that reached record efficiency values close to those of Si in laboratory-scale solar cells (∼26%). Their use has recently shed light on a medium/long-term compositional instability that arises from the partial miscibility of the species with similar role in the atomic lattice. The chemical route to prepare the materials for Perovskite Solar Cells (PSCs) also needs to be critically reviewed. Material waste and reuse are other concerns to be faced. This perspective paper indeed tackles some aspects for innovation and sustainability on the PSC field for production purposes. Some hints for technologically affordable processes based on in-vacuum deposition of Perovskites are provided in light of their sustainability and for the need to reduce production/maintenance costs. It is also discussed how to make in-vacuum production further competitive by boosting the material quality. Innovation is also projected into the theme of making sustainable choices for device architectures and materials. Carbon-based PSCs are highly focused since they allow avoiding the use of complex, unstable and costly HTLs. From the material side, pros and cons of using fully inorganic CsPbI3 are commented, framed by the current revival of single-cation perovskites. CsPbI3, in particolar, enables recycling and reuse initiatives thanks to the overall mass preservation under degradation. Some closing remarks are provided on the safe use of Pb as its effective sequestration before release from the PSC into the environment is properly engineered. We lastly trust that initiatives bringing together academic and industrial know-how in complementary fields able to take up responsible innovation will contribute to accelerating the ecological transition and will enable the societal transformation to fulfil the 2050 EU agenda for a sustainable future.

7.
Nanomaterials (Basel) ; 12(5)2022 Feb 25.
Artigo em Inglês | MEDLINE | ID: mdl-35269260

RESUMO

Aluminum-doped zinc oxide (AZO) is an electrically conductive and optically transparent material with many applications in optoelectronics and photovoltaics as well as in the new field of plasmonic metamaterials. Most of its applications contemplate the use of complex and nanosized materials as substrates onto which the AZO forms the coating layer. Its morphological characteristics, especially the conformality and crystallographic structure, are crucial because they affect its opto-electrical response. Nevertheless, it was difficult to find literature data on AZO layers deposited on non-planar structures. We studied the AZO growth on silicon-nanowires (SiNWs) to understand its morphological evolution when it is formed on quasi one-dimensional nanostructures. We deposited by sputtering different AZO thicknesses, leading from nanoclusters until complete incorporation of the SiNWs array was achieved. At the early stages, AZO formed crystalline nano-islands. These small clusters unexpectedly contained detectable Al, even in these preliminary phases, and showed a wurtzite crystallographic structure. At higher thickness, they coalesced by forming a conformal polycrystalline shell over the nanostructured substrate. As the deposition time increased, the AZO conformal deposition led to a polycrystalline matrix growing between the SiNWs, until the complete array incorporation and planarization. After the early stages, an interesting phenomenon took place leading to the formation of hook-curved SiNWs covered by AZO. These nanostructures are potentially very promising for optical, electro-optical and plasmonic applications.

8.
Materials (Basel) ; 14(18)2021 Sep 16.
Artigo em Inglês | MEDLINE | ID: mdl-34576572

RESUMO

In this review paper, several new approaches about the 3C-SiC growth are been presented. In fact, despite the long research activity on 3C-SiC, no devices with good electrical characteristics have been obtained due to the high defect density and high level of stress. To overcome these problems, two different approaches have been used in the last years. From one side, several compliance substrates have been used to try to reduce both the defects and stress, while from another side, the first bulk growth has been performed to try to improve the quality of this material with respect to the heteroepitaxial one. From all these studies, a new understanding of the material defects has been obtained, as well as regarding all the interactions between defects and several growth parameters. This new knowledge will be the basis to solve the main issue of the 3C-SiC growth and reach the goal to obtain a material with low defects and low stress that would allow for realizing devices with extremely interesting characteristics.

9.
Materials (Basel) ; 14(16)2021 Aug 23.
Artigo em Inglês | MEDLINE | ID: mdl-34443290

RESUMO

We present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. The simulation approach is formulated in the framework of the phase-field theory and it consists of a system of coupled non-linear partial differential equations (PDEs), which considers as variables the following fields: the laser electro-magnetic field, the temperature, the phase-field and the material (Ni, Si, C, C clusters and Ni-silicides) densities. The model integrates a large set of materials and reaction parameters which could also self-consistently depend on the model variables. A parameter calibration is also proposed, specifically suited for the wavelength of a widely used class of excimer lasers (λ = 308 nm). The model is implemented on a proprietary laser annealing technology computer-aided design (TCAD) tool based on the finite element method (FEM). This integration allows, in principle, numerical solutions in systems of any dimension. Here we discuss the complex simulation trend in the one-dimensional case, considering as a starting state, thin films on 4H-SiC substrates, i.e., a configuration reproducing a technologically relevant case study. Simulations as a function of the laser energy density show an articulated scenario, also induced by the variables' dependency of the materials' parameters, for the non-melting, partial-melting and full-melting process conditions. The simulation results are validated by post-process experimental analyses of the microstructure and composition of the irradiated samples.

10.
Nanomaterials (Basel) ; 11(8)2021 Jul 24.
Artigo em Inglês | MEDLINE | ID: mdl-34443729

RESUMO

Molecular Doping (MD) involves the deposition of molecules, containing the dopant atoms and dissolved in liquid solutions, over the surface of a semiconductor before the drive-in step. The control on the characteristics of the final doped samples resides on the in-depth study of the molecule behaviour once deposited. It is already known that the molecules form a self-assembled monolayer over the surface of the sample, but little is known about the role and behaviour of possible multiple layers that could be deposited on it after extended deposition times. In this work, we investigate the molecular surface coverage over time of diethyl-propyl phosphonate on silicon, by employing high-resolution morphological and electrical characterization, and examine the effects of the post-deposition surface treatments on it. We present these data together with density functional theory simulations of the molecules-substrate system and electrical measurements of the doped samples. The results allow us to recognise a difference in the bonding types involved in the formation of the molecular layers and how these influence the final doping profile of the samples. This will improve the control on the electrical properties of MD-based devices, allowing for a finer tuning of their performance.

11.
Materials (Basel) ; 14(13)2021 Jul 01.
Artigo em Inglês | MEDLINE | ID: mdl-34279246

RESUMO

In this work, raw halloysite mineral from Dunino (Poland) has been characterized and tested as an efficient and low-cost adsorbent for dye removal from water. The morphology and structure of this clay were characterized using scanning electron microscopy (SEM) and transmission electron microscopy (TEM) and the chemical composition was evaluated by means of X-ray fluorescence spectroscopy (XRF), energy dispersive X-ray spectroscopy (EDX), and electron energy loss spectroscopy (EELS). The results showed that it is made up of both platy and tubular structures, mainly composed of Si, Al, and O. Iron oxide particles covering the platy structures were also observed. The surface charge of halloysite was measured by z-potential measurements and by the evaluation of the point of zero charge. The clay was tested as an adsorbent for the removal of positively and negatively charged dye molecules, i.e., methylene blue (MB) and methyl orange (MO), both separately and in a mixed-dye solution. Halloysite showed the ability to efficiently and selectively remove MB molecules by adsorption, both in a single-dye solution and in a mixed one. The adsorption of positive dyes on the clay surface mainly occurred through ion exchange at negatively charged sites on its surface. The possibility of regenerating the clay for further dye removal processes is also shown.

12.
Nanomaterials (Basel) ; 11(5)2021 May 13.
Artigo em Inglês | MEDLINE | ID: mdl-34068185

RESUMO

The realization of stable inorganic perovskites is crucial to enable low-cost solution-processed photovoltaics. However, the main candidate material, CsPbI3, suffers from a spontaneous phase transition at room temperature towards a photo-inactive orthorhombic δ-phase (yellow phase). Here we used theoretical and experimental methods to study the structural and electronic features that determine the stability of the CsPbI3 perovskite. We argued that the two physical characteristics that favor the black perovskite phase at low temperatures are the strong spatial confinement in nanocrystalline structures and the level of electron doping in the material. Within this context, we discussed practical procedures for the realization of long-lasting inorganic lead halide perovskites.

13.
Front Chem ; 8: 200, 2020.
Artigo em Inglês | MEDLINE | ID: mdl-32373574

RESUMO

Carbon-based top electrodes for hole-transporting-layer-free perovskite solar cells (PSCs) were made by hot press (HP) transfer of a free-standing carbon-aluminum foil at 100°C and at a pressure of 0.1 MPa on a methylammonium lead iodide (MAPbI3) layer. Under these conditions, the perovskite surface was preserved from interaction with the solvent. Over a timescale of 90 days, HP-PSCs were systematically compared to reference cells with carbon-based top electrodes deposited by doctor blading (DB). We found that all the photovoltaic parameters recorded in HP-PSCs during time under ambient conditions settled on values systematically higher than those measured in the reference DB-PSCs, with efficiency stabilized at around 6% within the first few measurements. On the other hand, in DB-PSCs, a long-lasting (~14 days) degrading transient of the performances was observed, with a loss of efficiency from an initial ~8% to ~3%. Moreover, in HP-PSCs, a systematic day-by-day recovery of the efficiency after operation was observed (Δ~2%) by leaving the cell under open circuit, a nitrogen environment, and dark conditions. Noteworthily, a full recovery of all the parameters was observed at the end of the experiment, while DB-PSCs showed only a partial recovery under the same conditions. Hence, the complete release of solvent from the carbon contact, before an interface is established with the perovskite layer, offers a definite advantage through the long period of operation in preventing irreversible degradation. Our findings indeed highlight the crucial role of the interfaces and their feasible preservation under nitrogen atmosphere.

14.
J Phys Chem Lett ; 11(7): 2490-2496, 2020 Apr 02.
Artigo em Inglês | MEDLINE | ID: mdl-32148047

RESUMO

Single crystals represent a benchmark for understanding the bulk properties of halide perovskites. We have indeed studied the dielectric function of lead bromide perovskite single crystals (MAPbBr3, CsPbBr3 and for the first time FAPbBr3) by spectroscopic ellipsometry in the range of 1-5 eV while varying the temperature from 183 to 440 K. An extremely low absorption coefficient in the sub-band gap region was found, indicating the high optical quality of all three crystals. We extracted the band gap values through critical point analysis showing that Tauc-based values are systematically underestimated. The two structural phase transitions, i.e., orthorhombic-tetragonal and tetragonal-cubic, show distinct optical behaviors, with the former having a discontinuous character. The cross-correlation of optical data with DFT calculations evidences the role of octahedral tilting in tailoring the value of the band gap at a given temperature, whereas differences in the thermal expansion affect the slope of the band gap trend as a function of temperature.

15.
J Phys Chem Lett ; 11(3): 1068-1074, 2020 Feb 06.
Artigo em Inglês | MEDLINE | ID: mdl-31958370

RESUMO

Halide perovskites containing a mixture of formamidinium (FA+), methylammonium (MA+) and cesium (Cs+) cations are the actual standard for obtaining record-efficiency perovskite solar cells. Although the compositional tuning that brings to optimal performance of the devices has been largely established, little is understood on the role of even small quantities of MA+ or Cs+ in stabilizing the black phase of FAPbI3 while boosting its photovoltaic yield. In this paper, we use Car-Parrinello molecular dynamics in large supercells containing different ratios of FA+ and either MA+ or Cs+, in order to study the structural and kinetic features of mixed perovskites at room temperature. Our analysis shows that cation mixing relaxes the rotational disorder of FA+ molecules by preferentially aligning their axis toward ⟨100⟩ cubic directions. The phenomenon stems from the introduction of additional local minima in the energetic landscape, which are absent in pure FAPbI3 crystals. As a result, a higher structural order is achieved, characterized by a pronounced octahedral tilting and a lower vibrational activity for the inorganic framework. We show that both MA+ and Cs+ are qualified for this enhancement, with Cs+ being particularly effective when diluted within the FAPbI3 perovskite.

16.
ACS Omega ; 4(19): 17967-17971, 2019 Nov 05.
Artigo em Inglês | MEDLINE | ID: mdl-31720500

RESUMO

Quantum confinement effects in silicon nanowires (SiNWs) are expected when their diameter is less than the size of the free exciton (with a Bohr radius ∼5 nm) in bulk silicon. However, their synthesis represents a considerable technological challenge. The vapor-liquid-solid (VLS) mechanism, mediated by metallic nanoclusters brought to the eutectic liquid state, is most widely used for its simplicity and control on the SiNWs size, shape, orientation, density, and surface smoothness. VLS growth is often performed within high-vacuum physical vapor deposition systems, where the eutectic composition and the pressure conditions define the minimum diameter of the final nanowire usually around 100 nm. In this article, we present and discuss the SiNWs' growth by the VLS method in a plasma-based chemical vapor deposition system, working in the mTorr pressure range. The purpose is to demonstrate that it is possible to obtain nanostructures with sizes well beyond the observed limit by modulating the deposition parameters, like chamber pressure and plasma power, to find the proper thermodynamic conditions for nucleation. The formation of SiNWs with sub-5 nm diameter is demonstrated.

17.
Materials (Basel) ; 12(20)2019 Oct 18.
Artigo em Inglês | MEDLINE | ID: mdl-31635213

RESUMO

This work reports on the properties of cubic silicon carbide (3C-SiC) grown epitaxially on a patterned silicon substrate composed of squared inverted silicon pyramids (ISP). This compliant substrate prevents stacking faults, usually found at the SiC/Si interface, from reaching the surface. We investigated the effect of the size of the inverted pyramid on the epilayer quality. We noted that anti-phase boundaries (APBs) develop between adjacent faces of the pyramid and that the SiC/Si interfaces have the same polarity on both pyramid faces. The structure of the heterointerface was investigated. Moreover, due to the emergence of APB at the vertex of the pyramid, voids buried on the epilayer form. We demonstrated that careful control of the growth parameters allows modification of the height of the void and the density of APBs, improving SiC epitaxy quality.

18.
Nanomaterials (Basel) ; 9(9)2019 Sep 11.
Artigo em Inglês | MEDLINE | ID: mdl-31514348

RESUMO

We created a blend between a TiO2 sponge with bimodal porosity and a Methyl-Ammonium Lead Iodide (MAPbI3) perovskite. The interpenetration of the two materials is effective thanks to the peculiar sponge structure. During the early stages of the growth of the TiO2 sponge, the formation of 5-10 nm-large TiO2 auto-seeds is observed which set the micro-porosity (<5 nm) of the layer, maintained during further growth. In a second stage, the auto-seeds aggregate into hundreds-of-nm-large meso-structures by their mutual shadowing of the grazing Ti flux for local oxidation. This process generates meso-pores (10-100 nm) treading across the growing layer, as accessed by tomographic synchrotron radiation coherent X-ray imaging and environmental ellipsometric porosimetry. The distributions of pore size are extracted before (>47% V) and after MAPbI3 loading, and after blend ageing, unfolding a starting pore filling above 80% in volume. The degradation of the perovskite in the blend follows a standard path towards PbI2 accompanied by the concomitant release of volatile species, with an activation energy of 0.87 eV under humid air. The use of dry nitrogen as environmental condition has a positive impact in increasing this energy by ~0.1 eV that extends the half-life of the material to 7 months under continuous operation at 60 °C.

19.
Phys Rev E ; 99(6-1): 063307, 2019 Jun.
Artigo em Inglês | MEDLINE | ID: mdl-31330610

RESUMO

A computational approach that couples molecular-dynamics (MD) and the-finite-element-method (FEM) technique is here proposed for the theoretical study of the dynamics of particles subjected to electromechanical forces. The system consists of spherical particles (modeled as micrometric rigid bodies with proper densities and dielectric functions) suspended in a colloidal solution, which flows in a microfluidic channel in the presence of a generic nonuniform variable electric field generated by electrodes. The particles are subjected to external forces (e.g., drag or gravity) which satisfy a particlelike formulation that is typical of the MD approach, along with an electromechanical force that, in turn, requires the three-dimensional self-consistent solutions of correct continuum field equations during the integration of the equations of motion. In the MD-FEM method used in this work, the finite element method is applied to solve the continuum field equations while the MD technique is used for the stepwise explicit integration of the equations of motion. Our work shows the potential of coupled MD-FEM simulations for the study of electromechanical particles and opens a double perspective for implementing (a) MD away from the field of atomistic simulations and (b) the continuum-particle approach to cases where the conventional force evaluation used in MD is not applicable.

20.
Nanomaterials (Basel) ; 9(6)2019 May 30.
Artigo em Inglês | MEDLINE | ID: mdl-31151299

RESUMO

Silicon nanowires (Si-NWs) have been extensively studied for their numerous applications in nano-electronics. The most common method for their synthesis is the vapor-liquid-solid growth, using gold as catalyst. After the growth, the metal remains on the Si-NW tip, representing an important issue, because Au creates deep traps in the Si band gap that deteriorate the device performance. The methods proposed so far to remove Au offer low efficiency, strongly oxidize the Si-NW sidewalls, or produce structural damage. A physical and chemical characterization of the as-grown Si-NWs is presented. A thin shell covering the Au tip and acting as a barrier is found. The chemical composition of this layer is investigated through high resolution transmission electron microscopy (TEM) coupled with chemical analysis; its formation mechanism is discussed in terms of atomic interdiffusion phenomena, driven by the heating/cooling processes taking place inside the eutectic-Si-NW system. Based on the knowledge acquired, a new efficient etching procedure is developed. The characterization after the chemical etching is also performed to monitor the removal process and the Si-NWs morphological characteristics, demonstrating the efficiency of the proposed method and the absence of modifications in the nanostructure.

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