Acoustic Wave-Driven Liquid Metal Expansion.

In this paper, we report a volume expansion phenomenon of a liquid metal droplet naturally oxidized in an ambient environment by applying an acoustic wave. An oxidized gallium-based liquid metal droplet was placed on a paper towel, and a piezo-actuator was attached underneath it. When a liquid metal droplet was excited by acoustic wave, the volume of liquid metal was expanded due to the inflow of air throughout the oxide crack. The liquid metal without the oxide layer cannot be expanded with an applied acoustic wave. To confirm the effect of the expansion of the oxidized liquid metal droplet, we measured an expansion ratio, which was calculated by comparing the expanded size in the x (horizontal), y (vertical) axis to the initial size of the liquid metal droplet, using a high-speed camera. For various volumes of the droplet, when we applied various voltages in the range of 5~8 Vrms with 18.5~24.5 kHz using the piezo-actuator, we obtained a maximum expansion ratio of 2.4 in the x axis and 3.8 in the y axis, respectively. In addition, we investigated that the time to reach the maximum expansion in proportion to the volume size of liquid metal differed by five times from 4 s to 20 s, and that the time to maintain the maximum expansion differed from 23 s to 2.5 s, which was inversely proportional to the volume size. We also investigated the expansion ratios depending on the exposure time to the atmosphere. Finally, a circuit containing LED, which can be turned on by expanded liquid metal droplet, was demonstrated.

Review of Electrothermal Micromirrors.

Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

Electric Field-Driven Liquid Metal Droplet Generation and Direction Manipulation.

A gallium-based liquid metal got high attention recently, due to the excellent material properties that are useful in various research areas. We report here on electric field-induced liquid metal droplet generation and falling direction manipulation. The well-analyzed electro-hydrodynamic method is a selectable way to control the liquid metal, as the liquid metal is conductive. The electric field-induced liquid metal manipulation can be affected by the flow rate (0.05~0.2 mL/min), voltage (0~7 kV), and distance (15 and 30 mm) between electrodes, which changes the volume of the electric field-induced generated liquid metal droplet and the number of the generated droplets. When the electric field intensity increases or the flow rate increases, the generated droplet volume decreases, and the number of droplets increases. With the highest voltage of 7 kV with 15 mm between electrodes at the 0.2 mL/min flow rate, the lowest volume and the largest number of the generated droplets for 10 s were ~10 nL and 541, respectively. Additionally, we controlled the direction of the generated droplet by changing the electric field. The direction of the liquid metal droplet was controlled with the maximum angle of ~12°. Moreover, we exhibited a short circuit demonstration by controlling the volume or falling direction of the generated liquid metal droplet with an applied electric field.

Biocompatibility of SU-8 and Its Biomedical Device Applications.

SU-8 is an epoxy-based, negative-tone photoresist that has been extensively utilized to fabricate myriads of devices including biomedical devices in the recent years. This paper first reviews the biocompatibility of SU-8 for in vitro and in vivo applications. Surface modification techniques as well as various biomedical applications based on SU-8 are also discussed. Although SU-8 might not be completely biocompatible, existing surface modification techniques, such as O2 plasma treatment or grafting of biocompatible polymers, might be sufficient to minimize biofouling caused by SU-8. As a result, a great deal of effort has been directed to the development of SU-8-based functional devices for biomedical applications. This review includes biomedical applications such as platforms for cell culture and cell encapsulation, immunosensing, neural probes, and implantable pressure sensors. Proper treatments of SU-8 and slight modification of surfaces have enabled the SU-8 as one of the unique choices of materials in the fabrication of biomedical devices. Due to the versatility of SU-8 and comparative advantages in terms of improved Young's modulus and yield strength, we believe that SU-8-based biomedical devices would gain wider proliferation among the biomedical community in the future.

Conversion of Polymer Surfaces into Nonwetting Substrates for Liquid Metal Applications.

Liquid metal-based applications are limited by the wetting nature of polymers toward surface-oxidized gallium-based liquid metals. This work demonstrates that a 120 s CF4/O2 plasma treatment of polymer surfaces-such as poly(dimethylsiloxane) (PDMS), SU8, S1813, and polyimide-converts these previously wetting surfaces to nonwetting surfaces for gallium-based liquid metals. Static and advancing contact angles of all plasma-treated surfaces are >150°, and receding contact angles are >140°, with contact angle hysteresis in the range of 8.2-10.7°, collectively indicating lyophobic behavior. This lyophobic behavior is attributed to the plasma simultaneously fluorinating the surface while creating sub-micron scale roughness. X-ray photoelectron spectroscopy (XPS) results show a large presence of fluorine at the surface, indicating fluorination of surface methyl groups, while atomic force microscopy (AFM) results show that plasma-treated surfaces have an order of magnitude greater surface roughness than pristine surfaces, indicating a Cassie-Baxter state, which suggests that surface roughness is the primary cause of the nonwetting property, with surface chemistry making a smaller contribution. Solid surface free energy values for all plasma-treated surfaces were found to be generally lower than the pristine surfaces, indicating that this process can be used to make similar classes of polymers nonwetting to gallium-based liquid metals.

Editorial for the Special Issue on the ICAE 2019.

This special issue is a collection of 10 selected papers after presenting at the Fifth International Conference on Advanced Electromaterials (ICAE 2019), held in Jeju, South Korea on 5-8 November 2019 [...].

An Implanted Magnetic Microfluidic Pump for In Vivo Bone Remodeling Applications.

Modulations of fluid flow inside the bone intramedullary cavity has been found to stimulate bone cellular activities and augment bone growth. However, study on the efficacy of the fluid modulation has been limited to external syringe pumps connected to the bone intramedullary cavity through the skin tubing. We report an implantable magnetic microfluidic pump which is suitable for in vivo studies in rodents. A compact microfluidic pump (22 mm diameter, 5 mm in thickness) with NdFeB magnets was fabricated in polydimethylsiloxane (PDMS) using a set of stainless-steel molds. An external actuator with a larger magnet was used to wirelessly actuate the magnetic microfluidic pump. The characterization of the static pressure of the microfluidic pump as a function of size of magnets was assessed. The dynamic pressure of the pump was also characterized to estimate the output of the pump. The magnetic microfluidic pump was implanted into the back of a Fischer-344 rat and connected to the intramedullary cavity of the femur using a tube. On-demand wireless magnetic operation using an actuator outside of the body was found to induce pressure modulation of up to 38 mmHg inside the femoral intramedullary cavity of the rat.

Axially-Anisotropic Hierarchical Grating 2D Guided-Mode Resonance Strain-Sensor.

Guided-mode resonance strain sensors are planar binary gratings that have fixed resonance positions and quality factors decided by material properties and grating parameters. If one is restricted by material choices, the quality factor can only be improved by adjusting the grating parameters. We report a new method to improve quality factor by applying a slotting design rule to a grating design. We investigate this design rule by first providing a theoretical analysis on how it works and then applying it to a previously studied 2D solid-disc guided-mode resonance grating strain sensor design to create a new slotted-disc guided-mode resonance grating design. We then use finite element analysis to obtain reflection spectrum results that show the new design produces resonances with at least a 6-fold increase in quality factor over the original design and more axially-symmetric sensitivities. Lastly, we discuss the applicability of the slotting design rule to binary gratings in general as a means of improving grating performance while retaining both material and resonance position choices.

Electromagnetic three dimensional liquid metal manipulation.

In this paper, we report three-dimensional (3-D) liquid metal manipulation using electromagnets, which can be applied to electrical switching applications. The liquid metal droplet was coated with iron (Fe) particles by chemical reaction with hydrochloric acid (HCl), and thus it became responsive to the magnetic field, becoming a magnetic liquid metal marble. Using electromagnets, the magnetic field was turned on and off on-demand. We investigated an average velocity and the maximum working distance of the horizontal and vertical electromagnetic field-driven manipulation of the magnetic liquid metal marble. Linear (1-D) and plane (2-D) manipulation of the marble was successfully demonstrated and 3-D manipulation was verified for electrical switching.

On-demand magnetic manipulation of liquid metal in microfluidic channels for electrical switching applications.

We report magnetic-field-driven on-demand manipulation of liquid metal in microfluidic channels filled with base or acid. The liquid metal was coated with iron (Fe) particles and treated with hydrochloric acid to have strong bonding strength with the Fe particles. The magnetic liquid metal slug inserted in the microchannel is manipulated, merged, and separated. In addition, corresponding to the repositioning of an external magnet, the liquid metal slug can be readily moved in microfluidic channels with different angles (>90°) and cross-linked channels in any direction. We demonstrated the functionality of the liquid metal in the microfluidic channel for electrical switching applications by manipulation of the liquid metal, resulting in the sequential turning on of light emitting diodes (LEDs).

Woven-Yarn Thermoelectric Textiles.

The fabrication and characterization of highly flexible textiles are reported. These textiles can harvest thermal energy from temperature gradients in the desirable through-thickness direction. The tiger yarns containing n- and p-type segments are woven to provide textiles containing n-p junctions. A high power output of up to 8.6 W m(-2) is obtained for a temperature difference of 200 °C.

Electrochemical aptasensor of cardiac troponin I for the early diagnosis of acute myocardial infarction.

Cardiac troponin I (cTnI) is well-known as a promising biomarker for the early diagnosis of acute myocardial infarction (AMI). In this work, single-stranded DNA aptamers against cTnI were identified by the Systematic Evolution of Ligands by Exponential enrichment (SELEX) method. The aptamer candidates exhibited a high selectivity and sensitivity toward both cTnI and the cardiac Troponin complex. The binding affinities of each aptamer were evaluated based on their dissociation constants (Kd) by surface plasma resonance. The Tro4 aptamer that had the highest binding capacity to cTnI showed a very low Kd value (270 pM) compared with that of a cTnI antibody (20.8 nM). Furthermore, we designed a new electrochemical aptasensor based on square wave voltammetry using ferrocene-modified silica nanoparticles. The developed aptasensor demonstrated an excellent analytical performance for cTnI with a wide linear range of 1-10 000 pM in a buffer and a detection limit of 1.0 pM (24 pg/mL; S/N = 3), which was noticeably lower than the cutoff values (70-400 pg/mL). The specificity of the aptamers was also examined using nontarget proteins, demonstrating that the proposed sensor responded to only cTnI. In addition, cTnI was successfully detected in a human serum albumin solution. On the basis of the calibration curve that was constructed, the concentrations of cTnI in a solution supplemented with human serum were effectively measured. The calculated values correlated well with the actual concentrations of cTnI. It is anticipated that the highly sensitive and selective aptasensor for cTnI could be readily applicable for the accurate diagnosis of AMI.

PDMS based coplanar microfluidic channels for the surface reduction of oxidized Galinstan.

Galinstan has the potential to replace mercury - one of the most popular liquid metals. However, the easy oxidation of Galinstan restricts wide applicability of the material. In this paper, we report an effective reduction method for the oxidized Galinstan using gas permeable PDMS (polydimethlysiloxane)-based microfluidic channel. The complete study is divided into two parts - reduction of Galinstan oxide and behavior of reduced Galinstan oxide in a microfluidic channel. The reduction of Galinstan oxide is discussed on the basis of static as well as dynamic angles. The contact angle analyses help to find the extent of reduction by wetting characteristics of the oxide, to optimize PDMS thickness and to select suitable hydrochloric acid (HCl) concentration. The highest advancing angle of 155° and receding angle of 136° is achieved with 200 µm thick PDMS film and 37 wt% (weight percent) HCl solution. The behavior of reduced Galinstan oxide is analyzed in PDMS-based coplanar microfluidic channels fabricated using a simple micromolding technique. Galinstan in the microfluidic channel is surrounded by another coplanar channel filled with HCl solution. Due to the excellent permeability of PDMS, HCl permeates through the PDMS wall between the two channels (interchannel PDMS wall) and achieves a continuous chemical reaction with oxidized Galinstan. A Lab VIEW controlled syringe pump is used for observing the behavior of HCl treated Galinstan in the microfluidic channel. Further optimization of the microfluidic device has been conducted to minimize the reoxidation of reduced Galinstan oxide in the microfluidic channel.

Fabrication of a microneedle/CNT hierarchical micro/nano surface electrochemical sensor and its in-vitro glucose sensing characterization.

We report fabrication of a microneedle-based three-electrode integrated electrochemical sensor and in-vitro characterization of this sensor for glucose sensing applications. A piece of silicon was sequentially dry and wet etched to form a 15 × 15 array of tall (approximately 380 µm) sharp silicon microneedles. Iron catalyst was deposited through a SU-8 shadow mask to form the working electrode and counter electrode. A multi-walled carbon nanotube forest was grown directly on the silicon microneedle array and platinum nano-particles were electrodeposited. Silver was deposited on the Si microneedle array through another shadow mask and chlorinated to form a Ag/AgCl reference electrode. The 3-electrode electrochemical sensor was tested for various glucose concentrations in the range of 3~20 mM in 0.01 M phosphate buffered saline (PBS) solution. The sensor's amperometric response to the glucose concentration is linear and its sensitivity was found to be 17.73 ± 3 µA/mM-cm2. This microneedle-based sensor has a potential to be used for painless diabetes testing applications.

Recovery of nonwetting characteristics by surface modification of gallium-based liquid metal droplets using hydrochloric acid vapor.

The applicability of gallium-based liquid metal alloy has been limited by the oxidation problem. In this paper, we report a simple method to remove the oxide layer on the surface of such alloy to recover its nonwetting characteristics, using hydrochloric acid (HCl) vapor. Through the HCl vapor treatment, we successfully restored the nonwetting characteristics of the alloy and suppressed its viscoelasticity. We analyzed the change of surface chemistry before and after the HCl vapor treatment using X-ray photoelectron spectroscopy (XPS) and low-energy ion-scattering spectroscopy (LEIS). Results showed that the oxidized surface of the commercial gallium-based alloy Galinstan (Ga(2)O(3) and Ga(2)O) was replaced with InCl(3) and GaCl(3) after the treatment. Surface tension and static contact angle on a Teflon-coated glass of the HCl-vapor-treated Galinstan were measured to be 523.8 mN/m and 152.5°. A droplet bouncing test was successfully carried out to demonstrate the nonwetting characteristics of the HCl-vapor-treated Galinstan. Finally, the stability of the transformed surface of the HCl-vapor-treated Galinstan was investigated by measuring the contact angle and LEIS spectra after reoxidation in an ambient environment.

Biofriendly bonding processes for nanoporous implantable SU-8 microcapsules for encapsulated cell therapy.

Mechanically robust, cell encapsulating microdevices fabricated using photolithographic methods can lead to more efficient immunoisolation in comparison to cell encapsulating hydrogels. There is a need to develop adhesive bonding methods which can seal such microdevices under physiologically friendly conditions. We report the bonding of SU-8 based substrates through (i) magnetic self assembly, (ii) using medical grade photocured adhesive and (iii) moisture and photochemical cured polymerization. Magnetic self-assembly, carried out in biofriendly aqueous buffers, provides weak bonding not suitable for long term applications. Moisture cured bonding of covalently modified SU-8 substrates, based on silanol condensation, resulted in weak and inconsistent bonding. Photocured bonding using a medical grade adhesive and of acrylate modified substrates provided stable bonding. Of the methods evaluated, photocured adhesion provided the strongest and most stable adhesion.

A SU-8-based compact implantable wireless pressure sensor for intraocular pressure sensing application.

Telemetric sensing has received a great deal of attention in noncontact human disease detection. To take advantage of this method, this paper presents a SU-8-based compact (1.52 mm × 3.23 mm × 0.2 mm) passive wireless pressure sensor, especially designed to measure the intraocular pressure. The sensor was microfabricated using biocompatible materials such as gold and SU-8 [1] to form the LC parallel circuit and the pressure sensitive diaphragm. The surface of the sensor is fully covered by SU-8, which isolates the working circuit from the biological tissue medium. The pressure signal can be detected by an external readout coil with up to 6 mm distance from the implanted sensor. The pressure sensitivity of the sensor was characterized in both air and saline environment. The microfabricated sensor has high sensitivity (>7,000 ppm/mmHg).

Pressure-tunable guided-mode resonance sensor for single-wavelength characterization.

A method of tuning a one-dimensional guided-mode resonance grating through the use of an air-pressure-responsive membrane is demonstrated here using finite-element method simulation. The device consists of a titanium dioxide (TiO(2)) grating structure embedded in a flexible polydimethylsiloxane membrane. This grating has a resonant response to TM-polarized light at a wavelength dependent upon the refractive index of the surrounding medium. By varying the pressure by 5500 Pa, lateral strain may be applied to the grating; this allows resonances to be produced for medium refractive indices ranging from 1.33 to 1.50 for a fixed-wavelength 850 nm light source.

Thermo-optically tunable silicon photonic crystal light modulator.

We designed, fabricated, and characterized a thermo-optically tunable compact (10 µm × 10 µm) silicon photonic crystal (PhC) light modulator that operates at around 1.55 µm for TE polarization. The operational principle of the device is the modulation of the cutoff frequency in a silicon-based line defect PhC. The cutoff frequency is shifted because of the thermo-optic tuning of the silicon refractive index, which is realized by localized heating on the PhC. The modulator is formed by a triangular lattice array of cylindrical air holes on a silicon-on-insulator wafer. Optical characterization was carried out, and the result clearly showed thermo-optic tuning of the cutoff frequency at around 1.55 µm.

Machine vision for digital microfluidics.

Machine vision is widely used in an industrial environment today. It can perform various tasks, such as inspecting and controlling production processes, that may require humanlike intelligence. The importance of imaging technology for biological research or medical diagnosis is greater than ever. For example, fluorescent reporter imaging enables scientists to study the dynamics of gene networks with high spatial and temporal resolution. Such high-throughput imaging is increasingly demanding the use of machine vision for real-time analysis and control. Digital microfluidics is a relatively new technology with expectations of becoming a true lab-on-a-chip platform. Utilizing digital microfluidics, only small amounts of biological samples are required and the experimental procedures can be automatically controlled. There is a strong need for the development of a digital microfluidics system integrated with machine vision for innovative biological research today. In this paper, we show how machine vision can be applied to digital microfluidics by demonstrating two applications: machine vision-based measurement of the kinetics of biomolecular interactions and machine vision-based droplet motion control. It is expected that digital microfluidics-based machine vision system will add intelligence and automation to high-throughput biological imaging in the future.