1.
Appl Opt
; 45(17): 3935-9, 2006 Jun 10.
Artigo
em Inglês
| MEDLINE
| ID: mdl-16761030
RESUMO
The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees , we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.