Elastoplastic contact model of pitch-based rough surface and its polishing characteristics.

Fused silica glass is widely used in optical systems, including astronomical telescopes, laser systems, optical communications, and the semiconductor industry. At the same time, the surface quality of the fused silica directly determines the performance and precision of the system. In order to analyze the microscopic surface interaction based on the basis of tribology, a roughness contact model of pitch and fused silica glass surfaces was established. Analyze the performance parameters of contact materials, surface roughness, and the relationship between load and contact area. Pitch materials with a higher plasticity index have a larger elastoplastic contact area with the fused silica surface during the polishing process. The experimental results demonstrate that the surface quality of the polished fused silica improves as the plasticity index of the pitch material increases. At the same time, judging from the PSD curve results, the polished surface of the No. 55 pitch on the spatial-frequency band curve (100-101/mm) is significantly lower than the other two brands of pitch. Additionally, the Ra value of the workpiece surface roughness reaches 0.091 nm. The results of this study provide important theoretical guidance for achieving full-diameter, full-frequency ultra-smooth polishing of large-diameter complex curved surfaces.

Method for testing freeform surfaces based on a Shack-Hartmann sensor with plane wavefront scanning and stitching.

Currently, the surface error measurement technology for freeform faces a significant contradiction between measurement accuracy and dynamic range. The study proposes a non-null testing method for measuring freeform surfaces by utilizing a Shack-Hartmann wavefront sensor to emit a small aperture parallel beam and scan along the normal direction at the center of subapertures for stitching (SHPSS). A mathematical model based on ray tracing and the reflection theorem is established to calculate the sampling points on an ideal freeform surface, the reference spot array on CCD, and the corresponding relationship between microlens array and spots. An algorithm is proposed to iteratively calculate the wavefront aberration and gradually approach the actual sampling points using the established model. Theoretical analysis and numerical simulation results indicate that SHPSS can increase the dynamic range and improve the accuracy of wavefront reconstruction. The error analysis of the SHPSS method is carried out, the measurement accuracy of full aperture freeform surface is 11.45 nm. A testing system is set up and experiments are conducted on a 100 mm aperture freeform reflective mirror. The RMS of the SHPSS test results is less than λ/30 (λ=635 nm) compared to the interferometric test results. By analyzing five groups of repeated measurement experiments, the repeatability accuracy of SHPSS method is less than 1/80 λ (RMS). This demonstrates the feasibility and measurement capabilities of the method for freeform surface testing.