Spatially varying aberration calibration using a pair of matched periodic pinhole array masks.

For advanced imaging systems, e.g., projection systems for optical lithography, spatially varying aberration calibration is of utmost importance to achieve uniform imaging performance over the entire field-of-view (FOV). Here we present an efficient, accurate, and robust spatially varying aberration calibration method using a pair of 2-dimensional periodic pinhole array masks: the first mask in the object plane and the second mask in the image plane. Our method divides the entire FOV of the imaging system into partially overlapping subregions by using a measurement system consisting of an additional imaging system and a camera sensor. Each subregion, which covers several mask periods, is imaged onto a distinct camera pixel by the measurement system. Our method measures "Airy disc"-like patterns simultaneously in all subregions by scanning the second mask relative to the first mask over one mask period. The number of subregions is equal to the number of camera pixels, and the sampling number of the measured patterns is equal to the scanning step number. The aberrations can be retrieved from the patterns measured in through-focus planes using an iterative optimization algorithm. In this paper, we performed experimental validation on a realistic lithography machine and demonstrate that our method is capable of retrieving the coefficients of 37 aberration terms, expressed as Zernike polynomials, with a sensitivity at nanometer scale.

Plenoptic wavefront sensor with scattering pupil.

We consider a wavefront sensor combining scattering pupil with a plenoptic imager. Such a sensor utilizes the same reconstruction principle as the Hartmann-Shack sensor, however it is free from the ambiguity of the spot location caused by the periodic structure of the sensor matrix, and allows for wider range of measured aberrations. In our study, sensor with scattering pupil has demonstrated a good match between the introduced and reconstructed aberrations, both in the simulation and experiment. The concept is expected to be applicable to optical metrology of strongly distorted wavefronts, especially for measurements through dirty, distorted, or scattering windows and pupils, such as cataract eyes.

Speckle imaging through turbulent atmosphere based on adaptable pupil segmentation.

We report on the first results to our knowledge obtained with adaptable multiaperture imaging through turbulence on a horizontal atmospheric path. We show that the resolution can be improved by adaptively matching the size of the subaperture to the characteristic size of the turbulence. Further improvement is achieved by the deconvolution of a number of subimages registered simultaneously through multiple subapertures. Different implementations of multiaperture geometry, including pupil multiplication, pupil image sampling, and a plenoptic telescope, are considered. Resolution improvement has been demonstrated on a ∼550 m horizontal turbulent path, using a combination of aperture sampling, speckle image processing, and, optionally, frame selection.

Correction of low order aberrations using continuous deformable mirrors.

By analyzing the Poisson equation describing the static behavior of membrane and bimorph deformable mirrors and biharmonic equation describing the continuous facesheet mirror with push-pull actuators, we found that to achieve a high quality correction of low-order aberrations these mirrors should have sufficient number of actuators positioned outside the correction aperture. In particular, any deformable mirror described by the Poisson equation requires at least two actuators to be placed outside the working aperture per period of the azimuthal aberration of the highest expected order. Any deformable mirror described by the biharmonic equation, such as a continuous facesheet mirror with push-pull actuators, requires at least four actuators to be placed outside the working aperture per period of the azimuthal aberration of the highest expected order, and these actuators should not be positioned on a single circle.

Liquid crystal wavefront corrector with modal response based on spreading of the electric field in a dielectric material.

A novel liquid crystal (LC) wavefront corrector with smooth modal influence functions is proposed and realized. The device consists of a thin layer of planar aligned nematic LC sandwiched between a glass plate with a conductive electrode and a plate made of ceramic material with a very high dielectric constant. Control electrodes are positioned on the back side of the ceramic plate, opposite to the LC. The modal character of the response is determined by spreading of the electric field in the ceramic plate. The device implemented is operating in a reflective (mirror) mode; however, similar principles can be used to build a transmissive device. Low cost and simplicity of control make it a good alternative to continuous face-sheet deformable mirrors.

Planar double-grating microspectrometer.

We report on a miniature spectrometer with a volume of 0.135 cm(3) and dimensions of 3x3x11 mm, mounted directly on the surface of a CCD sensor. The spectrometer is formed by two flat diffraction gratings that are designed to perform both the dispersion and imaging functions, eliminating the need for any spherical optics. Two separate parts of the device were fabricated with the single-mask 1 mum lithography on a single glass wafer. The wafer was diced and the device was assembled and directly mounted onto a CCD sensor. The resolution of 3 nm, spectral range of 450 to 750 nm and the optical throughput of ~9% were measured to be in a complete agreement with the model used for the development of the device.

Liquid-crystal intraocular adaptive lens with wireless control.

We present a prototype of an adaptive intraocular lens based on a modal liquid-crystal spatial phase modulator with wireless control. The modal corrector consists of a nematic liquid-crystal layer sandwiched between two glass substrates with transparent low- and high-ohmic electrodes, respectively. Adaptive correction of ocular aberrations is achieved by changing the amplitude and the frequency of the applied control voltage. The convex-shaped glass substrates provide the required initial focusing power of the lens. A loop antenna mounded on the rim of the lens delivers an amplitude-modulated radio-frequency control signal to the integrated rectifier circuit that drives the liquid-crystal modal corrector. In vitro measurements of a 5-mm clear aperture prototype with an initial focusing power of +12.5 diopter, remotely driven by a radio-frequency control unit at ~6 MHz, were carried out using a Shack-Hartmann wavefront sensor. The lens based on a 40-mum thick liquid-crystal layer allows for an adjustable defocus of 4 waves, i. e. an accommodation of ~2.51 dioptres at a wavelength of 534 nm, and correction of spherical aberration coefficient ranging from -0.8 to 0.67 waves. Frequency-switching technique was employed to increase the response speed and eliminate transient overshoots in aberration coefficients. The full-scale settling time of the adaptive modal corrector was measured to be ~4 s.

Operation modes of a liquid-crystal modal wave-front corrector.

Liquid-crystal modal wave-front correctors provide much better wave-front correction than do piston correctors with the same number of actuators; moreover, use of additional degrees of freedom of the driving ac voltage signals may further improve device performance. Some practical aspects of the operation of liquid-crystal modal wave-front correctors are discussed. Special attention is paid to the interference of various contact responses and to the formation of required phase shapes through wider control of signal frequencies and electric phase shifts. The study is based on an analytic approach and numerical investigation; major theoretical conclusions are verified experimentally.

On the possibility of intraocular adaptive optics.

We consider the technical possibility of an adaptive contact lens and an adaptive eye lens implant based on the modal liquid crystal wavefront corrector, aimed to correct the accommodation loss and higher-order aberrations of the human eye. Our first demonstrator with 5 mm optical aperture is capable of changing the focusing power in the range of 0 to +3 diopters and can be controlled via a wireless capacitive link. These properties make the corrector potentially suitable for implantation into the human eye or for use as an adaptive contact lens. We also discuss possible feedback strategies, aimed to improve visual acuity and to achieve supernormal vision with implantable adaptive optics.

Deformable mirror with thermal actuators.

Low-cost adaptive optics is applied in lasers, scientific instrumentation, ultrafast sciences, and ophthalmology. These applications demand that the deformable mirrors used be simple, inexpensive, reliable, and efficient. We report a novel type of ultralow-cost deformable mirror with thermal actuators. The device has a response time of ~5 s , an actuator stroke of ~6mum , and temporal stability of ~lambda/10 rms in the visible range and can be used for correction of rather large aberrations with slow-changing amplitude.