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1.
Nat Commun ; 15(1): 4651, 2024 May 31.
Artigo em Inglês | MEDLINE | ID: mdl-38821998

RESUMO

Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 µg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.

2.
Micromachines (Basel) ; 14(4)2023 Apr 02.
Artigo em Inglês | MEDLINE | ID: mdl-37421044

RESUMO

Currently, coaxial electrohydrodynamic jet (CE-Jet) printing is used as a promising technique for the alternative fabrication of drop-on-demand micro- and nanoscale structures without using a template. Therefore, this paper presents numerical simulation of the DoD CE-Jet process based on a phase field model. Titanium lead zirconate (PZT) and silicone oil were used to verify the numerical simulation and the experiments. The optimized working parameters (i.e., inner liquid flow velocity 150 m/s, pulse voltage 8.0 kV, external fluid velocity 250 m/s, print height 16 cm) were used to control the stability of the CE-Jet, avoiding the bulging effect during experimental study. Consequently, different sized microdroplets with a minimum diameter of ~5.5 µm were directly printed after the removal of the outer solution. The model is considered the easiest to implement and is powerful for the application of flexible printed electronics in advanced manufacturing technology.

3.
Microsyst Nanoeng ; 9: 80, 2023.
Artigo em Inglês | MEDLINE | ID: mdl-37323543

RESUMO

Polymer nanowire (NW) organic field-effect transistors (OFETs) integrated on highly aligned large-area flexible substrates are candidate structures for the development of high-performance flexible electronics. This work presents a universal technique, coaxial focused electrohydrodynamic jet (CFEJ) printing technology, to fabricate highly aligned 90-nm-diameter polymer arrays. This method allows for the preparation of uniformly shaped and precisely positioned nanowires directly on flexible substrates without transfer, thus ensuring their electrical properties. Using indacenodithiophene-co-benzothiadiazole (IDT-BT) and poly(9,9-dioctylfluorene-co-benzothiadiazole) (F8-BT) as example materials, 5 cm2 arrays were prepared with only minute size variations, which is extremely difficult to do using previously reported methods. According to 2D-GIXRD analysis, the molecules inside the nanowires mainly adopted face-on π-stacking crystallite arrangements. This is quite different from the mixed arrangement of thin films. Nanowire-based OFETs exhibited a high average hole mobility of 1.1 cm2 V-1 s-1 and good device uniformity, indicating the applicability of CFEJ printing as a potential batch manufacturing and integration process for high-performance, scalable polymer nanowire-based OFET circuits. This technique can be used to fabricate various polymer arrays, enabling the use of organic polymer semiconductors in large-area, high-performance electronic devices and providing a new path for the fabrication of flexible displays and wearable electronics in the future.

4.
Nanoscale ; 15(4): 1880-1889, 2023 Jan 27.
Artigo em Inglês | MEDLINE | ID: mdl-36606492

RESUMO

Patterning of semiconductor polymers is pertinent to preparing and applying organic field-effect transistors (OFETs). In this study, coaxial focused electrohydrodynamic jet printing (high resolution, high speed, and convenient) was used to pattern polymer semiconductors. The influence of the key printing parameters on the width of polymer sub-microwires was evaluated. The width decreased with increasing applied voltage, printing speed, and concentration of the polymer ink. However, the width increased gradually with increasing polymer ink flow rate. A regression analysis model of the relationship between the printing parameters and width was established. Based on a regression analysis/genetic algorithm, the optimal printing parameters were obtained and the correctness of the printing parameters was verified. The optimized printing parameters stabilized the width of the arrays to ca. 110 nm and imparted a smooth morphology. Additionally, the corresponding OFETs exhibited a high mobility of 2 cm2 V-1 s-1, which is 5× higher than that of thin-film-based OFETs. One can conveniently obtain high-performance OFETs from ordered sub-microwire arrays fabricated by CFEJ printing.

5.
Nat Commun ; 13(1): 6214, 2022 Oct 20.
Artigo em Inglês | MEDLINE | ID: mdl-36266282

RESUMO

Large area and highly aligned polymer semiconductor sub-microwires were fabricated using the coaxial focused electrohydrodynamic jet printing technology. As indicated by the results, the sub-microwire arrays have smooth morphology, well reproducibility and controllable with a width of ~110 nm. Analysis shows that the molecular chains inside the sub-microwires mainly exhibited edge-on arrangement and the π-stacking direction (010) of the majority of crystals is parallel to the long axis of the sub-microwires. Sub-microwires based organic field effect transistors showed high mobility with an average of 1.9 cm2 V-1 s-1, approximately 5 times higher than that of thin film based organic field effect transistors. In addition, the number of sub-microwires can be conveniently controlled by the printing technique, which can subsequently concisely control the performance of organic field effect transistors. This work demonstrates that sub-microwires fabricated by the coaxial focused electrohydrodynamic jet printing technology create an alternative path for the applications of high-performance organic flexible device.

6.
Micromachines (Basel) ; 13(10)2022 Oct 12.
Artigo em Inglês | MEDLINE | ID: mdl-36296080

RESUMO

Electrohydrodynamic jet (e-jet) printing is a modern and decent fabrication method widely used to print high-resolution versatile microstructures with features down to 10 µm. It is currently difficult to break nanoscale resolution (<100 nm) due to limitations of fluid properties, voltage variations, and needle shapes. This paper presents developments in drop-on-demand e-jet printing based on a phase-field method using a novel combined needle and straight electrode to print on a flexible PET substrate. Initially, the simulation was performed to form a stable cone jet by coupling an innovative straight electrode parallel to a combined needle that directs the generation of droplets at optimized parameters, such as f = 8.6 × 10−10 m3s−1, Vn = 9.0 kV, and Vs = 4.5 kV. Subsequently, printing experiments were performed using optimized processing parameters and all similar simulation conditions. Microdroplets smaller than 13 µm were directly printed on PET substrate. The model is considered unique and powerful for printing versatile microstructures on polymeric substrates. The presented method is useful for MEMS technology to fabricate various devices, such as accelerometers, smartphones, gyroscopes, sensors, and actuators.

7.
Polymers (Basel) ; 14(13)2022 Jun 30.
Artigo em Inglês | MEDLINE | ID: mdl-35808727

RESUMO

The fabrication of various micro-patterns on polymer insulating substrates is a current requirement in micro-electromechanical system (MEMS) and packaging sectors. In this paper, we use electrohydrodynamic jet (E-Jet) printing to create multifaceted and stable micro-patterns on a polyethylene terephthalate (PET) substrate. Initially, simulation was performed to investigate optimized printing settings in phase field physics for the usage of two distinct functional inks. A series of simulation experiments was conducted, and it was determined that the following parameters are optimised: applied pressure of 40 kPa, high pulse voltage of 1.95 kV, low dc voltage of 1.60 kV, duty cycle of 80%, pulse frequency of 60 Hz, printing height of 0.25 mm, and printing speed of 1 mm/s. Then, experiments showed that adjusting a pressure value of 40 kPa and regulating the SEMICOSIL988/1 K ink to print micro-drops on a polymer substrate with a thickness of 1 mm prevents coffee staining. The smallest measured droplet size was 200 µm. Furthermore, underfill (UF 3808) ink was driven with applied pressure to 50 kPa while other parameters were left constant, and the minimum size of linear patterns was printed to 105 µm on 0.5-mm-thick PET substrate. During the micro-drip and cone-jet regimes, the consistency and diameter of printed micro-structures were accurately regulated at a pulse frequency of 60 Hz and a duty cycle of 80%.

8.
Sci Rep ; 12(1): 1924, 2022 Feb 04.
Artigo em Inglês | MEDLINE | ID: mdl-35121778

RESUMO

Coaxial electrohydrodynamic jet (CE-Jet) printing is an encouraging method for fabrication of high-resolution micro and nanostructures in MEMS systems. This paper presents a novel simulation work based on phase field method which is considered as a precise technique in fluid dynamics. The study explores influence of various parameters such as applied voltage, needle-substrate distance, dynamic viscosity, relative permittivity, needle size and flow rate on stability and resolution of CE-Jet morphologies. The morphology of CE-Jet exhibits that width of cone-jet profile and printed structures on substrate were directly proportional to relative permittivity and flow rate. In addition, it was inversely proportional to dynamic viscosity and applied voltage. The study examine that CE-Jet length of inner liquid is inversely proportional to needle-substrate distance in same time. It was later verified in experimental study by producing stable CE-Jet morphology with 300 µm diameter using optimized parameters (i.e., DC voltage 7.0 kV and inner liquid flow rate 400 nl/min) as compared to other validation studies such as 400 µm and 500 µm. The CE-Jet printing technique investigates significant changes in consistency and stability of CE-Jet morphologies and makes Jet unique and comparable when adjustment accuracy reaches 0.01 mm. PZT sol line structures with a diameter of 1 µm were printed directly on substrate using inner needle (diameter of 120 µm). Therefore, it is considered as a powerful tool for nano constructs production in M/NEMS devices.

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