A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide.

The development of "portable, low cost and low consumption" gas microsensors is one of the strong needs for embedded portable devices in many fields such as public domain. In this paper, a new approach is presented on making, on the same chip, a network of head-to-tail facing PN junctions in order to miniaturize the sensor network and considerably reduce the required power for heating each cell independently. This paper is about recognizing a device that integrates both sensing and self-heating. This first study aims to evaluate the possibilities of this type of diode network for use as a gas sensor. The first part concerns the description of the technological process that is based on a doped polysilicon wafer in which a thin layer of metal oxide (a gallium-doped zinc oxide in our case) is deposited by RF sputtering. An electrical model will be proposed to explain the operation and advantage of this approach. We will show the two types of tests that have been carried out (static and dynamic) as well as the first encouraging results of these electrical characterizations under variable atmospheres.

Organometallic Synthesis of CuO Nanoparticles: Application in Low-Temperature CO Detection.

A metal-organic approach has been employed for the preparation of anisotropic CuO nanoparticles. These nanostructures have been characterized by transmission and high resolution transmission electron microscopy, field-emission scanning electron microscopy, X-ray powder diffraction, Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The CuO nanoparticles have been deposited as gas-sensitive layers on miniaturized silicon devices. At an operating temperature of 210 °C, the sensors present an optimum response toward carbon monoxide correlated with a fast response (Rn) and short recovery time. A high sensitivity to CO (Rn≈150 %, 100 ppm CO, RH 50 %) is achieved. These CuO nanoparticles serve as a very promising sensing layer for the fabrication of selective CO gas sensors working at a low temperature.

Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing.

P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH3), acetaldehyde (C2H4O), and nitrogen dioxide (NO2) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde.

Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection.

The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique to obtain repeatable sensing layers on top of interdigitated electrodes. The variation of the resistance of this n-type Ga-doped ZnO has been measured under sub-ppm traces (500 ppb) of acetaldehyde (C2H4O). Thanks to the microheater designed into a thin membrane, the generation of very rapid temperature variations (from room temperature to 550 °C in 25 ms) is possible, and a rapid cycled pulsed-temperature operating mode can be applied to the sensor. This approach reveals a strong improvement of sensing performances with a huge sensitivity between 10 and 1000, depending on the working pulsed-temperature level.

SnO2 "Russian Doll" Octahedra Prepared by Metalorganic Synthesis: A New Structure for Sub-ppm CO Detection.

Micrometer-sized hierarchical Sn3 O2 (OH)2 octahedra, which are self-assembled one inside the other, resembling "Russian doll" organization, have been obtained by a metalorganic approach. This synthesis is based on the controlled hydrolysis of [Sn(NMe2 )2 ]2 in the presence of an alkylamine ligand in an organic solvent (THF). The water content of the medium proved to be a key parameter for the formation of these multi-walled octahedra. The resultant structures have been used as gas-sensitive layers on micromachined silicon devices. During in situ heating, Sn3 O2 (OH)2 is oxidized to SnO2 while retaining the initial morphology. The sensors present outstanding dynamic responses at very low CO concentrations (7 % and 67 % resistance variation to 0.25 and 20 ppm CO, respectively, at an operating temperature of 500 °C). This superior gas-sensing performance is closely related to the unique microstructure of the SnO2 multi-walled octahedra.

A computational chemist approach to gas sensors: modeling the response of SnO2 to CO, O2, and H2O gases.

A general bottom-up modeling strategy for gas sensor response to CO, O(2), H(2)O, and related mixtures exposure is demonstrated. In a first stage, we present first principles calculations that aimed at giving an unprecedented review of basic chemical mechanisms taking place at the sensor surface. Then, simulations of an operating gas sensor are performed via a mesoscopic model derived from calculated density functional theory data into a set of differential equations. Significant presence of catalytic oxidation reaction is highlighted.