Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon.

A novel fabrication method of Si photonic slabs based on the selective formation of porous silicon is reported. Free-standing square lattices of cylindrical air holes embedded in a Si matrix can be achieved by proton beam irradiation followed by electrochemical etching of Si wafers. The photonic band structures of these slabs show several gaps for the two symmetry directions for reflection through the z-plane. The flexibility of the fabrication method for tuning the frequency range of the gaps over the near- and mid-infrared ranges is demonstrated. This tunability can be achieved by simply adjusting the main parameters in the fabrication process such as the proton beam line spacing, proton fluence, or anodization current density. Thus, the reported method opens a promising route towards the fabrication of Si-based photonic slabs, with high flexibility and compatible with the current microelectronics industry.

Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method.

A method for fabrication of three-dimensional (3D) silicon nanostructures based on selective formation of porous silicon using ion beam irradiation of bulk p-type silicon followed by electrochemical etching is shown. It opens a route towards the fabrication of two-dimensional (2D) and 3D silicon-based photonic crystals with high flexibility and industrial compatibility. In this work, we present the fabrication of 2D photonic lattice and photonic slab structures and propose a process for the fabrication of 3D woodpile photonic crystals based on this approach. Simulated results of photonic band structures for the fabricated 2D photonic crystals show the presence of TE or TM gap in mid-infrared range.

Mass fabrication technique for polymeric replicas of arrays of insect corneas.

Motivated to develop a technique for producing many high-fidelity replicas for the sacrifice of a single biotemplate, we combined a modified version of the conformal-evaporated-film-by-rotation technique and electroforming to produce a master negative made of nickel from a composite biotemplate comprising several corneas of common blowflies. This master negative can function as either a mold for casting multiple replicas or a die for stamping multiple replicas. An approximately 250 nm thick nickel film was thermally deposited on an array of blowfly corneas to capture the surface features with high fidelity and then a roughly 60 microm thick structural layer of nickel was electroformed onto the thin layer to give it the structural integrity needed for casting or stamping. The master negative concurrently captured the spatial features of the biotemplate at length scales ranging from 200 nm to a few millimeters. Polymer replicas produced thereafter by casting did faithfully reproduce features of a few micrometers and larger in dimension.