Perpendicular-flow, single-wafer atomic layer deposition reactor chamber design for use with in situ diagnostics.

A description is given of the design and performance of a diagnostic-accessible, perpendicular-flow, single-wafer deposition reactor for use with 50 mm wafers. The reactor chamber design is based on a simple flow tube, with diagnostic access achieved by replacing sections of the reactor chamber wall with recessed diagnostic ports. Reactor chamber performance is evaluated for the purpose of performing optical measurements during atomic layer deposition (ALD). Computational fluid dynamics simulations predict that the when used with windows the diagnostic port design produces minimal perturbations to the gas flow under typical deposition conditions, as compared to a design without diagnostic ports. Temperature measurements of the inside surface of a window installed in a diagnostic port suggest that for reactor chamber operation at 110 °C, under typical deposition conditions, the inside surface window temperature is approximately equal to or greater than the surrounding reactor chamber temperature, thereby minimizing possible species condensation on the window surface. As a consequence of using recessed diagnostic ports, an increase in the amplitude of optical intensity fluctuations was generally observed when performing measurements at elevated chamber temperatures. These intensity fluctuations could be readily reduced by enclosing the optical path to the exterior side of the windows. The performance of two straight-forward methods to reduce these intensity fluctuations is presented. The results outlined above demonstrate that this reactor design can be operated with short gas residence times and with all reactor surfaces at elevated temperatures, making it useful for simulating a wide range of gas flow conditions with relevance to microelectronics-related ALD processes.

New determination of the astrophysical S factor SE1 of the 12C(alpha,gamma)16O reaction.

A new measurement of the beta-delayed alpha decay of 16N has been performed using a set of high efficiency ionization chambers. Sources were made by implantation of a 16N beam, yielding very clean alpha spectra down to energies as low as 400 keV. Our data are in good agreement with earlier results. For the S factor S(E1), we obtain a value of 74 +/- 21 keV b. In spite of improvements in the measurement, the error in S(E1) remains relatively large because of the correlations among the fit parameters and the uncertainties inherent to the extrapolation.

K isomers in 254No: probing single-particle energies and pairing strengths in the heaviest nuclei.

We have identified two isomers in 254No, built on two- and four-quasiparticle excitations, with quantum numbers K pi = 8- and (14+), as well as a low-energy 2-quasiparticle Kpi = 3+ state. The occurrence of isomers establishes that K is a good quantum number and therefore that the nucleus has an axial prolate shape. The 2-quasiparticle states probe the energies of the proton levels that govern the stability of superheavy nuclei, test 2-quasiparticle energies from theory, and thereby check their predictions of magic gaps.

Breakdown of K selection in 178Hf.

Coulomb activation of the four quasiparticle Kpi=16+ 178Hf isomer (t1/2=31 y) has led to the measurement of a set of Elamda matrix elements coupling the isomer band to the ground band. The present data combined with earlier 178 Hf Coulomb excitation data have probed the components in the wave functions and revealed the onset and saturation of K mixing in low-K bands, whereas the mixing is negligible in the high-K bands. The implications can be applied to other quadrupole-deformed nuclei.

Evidence for nontermination of rotational bands in 74Kr.

Three rotational bands in 74Kr were studied up to (in one case one transition short of) the maximum spin I(max) of their respective single-particle configurations. Their lifetimes have been determined using the Doppler-shift attenuation method. The deduced transition quadrupole moments reveal a modest decrease, but far from a complete loss of collectivity at the maximum spin I(max). This feature, together with the results of mean field calculations, indicates that the observed bands do not terminate at I = I(max).

Neutron spectroscopic factors in 9Li from 2H(8Li,p)9Li.

We have studied the 2H(8Li,p)9Li reaction to obtain information on the spins, parities, and single-neutron spectroscopic factors for states in 9Li, using a radioactive 8Li beam. The deduced properties of the lowest three states are compared to the predictions of a number of calculations for the structure of 9Li. The results of ab initio quantum Monte Carlo calculations are in good agreement with the observed properties.

Reevaluation of the 22Na(p,gamma) reaction rate: implications for the detection of 22Na gamma rays from novae.

Understanding the processes which create and destroy 22Na is important for diagnosing classical nova outbursts. Conventional 22Na(p,gamma) studies are complicated by the need to employ radioactive targets. In contrast, we have formed the particle-unbound states of interest through the heavy-ion fusion reaction, 12C(12C,n)23Mg and used the Gammasphere array to investigate their radiative decay branches. Detailed spectroscopy was possible and the 22Na(p,gamma) reaction rate has been reevaluated. New hydrodynamical calculations incorporating the upper and lower limits on the new rate suggest a reduction in the yield of 22Na with respect to previous estimates, implying a reduction in the maximum detectability distance for 22Na gamma rays from novae.

Determination of the 8B neutrino spectrum.

We have measured the total energy of the alpha particles following the beta decay of 8B by implanting 8B into a planar silicon surface barrier detector. Calibration was performed using alpha particles following the beta decay of 20Na, similarly implanted. The alpha spectrum is used to infer the 8B neutrino spectrum which is an important input in the interpretation of experiments that detect energetic neutrinos from the Sun. The alpha spectrum reported here is in disagreement with the previous best measurement which used two detectors in coincidence.

Search for x-ray induced acceleration of the decay of the 31-yr isomer of (178)Hf using synchrotron radiation.

Enhanced decay of the 31-yr isomer of (178)Hf induced by x-ray irradiation has been reported previously. Here we describe an attempt to reproduce this result with an intense "white" x-ray beam from the Advanced Photon Source. No induced decay was observed. The upper limits for the energy-integrated cross sections for such a process, over the range of energies of 20--60 keV x rays, are less than 2 x 10(-27) cm(2) keV, below the previously reported values by more than 5 orders of magnitude; at 8 keV the limit is 5 x 10(-26) cm(2) keV.