Phononic crystals based on LiNbO3 realized using domain inversion by electron-beam irradiation.

We report in this paper about the realization of domain inversion in z-cut lithium niobate by electron beam irradiation in order to perform phononic crystals. The fabrication of these phononic crystals on z-cut LiNbO3, which is, in our case, a periodic repetition of voids and LiNbO3, was achieved by domain inversion followed by wet etching, taking advantage of the large difference in etching rate between z+ and z- faces. A pertinent choice of irradiation conditions such as accelerating voltage, beam current, and charge density was determined and optimized. Two-dimensional structures at the micrometer scale were then realized on z-cut LiNbO3. We demonstrate the achievement of hexagons with diameters between 2 microm and 18 microm, with a very important depth close to 30 microm, which depends on the etching time and the hole size. The obtained structures, which exhibit a filling fraction varying from 1% to 64%, were characterized before etching by polarizing microscope to visualize the inverted domains. After HF etching, scanning electron microscopy was used to observe the obtained phononic structures. Taking into account the obtained filling fraction values and the size of created hexagons, the frequency band gap of these structures is expected at a range of 200 to 350 MHz. As expected in this frequency range, we have proven experimentally the existence of the phononic band gap on z-cut LiNbO3 by combination of a realized phononic crystal with a surface acoustic wave (SAW) device.

Waveguiding inside the complete band gap of a phononic crystal slab.

The propagation of acoustic waves in a square-lattice phononic crystal slab consisting of a single layer of spherical steel beads in a solid epoxy matrix is studied experimentally. Waves are excited by an ultrasonic transducer and fully characterized on the slab surface by laser interferometry. A complete band gap is found to extend around 300 kHz, in good agreement with theoretical predictions. The transmission attenuation caused by absorption and band gap effects is obtained as a function of frequency and propagation distance. Well confined acoustic wave propagation inside a line-defect waveguide is further observed experimentally.