Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system.

Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by two-photon resonant four-wave mixing in Xe at 153 nm is demonstrated. The output of extreme ultraviolet radiation was at the microwatt level at 85 nm. For this demonstration, we developed an all-solid-state tunable 5-kHz Ti:sapphire laser system that produces 0.6-ns 0.7-GHz-bandwidth pulses at an average power of 32 W at the fundamental, 12 W at the second harmonic, and 6.3 W at the third harmonic.