RESUMO
We demonstrate the lateral monolithic integration of a tunable first-order surface-grating loaded vertical-cavity surface-emitting laser (VCSEL) and slow-light waveguide with fan-beam steering and amplifier function. Shallow Bragg-grating formed on the surface of a VCSEL section enables the selection of a single slow-light mode, which can be coupled into the integrated long waveguide and amplified through pumping the amplifier above threshold. We obtained over 3W amplified slow-light power with single-mode operation and over 4W amplified quasi-single-mode power under pulsed current injection. To the best of our knowledge, this is the highest output power for single-mode VCSELs. Solid-state beam steering of the device is also demonstrated with 9° fan-beam steering range and 200 resolution points.
RESUMO
We demonstrate an athermal and electrostatically-tunable 850 nm-band MEMS VCSEL for the first time. The thermal wavelength drift is compensated by the thermal actuation of a cantilever-suspended mirror with a bimorph effect. At the same time, the resonant wavelength can be continuously tuned by electro-static force as a voltage is applied in the cantilever structure. A continuous wavelength tuning of 10 nm is obtained with a low thermal wavelength drift, which is 10 times smaller than that of conventional VCSELs. Our athermal and tunable VCSELs enable us to reduce the channel spacing in course wavelength division multiplexing optical interconnects even under uncooled operations.
