1.
J Microsc
; 199 (Pt 1): 37-44, 2000 Jul.
Artigo
em Inglês
| MEDLINE
| ID: mdl-10886527
RESUMO
We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (&mgr;cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy &mgr;cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype &mgr;cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
2.