RESUMO
This paper presents a damascene process for the fabrication of titanium micro/nanostructures and nanowires with adjustable thickness down to 2 nm. Their depth is precisely controlled by chemical-mechanical planarization together with in-process electrical characterization. The latter, in combination with a model of the titanium resistivity versus thickness, allows control of the metal line depth in the nanometer range. In summary, we have developed a planarization end point detection method for metal nanostructures. In addition, the model adopted covers geometrical influences like oxidation and ageing. The fabricated titanium nanowire test structures have a thickness ranging from 2 to 25 nm and a width ranging between 15 and 230 nm.
RESUMO
We report the local electronic and magnetic properties of Bi(2)FeCrO(6) nanostructures by element-specific polarized x-ray techniques. Sizable magnetic ordering in the remanent state is observed at room temperature for both Fe and Cr ions. The Bi(2)FeCrO(6) system offers an example of d(5)-d(3) magnetic superexchange interaction with a magnetic order for both Fe and Cr, which are both formally in the + 3 valence state. The results suggest a coexistence of antiferromagnetic and ferromagnetic superexchange interaction between Fe and Cr spins in the nanostructures at the remanent state and at room temperature.
