Ultrastable 3D Heterogeneous Integration via N-Heterocyclic Carbene Self-Assembled Nanolayers.

The commercialization of 3D heterogeneous integration through hybrid bonding has accelerated, and accordingly, Cu-polymer bonding has gained significant attention as a means of overcoming the limitations of conventional Cu-SiO2 hybrid bonding, offering high compatibility with other fabrication processes. Polymers offer robust bonding strength and a low dielectric constant, enabling high-speed signal transmission with high reliability, but suffer from low thermomechanical stability. Thermomechanical stability of polymers was not achieved previously because of thermal degradation and unstable anchoring. To overcome these limitations, wafer-scale Cu-polymer bonding via N-heterocyclic carbene (NHC) nanolayers was presented for 3D heterogeneous integration, affording ultrastable packing density, crystallinity, and thermal properties. NHC nanolayers were deposited on copper electrodes via electrochemical deposition, and wafer-scale 3D heterogeneous integration was achieved by adhesive bonding at 170 °C for 1 min. Ultrastable conductivity and thermomechanical properties were observed by the spatial mapping of conductivity, work function, and force-distance curves. With regard to the characterization of NHC nanolayers, low-temperature bonding, robust corrosion inhibition, enhanced electrical conductivity, back-end-of-line process compatibility, and fabrication process reduction, NHC Cu/polymer bonding provides versatile advances in 3D heterogeneous integration, indicating that NHC Cu/polymer bonding can be utilized as a platform for future 3D vertical chip architectures.

Normal mode analysis in multi-coupled non-Hermitian optical nanocavities.

Coupled optical cavities are an attractive on-chip optical platform for realizing quantum mechanical concepts in electrodynamics and further developing non-Hermitian photonics. In such systems, an intercavity interaction is often considered as a key parameter to understand the system's behaviors but its estimation/calculation is typically limited for some simplified systems owing to extended complexities. For example, multi-coupled photonic crystal (PhC) nanocavities exhibiting strong resonances with a large free spectral range can serve as an excellent test-bed to study non-Hermitian optical properties when spatially non-uniform gain is introduced. However, the detailed quantitative analysis such as spectral tracing of cavity normal modes is often limited in commercially available numerical tools because of the required massive computation resources. Herein, we report on a concept of spatial overlap integrals (SOIs) between the eigenmodes in non-coupled PhC nanocavities and utilize them to obtain the intercavity interactions in passively coupled PhC nanocavity systems. With the help of coupling strength factors calculated from SOIs, we were able to fully exploit the coupled mode theory (CMT) and readily trace the detailed spectral behaviors of normal modes in various multi-coupled PhC nanocavities. Full-wave numerical simulation results verified the proposed method, revealing that the characteristics of original eigenmodes from non-coupled PhC nanocavities can act as key building blocks for analyzing the normal modes of multi-coupled PhC nanocavities. We further applied this SOI method to various multi-coupled PhC nanocavities with non-symmetric optical gain/loss distributions and successfully observed the unusual spectral evolution of normal modes and the correspondingly occurring unique non-Hermitian behaviors.

All-Graphene-Contact Electrically Pumped On-Demand Transferrable Nanowire Source.

On-demand NW light sources in a photonic integrated circuit (PIC) have faced several practical challenges. Here, we report on an all-graphene-contact, electrically pumped, on-demand transferrable NW source that is fabricated by implementing an all-graphene-contact approach in combination with a highly accurate microtransfer printing technique. A vertically p-i-n-doped top-down-fabricated semiconductor NW with optical gain structures is electrically pumped through the patterned multilayered graphene contacts. Electroluminescence (EL) spectroscopy results reveal that the electrically driven NW device exhibits strong EL emission between the contacts and displays waveguiding properties. Further, a single NW device is precisely integrated into an existing photonic waveguide to perform light coupling and waveguiding experiments. Three-dimensional numerical simulation results show a good agreement with experimental observations. We believe that our all-graphene-contact approach is readily applicable to various micro/nanostructures and devices, which facilitates stable electrical operation and thus extends their practical applicability in compact integrated circuits.

Long-range surface plasmon polariton detection with a graphene photodetector.

We present an integration of a single Ag nanowire (NW) with a graphene photodetector and demonstrate an efficient and compact detection of long-range surface plasmon polaritons (SPPs). Atomically thin graphene provides an ideal platform to detect the evanescent electric field of SPPs extremely bound at the interface of the Ag NW and glass substrate. Scanning photocurrent microscopy directly visualizes a polarization-dependent excitation and detects the SPPs. The SPP detection responsivity is readily controlled up to ∼17 mA/W by the drain-source voltage. We believe that the graphene SPP detector will be a promising building block for highly integrated photonic and optoelectronic circuits.

Layer number identification of CVD-grown multilayer graphene using Si peak analysis.

Since the successful exfoliation of graphene, various methodologies have been developed to identify the number of layers of exfoliated graphene. The optical contrast, Raman G-peak intensity, and 2D-peak line-shape are currently widely used as the first level of inspection for graphene samples. Although the combination analysis of G- and 2D-peaks is powerful for exfoliated graphene samples, its use is limited in chemical vapor deposition (CVD)-grown graphene because CVD-grown graphene consists of various domains with randomly rotated crystallographic axes between layers, which makes the G- and 2D-peaks analysis difficult for use in number identification. We report herein that the Raman Si-peak intensity can be a universal measure for the number identification of multilayered graphene. We synthesized a few-layered graphene via the CVD method and performed Raman spectroscopy. Moreover, we measured the Si-peak intensities from various individual graphene domains and correlated them with the corresponding layer numbers. We then compared the normalized Si-peak intensity of the CVD-grown multilayer graphene with the exfoliated multilayer graphene as a reference and successfully identified the layer number of the CVD-grown graphene. We believe that this Si-peak analysis can be further applied to various 2-dimensional (2D) materials prepared by both exfoliation and chemical growth.

Subwavelength core/shell cylindrical nanostructures for novel plasmonic and metamaterial devices.

In this review, we introduce novel plasmonic and metamaterial devices based on one-dimensional subwavelength nanostructures with cylindrical symmetry. Individual single devices with semiconductor/metal core/shell or dielectric/metal core/multi-shell structures experience strong light-matter interaction and yield unique optical properties with a variety of functions, e.g., invisibility cloaking, super-scattering/super-absorption, enhanced luminescence and nonlinear optical activities, and deep subwavelength-scale optical waveguiding. We describe the rational design of core/shell cylindrical nanostructures and the proper choice of appropriate constituent materials, which allow the efficient manipulation of electromagnetic waves and help to overcome the limitations of conventional homogeneous nanostructures. The recent developments of bottom-up synthesis combined with the top-down fabrication technologies for the practical applications and the experimental realizations of 1D subwavelength core/shell nanostructure devices are briefly discussed.

Enhancement of Light Absorption in Silicon Nanowire Photovoltaic Devices with Dielectric and Metallic Grating Structures.

We report the enhancement of light absorption in Si nanowire photovoltaic devices with one-dimensional dielectric or metallic gratings that are fabricated by a damage-free, precisely aligning, polymer-assisted transfer method. Incorporation of a Si3N4 grating with a Si nanowire effectively enhances the photocurrents for transverse-electric polarized light. The wavelength at which a maximum photocurrent is generated is readily tuned by adjusting the grating pitch. Moreover, the electrical properties of the nanowire devices are preserved before and after transferring the Si3N4 gratings onto Si nanowires, ensuring that the quality of pristine nanowires is not degraded during the transfer. Furthermore, we demonstrate Si nanowire photovoltaic devices with Ag gratings using the same transfer method. Measurements on the fabricated devices reveal approximately 27.1% enhancement in light absorption compared to that of the same devices without the Ag gratings without any degradation of electrical properties. We believe that our polymer-assisted transfer method is not limited to the fabrication of grating-incorporated nanowire photovoltaic devices but can also be generically applied for the implementation of complex nanoscale structures toward the development of multifunctional optoelectronic devices.

Spatially localized wavelength-selective absorption in morphology-modulated semiconductor nanowires.

In this study, we proposed morphology-modulated Si nanowires (NWs) with a hexagonal cross-section and numerically investigated their resonant optical absorption and scattering properties. The calculated absorption and scattering efficiency spectra of the NWs exhibited optical resonances that could be controlled by tuning the aspect ratio (AR) of the NW cross-sectional shapes. The spectra also revealed interesting spectral behaviors including resonant peak shifts in the absorption spectrum and asymmetric line shapes in the scattering spectrum. To achieve spatially confined and wavelength-selective light absorption, we periodically modulated the geometry of the diameter in a single NW by combining two different ARs; we call these "diameter-modulated NWs." We designed various diameter-modulated NWs with short and long pitch sizes, and we observed unique and interesting features in the optical resonance and corresponding light absorption spectra such as grating modes and three-dimensional cavity modes. The proposed diameter-modulated NWs can be promising building blocks for the nanoscale localized light absorption and detection in compact nanophotonic integrated circuits.

Direct observation of exceptional points in coupled photonic-crystal lasers with asymmetric optical gains.

Although counter-intuitive features have been observed in non-Hermitian optical systems based on micrometre-sized cavities, the achievement of a simplified but unambiguous approach to enable the efficient access of exceptional points (EPs) and the phase transition to desired lasing modes remains a challenge, particularly in wavelength-scale coupled cavities. Here, we demonstrate coupled photonic-crystal (PhC) nanolasers with asymmetric optical gains, and observe the phase transition of lasing modes at EPs through tuning of the area of graphene cover on one PhC cavity and systematic scanning photoluminescence measurements. As the gain contrast between the two identical PhC cavities exceeds the intercavity coupling, the phase transition occurs from the bonding/anti-bonding lasing modes to the single-amplifying lasing mode, which is confirmed by the experimental measurement of the mode images and the theoretical modelling of coupled cavities with asymmetric gains. In addition, we demonstrate active tuning of EPs by controlling the optical loss of graphene through electrical gating.

Characteristics of strain-sensitive photonic crystal cavities in a flexible substrate.

High-index semiconductor photonic crystal (PhC) cavities in a flexible substrate support strong and tunable optical resonances that can be used for highly sensitive and spatially localized detection of mechanical deformations in physical systems. Here, we report theoretical studies and fundamental understandings of resonant behavior of an optical mode excited in strain-sensitive rod-type PhC cavities consisting of high-index dielectric nanorods embedded in a low-index flexible polymer substrate. Using the three-dimensional finite-difference time-domain simulation method, we calculated two-dimensional transverse-electric-like photonic band diagrams and the three-dimensional dispersion surfaces near the first Γ-point band edge of unidirectionally strained PhCs. A broken rotational symmetry in the PhCs modifies the photonic band structures and results in the asymmetric distributions and different levels of changes in normalized frequencies near the first Γ-point band edge in the reciprocal space, which consequently reveals strain-dependent directional optical losses and selected emission patterns. The calculated electric fields, resonant wavelengths, and quality factors of the band-edge modes in the strained PhCs show an excellent agreement with the results of qualitative analysis of modified dispersion surfaces. Furthermore, polarization-resolved time-averaged Poynting vectors exhibit characteristic dipole-like emission patterns with preferentially selected linear polarizations, originating from the asymmetric band structures in the strained PhCs.

Encoding Active Device Elements at Nanowire Tips.

Semiconductor nanowires and other one-dimensional materials are attractive for highly sensitive and spatially confined electrical and optical signal detection in biological and physical systems, although it has been difficult to localize active electronic or optoelectronic device function at one end of such one-dimensional structures. Here we report a new nanowire structure in which the material and dopant are modulated specifically at only one end of nanowires to encode an active two-terminal device element. We present a general bottom-up synthetic scheme for these tip-modulated nanowires and illustrate this with the synthesis of nanoscale p-n junctions. Electron microscopy imaging verifies the designed p-Si nanowire core with SiO2 insulating inner shell and n-Si outer shell with clean p-Si/n-Si tip junction. Electrical transport measurements with independent contacts to the p-Si core and n-Si shell exhibited a current rectification behavior through the tip and no detectable current through the SiO2 shell. Electrical measurements also exhibited an n-type response in conductance versus water-gate voltage with pulsed gate experiments yielding a temporal resolution of at least 0.1 ms and ∼90% device sensitivity localized to within 0.5 µm from the nanowire p-n tip. In addition, photocurrent experiments showed an open-circuit voltage of 0.75 V at illumination power of ∼28.1 µW, exhibited linear dependence of photocurrent with respect to incident illumination power with an estimated responsivity up to ∼0.22 A/W, and revealed localized photocurrent generation at the nanowire tip. The tip-modulated concept was further extended to a top-down/bottom-up hybrid approach that enabled large-scale production of vertical tip-modulated nanowires with a final synthetic yield of >75% with >4300 nanowires. Vertical tip-modulated nanowires were fabricated into >50 individually addressable nanowire device arrays showing diode-like current-voltage characteristics. These tip-modulated nanowire devices provide substantial opportunity in areas ranging from biological and chemical sensing to optoelectronic signal and nanoscale photodetection.

A high-resolution strain-gauge nanolaser.

Interest in mechanical compliance has been motivated by the development of flexible electronics and mechanosensors. In particular, studies and characterization of structural deformation at the fundamental scale can offer opportunities to improve the device sensitivity and spatiotemporal response; however, the development of precise measurement tools with the appropriate resolution remains a challenge. Here we report a flexible and stretchable photonic crystal nanolaser whose spectral and modal behaviours are sensitive to nanoscale structural alterations. Reversible spectral tuning of ∼26 nm in lasing wavelength, with a sub-nanometre resolution of less than ∼0.6 nm, is demonstrated in response to applied strain ranging from -10 to 12%. Instantaneous visualization of the sign of the strain is also characterized by exploring the structural and corresponding modal symmetry. Furthermore, our high-resolution strain-gauge nanolaser functions as a stable and deterministic strain-based pH sensor in an opto-fluidic system, which may be useful for further analysis of chemical/biological systems.

Invisible Hyperbolic Metamaterial Nanotube at Visible Frequency.

Subwavelength-scale metal and dielectric nanostructures have served as important building blocks for electromagnetic metamaterials, providing unprecedented opportunities for manipulating the optical response of the matter. Recently, hyperbolic metamaterials have been drawing particular interest because of their unusual optical properties and functionalities, such as negative refraction and hyperlensing of light. Here, as a promising application of a hyperbolic metamaterial at visible frequency, we propose an invisible nanotube that consists of metal and dielectric alternating thin layers. The theoretical study of the light scattering of the layered nanotube reveals that almost-zero scattering can be achieved at a specific wavelength when the transverse-electric- or transverse-magnetic-polarized light is incident to the nanotube. In addition, the layered nanotube can be described as a radial-anisotropic hyperbolic metamaterial nanotube. The low scattering occurs when the effective permittivity of the hyperbolic nanotube in the angular direction is near zero, and thus the invisibility of the layered nanotube can be efficiently obtained by analyzing the equivalent hyperbolic nanotube. Our new method to design and tune an invisible nanostructure represents a significant step toward the practical implementation of unique nanophotonic devices such as invisible photodetectors and low-scattering near-field optical microscopes.

Facet-Selective Epitaxy of Compound Semiconductors on Faceted Silicon Nanowires.

Integration of compound semiconductors with silicon (Si) has been a long-standing goal for the semiconductor industry, as direct band gap compound semiconductors offer, for example, attractive photonic properties not possible with Si devices. However, mismatches in lattice constant, thermal expansion coefficient, and polarity between Si and compound semiconductors render growth of epitaxial heterostructures challenging. Nanowires (NWs) are a promising platform for the integration of Si and compound semiconductors since their limited surface area can alleviate such material mismatch issues. Here, we demonstrate facet-selective growth of cadmium sulfide (CdS) on Si NWs. Aberration-corrected transmission electron microscopy analysis shows that crystalline CdS is grown epitaxially on the {111} and {110} surface facets of the Si NWs but that the Si{113} facets remain bare. Further analysis of CdS on Si NWs grown at higher deposition rates to yield a conformal shell reveals a thin oxide layer on the Si{113} facet. This observation and control experiments suggest that facet-selective growth is enabled by the formation of an oxide, which prevents subsequent shell growth on the Si{113} NW facets. Further studies of facet-selective epitaxial growth of CdS shells on micro-to-mesoscale wires, which allows tuning of the lateral width of the compound semiconductor layer without lithographic patterning, and InP shell growth on Si NWs demonstrate the generality of our growth technique. In addition, photoluminescence imaging and spectroscopy show that the epitaxial shells display strong and clean band edge emission, confirming their high photonic quality, and thus suggesting that facet-selective epitaxy on NW substrates represents a promising route to integration of compound semiconductors on Si.

Plateau-Rayleigh crystal growth of periodic shells on one-dimensional substrates.

The Plateau-Rayleigh instability was first proposed in the mid-1800s to describe how a column of water breaks apart into droplets to lower its surface tension. This instability was later generalized to account for the constant volume rearrangement of various one-dimensional liquid and solid materials. Here, we report a growth phenomenon that is unique to one-dimensional materials and exploits the underlying physics of the Plateau-Rayleigh instability. We term the phenomenon Plateau-Rayleigh crystal growth and demonstrate that it can be used to grow periodic shells on one-dimensional substrates. Specifically, we show that for certain conditions, depositing Si onto uniform-diameter Si cores, Ge onto Ge cores and Ge onto Si cores can generate diameter-modulated core-shell nanowires. Rational control of deposition conditions enables tuning of distinct morphological features, including diameter-modulation periodicity and amplitude and cross-sectional anisotropy. Our results suggest that surface energy reductions drive the formation of periodic shells, and that variation in kinetic terms and crystal facet energetics provide the means for tunability.

Strong interactive growth behaviours in solution-phase synthesis of three-dimensional metal oxide nanostructures.

Wet-chemical synthesis is a promising alternative to the conventional vapour-phase method owing to its advantages in commercial-scale production at low cost. Studies on nanocrystallization in solution have suggested that growth rate is commonly affected by the size and density of surrounding crystals. However, systematic investigation on the mutual interaction among neighbouring crystals is still lacking. Here we report on strong interactive growth behaviours observed during anisotropic growth of zinc oxide hexagonal nanorods arrays. In particular, we found multiple growth regimes demonstrating that the diameter of the rod is dependent on its height. Local interactions among the growing rods result in cases where height is irrelevant to the diameter, increased with increasing diameter or inversely proportional to the diameter. These phenomena originate from material diffusion and the size-dependent Gibbs-Thomson effect that are universally applicable to a variety of material systems, thereby providing bottom-up strategies for diverse three-dimensional nanofabrication.

Design of plasmonic cavities.

In this review paper, we introduce the unique optical properties of high-quality, fully three-dimensional, subwavelength-scale plasmonic cavities. Surface-plasmon-polaritons excited at dielectric-metal interfaces are strongly confined in such cavities. The field profiles of plasmonic modes, their temperature-dependent quality factors, and subwavelength mode volumes are calculated and analyzed systematically using three-dimensional finite-difference time-domain simulations. Reasonable design of high-quality plasmonic cavities opens an opportunity to demonstrate novel plasmonic lasers enabling the further miniaturization of coherent light sources for use in ultra-compact photonic integrated circuits.

A double-strip plasmonic waveguide coupled to an electrically driven nanowire LED.

We demonstrate the efficient integration of an electrically driven nanowire (NW) light source with a double-strip plasmonic waveguide. A top-down-fabricated GaAs NW light-emitting diode (LED) is placed between two straight gold strip waveguides with the gap distance decreasing to 30 nm at the end of the waveguide and operated by current injection through the p-contact electrode acting as a plasmonic waveguide. Measurements of polarization-resolved images and spectra show that the light emission from the NW LED was coupled to a plasmonic waveguide mode, propagated through the waveguide, and was focused onto a subwavelength-sized spot of surface plasmon polaritons at the tapered end of the waveguide. Numerical simulation agreed well with these experimental results, confirming that a symmetric plasmonic waveguide mode was excited on the top surface of the waveguide. Our demonstration of a plasmonic waveguide coupled to an electrically driven NW LED represents important progress toward further miniaturization and practical implementation of ultracompact photonic integrated circuits.

Ultrasmall subwavelength nanorod plasmonic cavity.

We propose an ultrasmall plasmonic cavity consisting of a high-index/low-index dielectric nanorod covered with silver. Full three-dimensional subwavelength confinement of the surface-plasmon polaritons was achieved at the high-index dielectric-silver interface without propagating to the low-index dielectric-silver interface. The numerical simulations showed that the plasmonic mode excited in this cavity has a deep subwavelength mode volume of 0.0038(λ/2n)(3) and a quality factor of 1500 at 40 K, and consequently a large Purcell factor of ∼2×10(5). Therefore, this plasmonic cavity is expected to be useful for the demonstration of high-efficiency single photon sources or low-threshold lasers in an ultracompact nanophotonic circuit.

Characteristics of dielectric-band modified single-cell photonic crystal lasers.

We demonstrate new types of dielectric-band photonic crystal lasers in a two-dimensional modified single-cell cavity with enlarged air holes. Finite-difference time-domain simulations performed in real and Fourier spaces show that the dielectric-band cavity modes originating from the first band edge point in the dielectric band have mode patterns that are distinguishable from conventional air-band cavity modes. In our experiment, the observed multimode lasing peaks are identified as the hexapole and the monopole dielectric-band cavity modes through the spectral positions and mode images. The thresholds of these lasers are measured as approximately 340 microW and approximately 450 microW, respectively, at room temperature. In addition, using the simulation based on the actual fabricated structures, quality factors and mode volumes are computed as 4900 and 1.09 (lambda/n)3 for the hexapole mode, and 4300 and 2.27 (lambda/n)3 for the monopole mode, respectively.