Design of tunable GHz-frequency optomechanical crystal resonators.

We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V2 with an on-chip capacitor that was optimized to exert forces up to 1 µN at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 × 106 place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g0/2π = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities.

Maximizing Photoluminescence Extraction in Silicon Photonic Crystal Slabs.

Photonic crystal modes can be tailored for increasing light matter interactions and light extraction efficiencies. These PhC properties have been explored for improving the device performance of LEDs, solar cells and precision biosensors. Tuning the extended band structure of 2D PhC provides a means for increasing light extraction throughout a planar device. This requires careful design and fabrication of PhC with a desirable mode structure overlapping with the spectral region of emission. We show a method for predicting and maximizing light extraction from 2D photonic crystal slabs, exemplified by maximizing silicon photoluminescence (PL). Systematically varying the lattice constant and filling factor, we predict the increases in PL intensity from band structure calculations and confirm predictions in micro-PL experiments. With the near optimal design parameters of PhC, we demonstrate more than 500-fold increase in PL intensity, measured near band edge of silicon at room temperature, an enhancement by an order of magnitude more than what has been reported.