1.
Opt Lett
; 28(21): 2019-21, 2003 Nov 01.
Artigo
em Inglês
| MEDLINE
| ID: mdl-14587801
RESUMO
A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.