Extending the Linearity of AlScN Contour-Mode Resonators Through Acoustic Metamaterials-Based Reflectors.

This work describes the implementation of acoustic metamaterials (AMs) made of a forest of rods at the sides of a suspended aluminum scandium nitride (AlScN) contour-mode resonator (CMR) to increase its power handling without causing degradations of its electromechanical performance. The increase in usable anchoring perimeter with respect to conventional CMR designs, enabled by the adoption of two AM-based lateral anchors, permits to achieve improved heat conduction from the resonator's active region to the substrate. Furthermore, thanks to such AM-based lateral anchors' unique acoustic dispersion features, the attained increase of anchored perimeter does not cause any degradations of the CMR's electromechanical performance, even leading to a ~15% improvement in the measured quality factor. Finally, we experimentally show that using our AM-based lateral anchors leads to a more linear CMR's electrical response, which is enabled by a 32% reduction of its Duffing nonlinear coefficient with respect to the corresponding value attained by a conventional CMR design that uses fully etched lateral sides.

Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators.

The increasing use of mobile broadband requires new acoustic filtering technologies that can operate efficiently at frequencies above 6 GHz. Previous research has shown that AlN Super High Frequency (SHF) Cross-Sectional Lamé Mode resonators (CLMRs) can address this challenge, but their performance is limited by the piezoelectric strength of AlN. In this work, we explore the use of substitutional doping of Al in AlN with Sc to enhance the kt2 values of SHF CLMRs. Our results showed that the measured kt2·Qm product of Al72Sc28N CLMRs was four times greater than that of AlN CLMRs operating at the same frequency. Additionally, the measured fractional bandwidth (FWB) of Al72Sc28N 2nd order ladder filters was 4.13%, a fourfold improvement over AlN filters with the same design. We also discuss other aspects of the technology, such as power handling, losses, and spurious mode suppression, and identify potential areas for future research.

Effect of Substrate-RF on Sub-200 nm Al0.7Sc0.3N Thin Films.

Sc-doped aluminum nitride is emerging as a new piezoelectric material which can substitute undoped aluminum nitride (AlN) in radio-frequency MEMS applications, thanks to its demonstrated enhancement of the piezoelectric coefficients. Furthermore, the recent demonstration of the ferroelectric-switching capability of the material gives AlScN the possibility to integrate memory functionalities in RF components. However, its high-coercive field and high-leakage currents are limiting its applicability. Residual stress, growth on different substrates, and testing-temperature have already been demonstrated as possible knobs to flatten the energy barrier needed for switching, but no investigation has been reported yet on the whole impact on the dielectric and ferroelectric dynamic behavior of a single process parameter. In this context, we analyze the complete spectrum of variations induced by the applied substrate-RF, from deposition characteristics to dielectric and ferroelectric properties, proving its effect on all of the material attributes. In particular, we demonstrate the possibility of engineering the AlScN lattice cell to properly modify leakage, breakdown, and coercive fields, as well as polarization charge, without altering the crystallinity level, making substrate-RF an effective and efficient fabrication knob to ease the limitations the material is facing.

Radio Frequency Angular Momentum Biased Quasi-LTI Nonreciprocal Acoustic Filters.

We report on the design and operation of a novel class of nonreciprocal acoustic filters operating in the radio frequency (RF) range. These devices use the spectral characteristics of commercial acoustic filters placed in angular momentum biased networks to achieve large nonreciprocity, low insertion loss (I.L.), and wideband operation. Owing to the high rejection exhibited by acoustic filters, these novel devices can achieve an unprecedented suppression of undesired intermodulation products, thus approaching the spectral purity attained by conventional linear-time-invariant (LTI) filtering components. In addition, a new analytical model suitable to capture the behavior of any angular-momentum-biased nonreciprocal device is presented. This model allows us to identify the main characteristics of the transfer function (poles and zeroes) relative to this new class of nonreciprocal filters, thus enabling new synthesis capabilities through standard numerical methods. Ultimately, the performance of a built 1.1-GHz nonreciprocal acoustic filter prototype is reported. This device relies on a modulation implemented through switched capacitors and shows I.L., isolation, and half-power bandwidth values of 4.5 dB, 28 dB, and 20 MHz, respectively, achieved through the use of a 40-MHz modulation frequency. Moreover, by showing an intermodulation distortion lower than -34 dBc, it approaches the operation of LTI circuits.