A new cost effective method of planarisation for multiple metal layers in the sub-100 nm-region.

The availability of multiple metal layers has become essential for high-density layouts and economic chip size. The presented paper describes an efficient and low-cost alternative to Chemical-Mechanical-Polishing (CMP). The method uses an auxiliary wafer as a sort of plunger. Starting with a preprocessed wafer, for example from a Complementary-Metal-Oxide-Semiconductor (CMOS) technology, a spin-on glass is applied before the deposition of the first metal layer. Afterwards a second silicon wafer will be covered homogeneously with photo resist and subsequentially coated with aluminum or titanium. This wafer serves as a plunger, while the metal layer protects the photo resist against impression. Whilst the plunger is pressed down on the spin-on glass, the first wafer is cooled down bonding the two wafers together. Separation of the wafers is accomplished by removing the photo resist layer. After the separation step any remaining photo resist as well as the aluminum layer are removed by etching. This process results in a planar surface which is optimally suited for the deposition and structuring of further metal layers which lead to more freedom concerning the complex interconnects in modern analog and digital circuits.

[Sebaceous carcinoma of the parotid gland]. / Rak z komórek lojowych (carcinoma sebaceum) slinianki przyusznej.

A patient with sebaceous carcinoma of the parotid gland was described. Histologic criteria of the diagnosis were shown. On the basis on the review of literature repartition and characterization of this kind of neoplasms was discussed.

[Neurogenic sarcoma of the vagal nerve]. / Nerwiakomiesak (nerilemmona sarcomatosum) nerwu blednego.

A rare case of neurogenic sarcoma of the vagal nerve was presented. Ten cases of such location have been described so far. Neurogenic sarcoma derives from supported elements of peripheral nerves. Its development is asymptomatic and usually the first manifestation is the occurrence of the tumour. This kind of disease is local malignant neoplasm, but it can give metastases, and then the prognosis is significantly worse. The modern treatment is radiotherapy with preceding radical dissection.

[A case of glomus caroticum malignum]. / Przypadek glomus caroticum malignum.

In the paper by the case of glomus caroticum malignum of a woman aged 54 was presented. The tumor was taken out operatively without any difficulties by splitting mandibulae and cutting the muscles of the mouth bottom with wide exposure of the parapharyngeal space. This way of operations is considered and proved us a practicable method concerning the localization of the tumor.